A Noninvasive, on Wafer Method to Determine the Intrinsic Stress of a Polymer Layer

The method described in this paper allows an investigator to determine the intrinsic stress of a polymer layer in a way that does not result in damage to devices or test structures. The method requires that a small area of the polymer be released from the substrate to form a diaphragm. The diaphragm is stimulated with acoustic white noise and the diaphragm movement is monitored with a laser vibrometer. The first few resonance frequencies of the diaphragm are obtained using a laser vibrometer and then those frequencies are used to calculate the membrane intrinsic bi-axial tension.     

串联双环光微谐振器的滤波特性

详细研究了串联双环光微谐振器的光带通滤波特性，给出了其通带带宽的公式，分析了出／入环光耦合系数和环间光耦合系数对通带特性的影响，计算并特别强调了滤波通带的结构特点，也分析了微环中存在的光损耗对串联双环光微谐振器的滤波特性的影响。     

反射式微光机电系统(MOEMS)的研究现状与展望

反射式微光机电系统是微光机电系统中的重要组成部分,近年来得到了较快的发展。介绍了反射式微光机电系统(MOEMS)的研究现状和最新进展。根据反射式微光机电系统的分类,列举了一些具有代表性的反射式MOEMS器件。简要介绍了反射式MOEMS的加工工艺;阐述了反射式MOEMS的应用领域;展望了发展前景。     

对撞增强型YAG相位共轭腔

降低SBS相位共轭腔的启动阈值以及如何提高输出光束的质量一直是人们关心的课题。报道了在YAG激光器上运行一种新型对撞增强型YAG受激布里渊散射相位共轭激光腔的输出特性。该腔具有较低的启动阈值和较高的输出能量;该腔型最高能输出150mJ的能量,输出脉宽最窄为11ns,光束发散角为1.3mrad,输出能量和光束质量都很优良。     

一种新颖的用于光腔模式及光束传输模拟的特征向量法

根据有限元法单元划分的思想，提出了一种新颖的模拟光腔模式及光束传输的特征向量法. 该方法的关键之处在于基于衍射积分理论构造了一种新的光束传输矩阵，通过求解特征矩阵方程可一次性得到谐振腔的一系列特征向量，每一列特征向量即代表了腔镜上光场的一个确定模式的振幅及相位分布. 并可采用该方法模拟光场传输到腔内或腔外任意地方的场分布. 该方法将传统方法中大量的迭代过程转化成为本征积分方程特征向量的求解过程，并与初值取值无关，且可一次性求得多个模式分布，从而可方便地分析谐振腔的模式鉴别能力. 特征向量法对圆形镜共焦 关键词： 谐振腔 特征向量法 模式分布     

微波谐振腔Q值对磁激子振幅不稳定态阈值的影响

基于Safonov和Yamazaki所发展的激励自旋波非线性辐射衰减的理论［J. MMM. 161 (1996 ) 275］, 考虑磁激子与磁激子以及磁激子与光子的两种非线性相互作用过程，计算了微波谐振腔Q值对磁激子振幅不稳定态阈值的影响，结果与实验数据基本一致. 关键词： 磁激子 谐振器 铁磁体     

X波段六腔渡越管振荡器的高频特性研究

 从麦克斯韦方程出发，采用时域有限差分法（FDTD）和离散傅里叶变换（DFFT）相结合的方法，通过数值计算得出了六腔开放式谐振腔中前四个谐振频率和场分布，计算出的谐振频率与实验测量结果基本相同。比较了开放腔和封闭腔谐振频率，验证了TEM波吸收边界条件，并在实际编程计算中得以应用。计算结果为六腔渡越管振荡器的机理研究提供了依据。     

Optical bistability in an all-optical fiber nonlinear fabry-perot resonator with linear absorption

An all-optical fiber nonlinear Fabry-Perot resonator is proposed. The steady-state model for describing this resonator is developed. The transmission and refection bistabilities are shown numerically. Our results show that the bistability in this system is similar to that in a normal nonlinear Fabry-Perot etalon, except that the characteristics of the bistability can be changed not only by the cavity length but also by the phase shifts of the fiber loop mirrors.     

谐振式力传感器敏感结构的研究

利用材料力学及弹性力学法，对石英晶体谐振式力传感器的悬臂梁结构进行了研究，得出了双梁单岛及三梁单岛悬臂梁结构的力转移系数，在与实验结果进行了比较后证明，支承结构的理论推导与实验结果一致。     

Study on the possibilities of controlling the laser output beam properties by an intracavity deformable mirror

The possibilities of controlling the laser beam properties by a deformable mirror introduced into the laser optical cavity were studied theoretically and experimentally. The experiments were performed under conditions of an industrial high power transverse flow cw CO₂ laser operating with a stable resonator of a folded configuration. A deformable bimorph mirror of a surface profile controlled by the voltage applied to the mirror electrodes is implemented to the laser system as a back cavity mirror or as a one of the inner folding mirrors. The near-and far-field characteristics of the laser beam versus the resonator configuration controlled by the changes of the focal length of the deformable mirror are discussed in the paper. The analysis reveals that the resonator with an inner deformable mirror is much more sensitive to the mirror curvature variations than the resonator in which the deformable mirror is used as a back cavity mirror. The presented results show that dynamic and controllable changes in the resonator properties result in the controlled modification and optimisation of the laser output power and spatial parameters of the laser radiation.