终端式MEMS微波功率传感器的结构模拟

在工艺流程以及材料选择的基础上,用Coventorware和HFSS对间接加热终端式MEMS微波功率传感器进行了模拟与设计。模拟结果包括共面波导(CPW)与终端电阻上的温度分布,以及热电堆的接近对CPW性能的影响。确定了热偶对数为50,热电堆与CPW之间的距离为50μm,并选择了GaAs和Au作为热电偶的两臂,TaN作终端电阻。     

微机电光学电流传感器的设计

提出了一种检测50Hz交流电的微机电光学电流传感器。通过电磁学、微机电与光学方法说明了传感器的敏感原理与光学转换原理,结合工艺条件给出了器件的设计要求,并利用matlab软件模拟分析了传感器的仿真测试结果。计算表明,器件可以测试1~7.2kA的交流电,大电流下的灵敏度可达到0.01dB/A以上。     

Design and optimization of an integrated MEMS gas chamber with high transmissivity

Non-Dispersive InfraRed (NDIR) gas sensor is widely used for gas detection in collieries and the gas chemical industry, etc. The performance of the NDIR gas sensor depends on the volume, optical length and transmittance of the gas chamber. However, the existing gas sensor products have problems of large volume, high cost and incapable of integration, which need to develop towards the miniaturized sensor. This paper first presents the theoretical background of the NDIR gas sensor and the novel structure of a fully integrated infrared gas sensor and its micro-machined gas chamber structure. Then, the light structure and the gas flow of the gas chamber are optimized on Tracepro software and Ansys workbench, respectively, and the technological process for preparing the Micro-Electro-Mechanical System (MEMS) gas chamber is designed. Finally, we produce a gas chamber with a small volume and good transmissivity, which would be the most important part of producing the miniaturized NDIR gas sensor.     

Mixed Fano-SP resonant absorption of THz electromagnetic waves in a photonic resonator contacting with a metal film

In terahertz frequency region, we have investigated theoretically the correlation between spectra of a free photonic structure and that deposited on a metal for several models of metal. It was found that for quasi-normal incidence of p-polarized electromagnetic field the presence of metal generates narrow spectral wells in the middle of reflection windows existing in a free photonic crystal. Quite another manifestation of metal-resonator inter-influence takes place at incident angles exceeding the Brewster angle when reflection spikes coincide with modes of photonic crystal resonator and they are absent throughout the stopband areas. The effects are strongly depended on polarization, number of periods and angle of incidence.     

Influence of the torsional vibration of the periodically attached perpendicular beam resonator on the flexural band of a Euler-Bernoulli beam

The bending and torsional vibration of the periodic perpendicular cantilever beam-mass resonators (PCBMR) is idealized as translational and rotational oscillators attached to the main beam. In this paper, the effect of that torsional vibration of the PCBMR on the dynamics of an infinitely long Euler-Bernoulli beam is evaluated. The band-structure is explored by implementing the transfer matrix method in conjunction with Bloch-Floquet's theorem. The combination of the translational and rotational oscillator modifies the relative position of the coupling coefficient in the transfer matrix, which plays a pivotal role in the band-gap formation. The flexural band-structure is highly sensitive to the torsional vibration while the radius of gyration of the tip mass is considerably higher than the length of the PCBMR. Ill-tuning leads to split and reduction of attenuation band to 50%; whereas, around 38% elongation of the attenuation band in the low frequency regime can be achieved by proper tuning.     

Nonlinear energy harvesting from vibratory disc-shaped piezoelectric laminates

Implementing resonators with geometrical nonlinearities in vibrational energy harvesting systems leads to considerable enhancement of their operational bandwidths. This advantage of nonlinear devices in comparison to their linear counterparts is much more obvious especially at small-scale where transition to nonlinear regime of vibration occurs at moderately small amplitudes of the base excitation. In this paper the nonlinear behavior of a disc-shaped piezoelectric laminated harvester considering midplane-stretching effect is investigated. Extended Hamilton's principle is exploited to extract electromechanically coupled governing partial differential equations of the system. The equations are firstly order-reduced and then analytically solved implementing perturbation method of multiple scales. A nonlinear finite element method(FEM) simulation of the system is performed additionally for the purpose of verification which shows agreement with the analytical solution to a large extent. The frequency response of the output power at primary resonance of the harvester is calculated to investigate the effect of nonlinearity on the system performance. Effect of various parameters including mechanical quality factor, external load impedance and base excitation amplitude on the behavior of the system are studied. Findings indicate that in the nonlinear regime both output power and operational bandwidth of the harvester will be enhanced by increasing the mechanical quality factor which can be considered as a significant advantage in comparison to linear harvesters in which these two factors vary in opposite ways as quality factor is changed.     

Diffraction mode selection in planar Bragg resonators of optical and microwave wavelength ranges

Using the coupled waves approach complemented by the time-domain quasi-optical approximation, we solve a 2D diffraction problem which allows to evaluate the eigenfrequencies, quality factors and spatial structures of eigenmodes in planar Bragg resonators with a finite length and width of the corrugated area. We find the values of the Fresnel parameter determined by the geometrical dimensions of the system which allows for efficient transverse mode discrimination due to the larger diffraction losses of the modes with higher transverse numbers.     

Ground state cooling of magnomechanical resonator in PT-symmetric cavity magnomechanical system at room temperature

We propose to realize the ground state cooling of magnomechanical resonator in a parity–time (PT)-symmetric cavity magnomechanical system composed of a loss ferromagnetic sphere and a gain microwave cavity. In the scheme, the magnomechanical resonator can be cooled close to its ground state via the magnomechanical interaction, and it is found that the cooling effect in PT-symmetric system is much higher than that in non-PT-symmetric system. Resorting to the magnetic force noise spectrum, we investigate the final mean phonon number with experimentally feasible parameters and find surprisingly that the ground state cooling of magnomechanical resonator can be directly achieved at room temperature. Furthermore, we also illustrate that the ground state cooling can be flexibly controlled via the external magnetic field.     

对史密斯-帕塞尔自由电子激光光栅的研究

为了研究史密斯-帕塞尔自由电子激光的输出频率和光栅槽深、光栅槽长、光栅槽宽的关系,对于基于矩形光栅的史密斯-帕塞尔自由电子激光利用粒子模拟软件进行模拟和理论分析。首先,利用粒子模拟软件模拟对于基于矩形光栅的史密斯-帕塞尔自由电子激光进行了研究,发现史密斯-帕塞尔自由电子激光的输出频率随光栅槽深、光栅槽长、光栅槽宽的增大而减少。接着,对史密斯-帕塞尔自由电子激光的光栅槽进行了理论分析,发现每个光栅槽都可以等效为一个LC谐振电路,并发现在史密斯-帕塞尔自由电子激光中存在两种辐射,一种是史密斯-帕塞尔辐射,另一种是LC振荡辐射。最后,对光栅槽的LC振荡辐射进行了估算,发现史密斯-帕塞尔自由电子激光输出频率的模拟值与光栅槽的LC振荡辐射估算值的数量级均为102 GHz,且变化规律上一致。据此推测决定史密斯-帕塞尔自由电子激光输出频率的应该是光栅槽,而不是谐振腔。     

高阻带高可靠LC滤波器的设计与实现

采用椭圆函数对基于切比雪夫函数的谐振器进行改进,再级联低通滤波器,设计了具有高阻带特性的电路拓扑.基于可制造性分析(DFM)技术设计了印制线路板,通过表面贴装、手工焊、再流焊及调试等工序制作了LC滤波器.实验结果表明,所制作的LC滤波器近端阻带抑制大于50 dBc,远端阻带抑制大于65 dBc,且具备高可靠性.