MEMS器件中的微体缺陷检测研究

为实现对硅基材料和MEMS器件内微体缺陷的无损、高效和准确检测，在研究广义洛仑兹-米氏散射理论的基础上，针对硅基材料和MEMS器件的物理特点，对球形缺陷与红外激光相互作用在非垂直方向散射光强分布特点进行了研究和计算机仿真，提出利用红外激光背散射分布分析对硅基材料和MEMS器件内部缺陷进行检测的方法，并通过实验验证了该方法的有效性。     

埋入式无线MEMS 应变片系数的标定

本文研究了一种埋入式MEMS（微电子机械系统）无线应变片性能的实验标定方法，通过引入一个当量应变片，遵照标准应变片的标定规定，本文设计了实用有效的实际标定步骤，分别对标准应变片和MEMS试样进行完全相同的拉伸实验，从而得到埋入MEMS应变片的应变片系数（灵敏度）为13，同时获得在实验试样的制作条件下，测量应变与实际应变之比为2。     

Capacitive Microwave MEMS Switch

A novel capacitive microwave MEMS switch with a silicon/metal/dielectric as a membrane is fabricated successfully by bonding and etching-stop process.Its principal,design,and fabricating process are described in detail.A patterned dielectric layer,Ta2O5,with dielectric constant of 24 is reached.Experiment results show this novel structure,where the switch’s dielectric layer is not prepared on the transmission line,features very low insertion loss.The insertion loss is 0.06dB at 2GHz and lower than 0.5dB in the wider range from DC up to 20GHz,especially when the transmission line metal is only 0.5μm thick.     

体微加工技术在MEMS中的应用

微机电系统(MEMS)技术的基础是由微电子加工技术发展起来的微结构加工技术，包括表面微加工技术和体微加工技术。其中体微加工技术是微传感器、微执行器制造中最重要的加工技术。该文主要介绍以加工金属、聚合物以及陶瓷为主的LIGA技术，先进硅刻蚀技术(ASE)和石英晶体深槽湿法刻蚀技术。最后给出用LIGA技术和牺牲层技术制作微加速度传感器的例子。     

闪耀光栅数字微镜显示技术

基于微机电系统(MEMS)的闪耀光栅数字微镜显示技术以光的衍射理论为基础,具有极高的光源利用率,不仅能形成宽视角高质量彩色虚拟画面,还可以产生大幅彩色投影画面。与传统的三基色滤光片显示技术相比,在同样子象素情况下,具有更高的亮度和更高的分辨率。本文从技术背景、工作原理、实验分析和设计优化等方面介绍该项技术。     

Fatigue damage evolution in silicon films for micromechanical applications

In this paper we examine the conditions for surface topography evolution and crack growth/fracture during the cyclic actuation of polysilicon microelectromechanical systems (MEMS) structures. The surface topography evolution that occurs during cyclic fatigue is shown to be stressassisted and may be predicted by linear perturbation analyses. The conditions for crack growth (due to pre-existing or nucleated cracks) are also examined within the framework of linear elastic fracture mechanics. Within this framework, we consider pre-existing cracks in the topical SiO₂ layer that forms on the Si substrate in the absence of passivation. The thickening of the SiO₂ that is normally observed during cyclic actuation of Si MEMS structures is shown to increase the possibility of stable crack growth by stress corrosion cracking prior to the onset of unstable crack growth in the SiO₂ and Si layers. Finally, the implications of the results are discussed for the prediction of fatigue damage in silicon MEMS structures.     

静电微电机微转子接触动力学特性分析

提出静电微电机中转子和固定轴承间相互接触的数学模型，对微尺度下的接触应力和应变 特性进行理论推导，分析静电微电机几何参数、静电力、材料特性及加载电压对接触宽度、 应力和应变特性的影响，对比研究不同工况下接触宽度、接触应力和应变的变化，并就相同 的问题进行有限元分析，探讨摩擦系数对接触区von Mises应力、应变和接触压力 的影响，结果表明有限元模拟所得接触应力和应变分布与数学 模型的解析值较为相似.     

A phenomenological and extended continuum approach for modelling non-equilibrium flows

This paper presents a new technique that combines Grad’s 13-moment equations (G13) with a phenomenological approach to rarefied gas flows. This combination and the proposed solution technique capture some important non-equilibrium phenomena that appear in the early continuum-transition flow regime. In contrast to the fully coupled 13-moment equation set, a significant advantage of the present solution technique is that it does not require extra boundary conditions explicitly; Grad’s equations for viscous stress and heat flux are used as constitutive relations for the conservation equations instead of being solved as equations of transport. The relative computational cost of this novel technique is low in comparison to other methods, such as fully coupled solutions involving many moments or discrete methods. In this study, the proposed numerical procedure is tested on a planar Couette flow case, and the results are compared to predictions obtained from the direct simulation Monte Carlo method. This test case highlights the presence of normal viscous stresses and tangential heat fluxes that arise from non-equilibrium phenomena, which cannot be captured by the Navier–Stokes–Fourier constitutive equations or phenomenological modifications.      

微电子机械系统中转速测量的光学方法

利用显微测量技术和CCD图像传感器的线性积分成像特性,将数字图像处理技术与时间积分成像技术用于微电子机械系统(MEMS)中的转速测量。只需分别摄取被测物体上的标志点在静止状态下的时间积分图像和运动状态下的时间积分图像,即可测得物体在该段曝光时间内的转速。该方法对实验设备及实验条件要求较宽松。实验表明该方法对微系统中近似匀速转动时转速的测量是完全可行的,且具有较高的精度。     

一种解耦的微机械陀螺研究

设计了一种解耦的微机械陀螺，它能够极大地降低正交误差信号的影响，从而大大地提高佗螺的性能；制造了一批样机，进行了初步的驱动特性和敏感特性的实验研究。研制结果表明，陀螺性能符合设计要求。