MEMS based low cost piezoresistive microcantilever force sensor and sensor module

In the present work, we report fabrication and characterization of a low-cost MEMS based piezoresistive micro-force sensor with SU-8 tip using laboratory made silicon-on-insulator (SOI) substrate. To prepare SOI wafer, silicon film (0.8 µm thick) was deposited on an oxidized silicon wafer using RF magnetron sputtering technique. The films were deposited in argon (Ar) ambient without external substrate heating. The material characteristics of the sputtered deposited silicon film and silicon film annealed at different temperatures (400–1050 °C) were studied using atomic force microscopy (AFM) and X-ray diffraction (XRD) techniques. The residual stress of the films was measured as a function of annealing temperature. The stress of the as-deposited films was observed to be compressive and annealing the film above 1050 °C resulted in a tensile stress. The stress of the film decreased gradually with increase in annealing temperature. The fabricated cantilevers were 130 μm in length, 40 μm wide and 1.0 μm thick. A series of force–displacement curves were obtained using fabricated microcantilever with commercial AFM setup and the data were analyzed to get the spring constant and the sensitivity of the fabricated microcantilever. The measured spring constant and sensitivity of the sensor was 0.1488 N/m and 2.7 mV/N. The microcantilever force sensor was integrated with an electronic module that detects the change in resistance of the sensor with respect to the applied force and displays it on the computer screen.     

A Highly Accurate Refractive Index Sensor with Two Operation Modes Based on Photonic Crystal Ring Resonator

A 2D hole‐type hexagonal lattice photonic crystal is utilized, herein, to detect the refractive index change of the material infiltrated into the designed circular sensing area which also resembles a ring resonator. The accuracy of the detection process is enhanced considering the simultaneous shift of the resonance wavelengths and the intensity modulation which occur in two separate spectral regions. The presented structure has the ability to detect liquids, material concentrations in fluids and gases having refractive indices in the range of n = 1–2 with sensitivity and quality factor of 61 nm/RIU and 3000, respectively, for resonance‐wavelength‐shift‐based operation. The detection range of n = 1–1.4 with the sensitivity of S = 0.69 NI/RIU is achieved for the intensity‐based measurement and the results show good linearity in the operating range.     

高灵敏度Si基纤毛式MEMS湍流传感器

为了满足湍流探测高灵敏度、高分辨率的要求,提出了一种新型纤毛微电子机械系统(MEMS)湍流传感器。基于MEMS技术制作了硅十字梁敏感受力结构,通过橡胶探头的受力振动传递水中的湍流信号,凭借传感器头部的导流罩来保证传感器的高分辨率探测。对MEMS湍流传感器进行理论和仿真分析,其一阶共振频率达到481.04 Hz。经过海洋环境模拟机测试实验,结果显示其在50 MPa压力下保持了完好的结构和良好的性能,验证了其水下的可靠性。在湍流实验平台进行测试,通过比较标定法得出其灵敏度为1.92×10^-4 V·m·s^2/kg,满足海洋湍流测试要求。     

Design of sextuple-mode triple-ring HTS UWB filter using two-round interpolation

A single-stage ring resonator capable of introducing six modes within the ultra-wideband (UWB) passband is presented. The sextuple-mode resonator consists of three rings and three sets of stepped-impedance open stubs. Based on this sextuple-mode resonator, a UWB filter fed by the interdigital-coupling line (ICL) is designed. And we propose a two-round interpolation method to obtain the filter's initial dimensions. The designed filter is fabricated on a double-sided YBCO/MgO/YBCO high-temperature superconducting (HTS) thin film for demonstration. The experimental results show that this UWB filter produces eight resonances in the passband eventually, which effectively improves the in-band reflection and the band-edge steepness. Moreover, the upper stopband performance is enhanced due to the transmission zeros (TZs) generated by the stepped-impedance open stubs and the ICL structure. The measured good performance verifies the practicability of the two-round interpolation approach, which can also be extended to other odd-even-mode filter designs.     

STABILITY ANALYSIS OF A CAPACITIVE FGM MICRO-BEAM USING MODIFIED COUPLE STRESS THEORY

Based on the Modified Couple Stress Theory,a functionally graded micro-beam under electrostatic forces is studied.The FGM micro-beam is made of two materials and material properties vary continuously along the beam thickness according to a power-law.Dynamic and static pull-in voltages are obtained and it is shown that the static and dynamic pull-in voltages for some materials cannot be obtained using classic theories and components of couple stress must be taken into account.In addition,it is shown that the values of pull-in voltages depend on the variation through the thickness of the volume fractions of the two constituents.     

Compact circular-patch-based bandpass filter for ultra-wideband wireless communication systems

Ultra-wideband (UWB) is a radio technology that enables low-power-level, short-range, and wide-bandwidth communication, and it has been widely applied in personal area networks, precision geolocation, medical, surveillance, and vehicular radar systems. Since Federal Communications Commission released the unlicensed use of the UWB range (3.1–10.6 GHz), a significant attention has been paid to the development of UWB devices, particularly UWB bandpass filters. In this paper, we propose a novel UWB bandpass filter based on circular patch resonator that is grounded by via and perturbed by slits and defected ground structures. The resonator’s behaviour is analysed in detail and it is shown that its specific configuration allows a flexible control of the three lowest resonant modes, which are used to form UWB passband. To demonstrate the potential of the resonator, a UWB filter has been designed, fabricated, and measured. The filter is characterized by the insertion loss lower than 1 dB and return loss higher than 17 dB within the passband, as well as by very small group delay variation of only 0.07 ns. Also, the filter exhibits suppression higher than 19 dB up to 30 GHz, and very small overall dimensions of only 0.31λ_g × 0.31λ_g, and thus it outperforms other published UWB filters.     

基于折叠枝节加载多模谐振器的超宽带滤波器

针对超宽带滤波器的插入损耗和选择性问题,提出一种基于折叠枝节加载多模谐振器结构的超宽带滤波器。通过调节谐振器的阻抗比及电长度比,可以控制谐振频率。仿真与实验结果吻合良好,表明采用折叠枝节加载形式,可以使滤波器具有低插入损耗和良好的选择性。通带范围在2.9~10.7 GHz,带内插入损耗优于1 d B,实现相对带宽114%。     

一种双稳态电磁型射频MEMS开关的设计与测试

设计了一种低电压驱动的双稳态电磁型射频MEMS开关.与驱动电压高这几十伏的静电型射频MEMS开关相比,其驱动电压可低至几伏,因此应用时无需增加电荷泵等升压电路.开关可在磁场驱动下实现双稳态切换,稳态时无直流功率消耗.分析了工作磁场的分布特点,进行了结构设计仿真;并使用HFSS软件和粒子群算法进行了射频参数仿真、结构参数优化及主要结构参数显著性研究,得出了影响开关射频传输性能的主要结构参数;采用表面牺牲层工艺制作了原理样机并进行了射频性能参数的测试.结果表明,开关样机在DC～3 GHz工作频率区间内,插入损耗小于0.25 dB,隔离度大于40 dB.     

基于负温度系数的多晶硅电阻电热激励/压阻检测微桥谐振器的新型红外探测器

报道了一种基于负电阻温度系数的多晶硅电阻电热激励/压阻检测SiO 2/Si3N4/SixNy微桥谐振器的新型红外探测器.微桥谐振器吸收的红外辐射引起微桥温度升高,激励电阻和检测电桥的阻值减小,使得恒定激励电压作用下激励电阻的静态功率和惠斯登电桥的焦耳热增加,等效于增加了辐射在微桥谐振器上的红外辐射.初步的实验证实了该方案的可行性.     

基于MEMS工艺的电热致动器研究进展

基于MEMS工艺的电热致动器具有与集成电路兼容的驱动电压、大的致动位移和致动力,比静电致动器、压电致动器和磁致动器有更大的优势,是现阶段致动方式的研究热点.高精度、高可靠度、可控和稳定性好的电热致动器是未来研究的新方向.针对MEMS微加工工艺制作的固体材料电热致动器,综述了电热致动器的结构形式、典型应用、模型建立以及测试方法的研究现状和主要研究成果.对电热致动器的结构设计、建模分析和测试技术方面的关键技术和存在的主要问题进行了分析和展望,以期为基于MEMS工艺的电热致动器的设计、分析和测试提供借鉴和参考.