Study on silicon surface oxidation of post-implant resist cleaning

Minimum substrate loss is required for resist strip of high dose, ultra shallow junction implant for source/drain extensions. Silicon surface oxidation of downstream plasma resist strip results in silicon recess of the source/drain extension regions. This paper reports the study of silicon surface oxidation for different resist strip plasma chemistries and the effect of plasma strip process parameters such as power, pressure and temperature on silicon surface oxidation. A good agreement was found between optical ellipsometry, XPS (X-ray photoelectron spectroscopy) and TEM (transmission electron spectroscopy) for thickness measurement of very thin (<20 Å) oxide grown on silicon surface due to plasma exposure. Selectivity of crust breakthrough and resist removal over silicon oxidation was also discussed in this paper along with dopant loss.     

电脉冲沉积铝化物及铝化物-Y_2O_3涂层

采用电脉冲沉积技术在 2 0碳钢表面上获得了冶金结合的晶粒尺寸约为几十到几百纳米的铝化物和铝化物 弥散Y2 O3复合微晶涂层。60 0℃空气中氧化 10 0h的结果表明 ,电脉冲沉积获得的两种涂层均可显著地降低 2 0碳钢的氧化速率并提高氧化层的抗剥落性能。用AFM ,SEM ,EDS和XRD对铝化物涂层及氧化层进行了分析 ,并讨论了两种涂层提高抗氧化性能的作用机制     

Strength measurements of silica optical fibers under severe environment

Optical fibers are key components in telecommunication technologies. Apart from optical specifications, optical fibers are expected to keep most of their physical properties for 10–20 years in current operating conditions. The reliability and the expected lifetime of optical links are closely related to action of the chemical environment on the silica network. However, the coating also contributes largely to the mechanical properties of the fibers.The aim of this work was to study the strength and the mechanical behavior of the silica optical fibers in an acid environment and with a permanent deformation. A container with ammonium bifluoride acid salt was plunged into hot water at different temperatures (55 and 75 °C). This emitted acid vapors which attacked the optical fibers for a period of 1–18 days. An aging study was performed on silica optical fibers with standard polyacrylate coating and with hermetic carbon coating. A dynamic two-point bending bench at different faceplate velocities (100, 200, 400 and 800 μm/s) was used. For comparison, the same dynamic measurements were also carried out on non-aged fibers.After acid vapor condensation, salt crystal deposits on the fibers were displayed using an electron scanning microscope. These crystals became visible to the naked eye from the seventh day.     

Erosion behavior of EEDS cermet coatings

This paper investigates the erosion performance of electro-thermal explosion directional spraying (EEDS) cermet WC/Co coatings using an air solid particle erosion rig. The influences of the different parameters such as impact angle, impingement velocity, environment temperature, particle diameter, on the erosion property of the coatings were studied. The eroded surfaces were examined by scanning electron microscopy (SEM) equipped with energy dispersive spectrometry (EDS) and the erosion mechanisms were discussed. The structure and bond characters of the coatings were also determined by transmission electron microscopy (TEM), X-ray diffraction (XRD) and SEM.The results indicate that the EEDS WC/Co coatings are characterized by fine grain structure, good metallurgical bond and brittle erosion character. The erosion rates of the coatings decrease with temperature increasing and increase with impact angle and impingement velocity increasing. At elevated temperature, the oxidation happens on the coatings surface, which affects the erosion behavior.     

石墨负极表面聚合物功能保护膜对 锂离子电池存储寿命的提升

采用溶液浸渍法制备了聚乙烯醇(PVA)均匀包覆的石墨并研究了其微观形貌及电化学性能. 以LiNi_0.8Co_0.15Al_0.05O₂(NCA)为正极材料、 PVA包覆石墨为负极材料组装成软包电池和钢壳电池, 研究了PVA功能保护膜对全电池的电化学性能和存储寿命的影响. 结果表明, 存储过程中PVA功能保护膜可以有效抑制电解液和石墨内嵌锂反应的发生, 延长电池的存储寿命.     

2,4-二氯苯甲酸改性饱和聚酯的合成及其聚氨酯阻燃涂料

用2,4-二氯苯甲酸改性三羟甲基丙烷制得含氯的多元醇中间体（NHDB）,用改性的中间体合成含氯的聚酯。用红外、核磁表征了中间体和聚醇的结构,TGA分析表明,含氯量增高,聚酯热稳性下降。将聚酯同异氰酸酯预聚体常温固化,各种性能良好。阻燃测试表明：含30%的2,4-二氯苯甲酸的聚酯具有自熄功能。提出了阻燃机理。     

Synthesis and characterization of alternating copolymers containing triphenylamine as hole‐transporting units

A series of light‐emitting poly(p‐phenylene vinylene)s with triphenylamine units as hole‐transporting moieties in the main chain were synthesized via Wittig condensation in good yields. The newly formed vinylene double bonds possessed a trans configuration, which was confirmed by Fourier transform infrared and NMR spectroscopy. The high glass‐transition temperature (83–155 °C) and high decomposition temperature (>300 °C) suggested that the resulting copolymers possessed high thermal stability. These copolymers, especially TAAPV1, possessed a high weight‐average molecular weight (47,144) and a low polydispersity index (1.55). All the copolymers could be dissolved in common organic solvents, such as tetrahydrofuran (THF), CHCl₃, CH₂Cl₂, and toluene, and exhibited intense photoluminescence in THF (the emission maxima were located from 478 to 535 nm) and in film (from 478 to 578 nm). The low onsets of the oxidation potential (0.6–0.75 V) suggested that the alternating copolymers possessed a good hole‐transporting property due to the incorporation of triphenylamine moieties. © 2001 John Wiley & Sons, Inc. J Polym Sci Part A: Polym Chem 39: 3278–3286, 2001     

陶瓷真空室镀膜工艺改进及脉冲磁场时间特性测量

介绍了合肥光源二期工程注入段陶瓷真空室的改进情况,采用新的镀膜技术,大大改善了脉冲磁场的延时特性,减少了储存环注入时的轨道扰动,提高了注入束流累积效速率。改进了原来的点线圈磁场测量方法,采用带有积分电路及抗干扰措施的双线圈测量装置测量了真空室内的脉冲磁场延时特性,使脉冲磁场延时误差测量的分辨率达到ns量级,给出了测量结果。