Structural and optical properties of vertically aligned InP nanowires grown by metal organic vapor phase epitaxy

Vertically aligned InP nanowires were successfully grown by metalorganic vapor phase epitaxy under metal-catalyzed vapor–liquid–solid growth processes. Au nanoparticles with a nominal diameter of 20 nm were used as the seed to control the diameter of the nanowires. Scanning and transmission electron microscopic studies showed highly dense nanowires with uniform diameters along the length direction, and the zinc-blende structure of the nanowires with 1 1 1 growth direction, respectively. Cathodeluminescence measurements showed a significant blueshift in the spectral peak position compared to bulk InP due to the quantum confinement of the carriers in the nanowires.     

Metalorganic vapor phase epitaxial growth,characterization and annealing experiments on InP doping superlattices

InP doping superlattices (DSLs) were grown by atmospheric pressure metalorganic vapor phase epitaxy (MOVPE) and their stability was examined by annealing at high temperatures. Diethylzinc (DEZ) and H₂S were used asp- andn-type doping sources, respectively. Photoluminescence (PL) measurements performed on as grown layers show a shift of the main emission peak with increasing excitation power in very good agreement with theoretical models. A comparison of the PL results between these structures and the annealed samples show that even at very high temperatures (up to 850° C) the tunability of the effective bandgap of the annealed superlattices is possible, although less pronounced than for the as grown layers. This is due to diffusion of the dopants, into adjacent layers and partial compensation of each other. Secondary ion mass spectrometry (SIMS) done on the as grown and annealed samples shows that only the Zn atoms diffuse. Diffusion coefficients obtained from the SIMS profiles give values in the range 1 × 10⁻¹⁴ <D < 9 × 10⁻¹⁴ cm²/s, still smaller than other published values estimated on layers, which did not suffer any treatment. This shows the high quality and stability of our layers even at high temperatures.     

HigHighly strained InGaAs/GaAs quantum wells emitting beyond 1.2 µm

Highly strained In_xGa_1–xAs quantum wells (QWs) with GaAs barriers emitting around 1.2 µm are grown on GaAs substrates by metal organic vapour phase epitaxy (MOVPE) at low growth temperatures using conventional precursors. The effects of growth temperature, V/III ratio and growth rate on QW composition and luminescence properties are studied. The variation of indium incorporation with V/III ratio at a growth temperature of 510 °C is found to be opposite to the results reported for 700 °C. By an appropriate choice of the growth parameters, we could extend the room temperature photoluminescence (PL) wavelength of InGaAs/GaAs QWs up to about 1.24 µm which corresponds to an average indium content of 41% in the QW. The results of the growth study were applied to broad area laser diodes emitting at 1193 nm with low threshold current densities. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

A Quasi-Thermodynamic Model of MOVPE of InGaN

A quasi-thermodynamic model of MOVPE growth of InxGa1-xN alloys has been proposed with TMGa, TMIn and ammonia as source materials. In this improved model, the effect of low decomposition rate of ammonia is considered and the number of moles is used to express the mass conservation constraints on element N, H, In and Ga. It is assumed that the alloy was synthesized by the reactions between ammonia and group Ⅲ elements. The equilibrium partial pressures over the InxGa1-xN have been calculated. For the InxCa1-xalloys the relationship between the input vapor and the deposited solid composition has been calculated and the results compared with the literature data. The good agreement on the compositions from calculation and the experiment shows that our improved model is suitable for applying to the In xGa1- xNalloys grown by MOVPE. It is difficult for InxGa1-xN alloy to grow, especially for high-indium alloys, because InxGa1-xN is an immiscible alloy and InN has a very high In vapor pressure. It is also shown that gallium has strong tendency of preferential incorporation into the InxGa1-xN alloy. In order to enhance the incorporation of indium into the InGaN, we should use the lower growth-temperature ,lower reactor pressure, higher input V/Ⅲ ratio and higher nitrogen fraction in the carrier gas, in addition, the decomposed fraction of ammonia should also be reduced. Indium droplets would be deoosed if the growing conditions were not selected properly.     

Quasi-Thermodynamic Model of MOVPE of InAIN

A quasi-thermodynamic model of MOVPE growth of InxAl1-xN alloy with TMAl,TMIn and ammonia as sources has been proposed. In this improved model,the effect of low decomposition rate of ammonia has been considered and the number of moles is used to express the mass conservation constraints of element N,H,Al and In. It is assumed that the alloy is synthesized by the reactions between ammonia and group Ⅲ elements. The results show that it is more difficult to grow the InxAl1-xN alloy,especially for the InxAl1-xN lattice matched the GaN. In order to enhance the incorporation of indium into InA1N,we should use the lower growth temperature,optimized input Ⅴ/Ⅲ ratio and high nitrogen fraction in the carrier gas. In addition,the decomposed fraction of ammonia should be reduced. Indium droplets would be deposited if the growth conditions have not been selected properly.     

MOVPE growth of AlGaAs/GaInP diode lasers

GaAs-based diode lasers for emission wavelengths between 800 nm and 1060 nm with AlGaAs-cladding and GaInP-waveguide layers were grown by MOVPE. For wavelengths above 940 nm broad area devices with InGaAs QWs show state-of-the-art threshold current densities. Ridge-waveguide lasers fabricated by selective etching achieve 200 mW CW monomode output powers. (In)GaAsP QW-based diode lasers with an emitting wavelengths around 800 nm suffer from problems at the upper GaInP/AlGaAs interface. Asymmetric structures with a lower AlGaAs/GaInP and an upper AlGaAs/AlGaAs waveguide not only avoid this interface but also offer better carrier confinement. Such structures show very high slope efficiencies and a high T₀. Maximum output powers of 7 W CW are obtained from 4 mm long devices.     

Pendeo-epitaxial growth of gallium nitride on silicon substrates

Pendeo-epitaxy (PE)¹ from raised, [0001] oriented GaN stripes covered with silicon nitride masks has been employed for the growth of coalesced films of GaN(0001) with markedly reduced densities of line and planar defects on Si(111)-based substrates. Each substrate contained previously deposited 3C-SiC(111) and AlN(0001) transition layers and a GaN seed layer from which the stripes were etched. The 3C-SiC transition layer eliminated chemical reactions between the Si and the NH₃ and the Ga metal from the decomposition of triethylgallium. The 3C-SiC and the GaN seed layers, each 0.5 μm thick, were also used to minimize the cracking and warping of the GaN/SiC/silicon assembly caused primarily by the stresses generated on cooling due to the mismatches in the coefficients of thermal expansion. Tilting in the coalesced GaN epilayers of 0.2° was confined to areas of lateral overgrowth over the masks; no tilting was observed in the material suspended above the trenches. The strong, low-temperature PL band-edge peak at 3.456 eV with a FWHM of 17 meV was comparable to that observed in PE GaN films grown on AlN/6H-SiC(0001) substrates.     

Effect of dislocations on 1/f noise of long wavelength infrared photodiodes fabricated with HgCdTe layers grown on GaAs by metalorganic vapor phase epitaxy

We studied the effect of dislocations on the 1/f noise current of long wavelength infrared photodiodes fabricated with HgCdTe layers grown on GaAs by metalorganic vapor phase epitaxy. N-on-p junctions were formed by boron ion implantation into Hg-vacancy doped epilayers. The 1/f noise dominated from 0.5 to 100 Hz, and shot noise caused by photocurrent (√2eI_p) dominated at higher frequencies. We observed two types of 1/f noise. One is caused by the leakage current generated at dislocations, and the other is induced by the photocurrent. The 1/f noise current increased with the photon flux in the low-etch pit density (EPD) range independently of EPD. It increased with EPD in the high-EPD range. The 1/f noise current measured at zero field of view increased with EPD. This suggests that the 1/f noise generated by the photocurrent dominated in the low-EPD range, and that the 1/f noise current caused by dislocations dominated in the high-EPD range. In order to obtain a thermal image of a room-temperature object, the 1/f noise current induced by background photon flux is as high as that caused by dislocations of more than 10⁷ cm⁻². Therefore, the 1/f noise current induced by the photocurrent is dominant in photodiodes fabricated with HgCdTe layers on GaAs, since the EPD is less than 2 x 10⁶ cm⁻². We expect the detectivity to be as high as with LPE-layers. We fabricated 64 x 64 photodiode arrays, and obtained a thermal image.     

用侧向外延生长法降低立方相GaN中的层错密度

尝试用侧向外延(ELOG)方法来降低立方相GaN中的层错密度.侧向外延是在SiO2/GaN/GaAs图形衬底上进行的,对生长所得的立方相GaN外延层用扫描电子显微镜(SEM)和透射电子显微镜(TEM)进行了观察和分析,TEM的平面像表明经过ELOG方法生长后,立方相GaN外延层中的层错密度由侧向外延生长前的5×109cm-2降低至生长后的6×108cm-2.双晶X射线衍射(DCXRD)测量给出侧向外延前后外延层ω扫描(002)衍射摇摆曲线的半高宽(FWHM)分别为33′和17.8′,表明晶体质量有了较大改善.对立方相GaN侧向外延过程中层错减少的机制进行了讨论.     

Thermodynamic analysis of the shape, anisotropy and formation process of InAs/InP(0 0 1) quantum dots and quantum sticks grown by metalorganic vapor phase epitaxy

This study describes the origin of the size and shape anisotropy of InAs/InP(0 0 1) quantum dots (QDs) grown by metalorganic vapor phase epitaxy (MOVPE). The geometry of the QDs is determined by carefully analyzing transmission electron microscopy (TEM) images. An analytical model adapted to our QD geometry is used to understand the formation mechanism of the QDs, and to describe the origin of their size dispersion. A shape transition from QDs to elongated quantum sticks (QS) is observed under As-poor growth conditions. This transition, driven by thermodynamics, is clearly described by our model.