基于FPGA和DSP的微型惯导系统

 惯导系统的硬件组成直接影响到系统的体积和解算速度,构建合理的硬件系统直接关系到惯导系统的精度指标。针对某小型惯导系统对体积和解算精度的特殊要求,解决已有微型惯导系统的方案缺陷,提出一种工程实用强的惯导系统。该系统用FPGA作为采集控制惯性传感器的核心芯片,设计了并行采集方案,32位浮点型高速DSP实现惯导解算。经过转台测试与外场试验表明：系统具有抗干扰能力强、实时响应迅速、惯性单元标定简便、易实现等优点,系统指标完全满足原设计要求。     

Parametric resonance and Hopf bifurcation analysis for a MEMS resonator

We study the response of a MEMS resonator, driven in an in-plane length-extensional mode of excitation. It is observed that the amplitude of the resulting vibration has an upper bound, i.e., the response shows saturation. We present a model for this phenomenon, incorporating interaction with a bending mode. We show that this model accurately describes the observed phenomena. The in-plane (“trivial”) mode is shown to be stable up to a critical value of the amplitude of the excitation. At this value, a new “bending” branch of solutions bifurcates. For appropriate values of the parameters, a subsequent Hopf bifurcation causes a beating phenomenon, in accordance with experimental observations.     

A novel method for improving the adhesion strength of the electrodeposited Ni films in MEMS

Adhesion performance of MEMS materials is increasingly important with the widely use of miniaturized devices. This paper proposed a novel method for improving adhesion performance between electrodeposited Ni multi-layers. The new method is to treat the Ni substrate in nickel chloride plating solution by pulse reverse current technique before electrodeposition. The dense oxide film of Ni substrate can be removed effectively by this electrochemical method, meanwhile, the proper roughness of Ni substrate is in favor of epitaxial growth during electrodeposition. Moreover, the Ni film is electrodeposited by the new method with low stress and coarse crystal grain. Consequently, the adhesion performance of Ni films is improved dramatically. The experimental results show that the adhesion performance of Ni film electrodeposited by the new method is about 3 times that of by traditional method.     

基于热学理论的微型真空检测器件的研究

介绍了一种基于热学知识设计的表面薄膜微型MEMS皮拉尼计,并将其用于圆片级真空封装腔体的真空度测量中。为了设计灵敏度较高的皮拉尼计,对不同结构的皮拉尼计的热量分布进行了数值计算与分析,并最终完成了加工。此皮拉尼计的结构和加工工艺比较简单,能用于一般的MEMS真空封装中。实验结果显示该皮拉尼计可以测量1-10^5Pa的真...     

Numerical investigation into nonlinear dynamic behavior of electrically-actuated clamped–clamped micro-beam with squeeze-film damping effect

A numerical investigation is performed into the nonlinear dynamic behavior of a clamped–clamped micro-beam actuated by a combined DC/AC voltage and subject to a squeeze-film damping effect. An analytical model based on a nonlinear deflection equation and a linearized Reynolds equation is proposed to describe the deflection of the micro-beam under the effects of the electrostatic actuating force. The deflection of the micro-beam is investigated under various actuating conditions by solving the analytical model using a hybrid numerical scheme comprising the differential transformation method and the finite difference approximation method. It is shown that the numerical results for the dynamic pull-in voltage of the clamped–clamped micro-beam deviate by no more than 2.04% from those presented in the literature based on the conventional finite difference scheme. The effects of the AC voltage amplitude, excitation frequency, residual stress, and ambient pressure on the center-point displacement of the micro-beam are systematically explored. Moreover, the actuation conditions which ensure the stability of the micro-beam are identified by means of phase portraits. Overall, the results presented in this study confirm that the hybrid numerical method provides an accurate means of analyzing the complex nonlinear behavior of common electrostatically-actuated microstructures.     

气象检测微系统软件开发

介绍了由硅微传感器组成的自动气象站网络 ,并对整个网络的数据采集和数据处理的系统软件的实现做了详细的说明 ,而且从系统的硬件组成到系统软件的模块设计都作了介绍。本软件完成了从远程控制系统采集现场的气象数据 ,实现了一机对多机的数据采集功能 ,同时对数据丢失的原因做了初步探讨     

Embedded benzocyclobutene in silicon: An integrated fabrication process for electrical and thermal isolation in MEMS

This paper reports a novel fabrication process to develop planarized isolated islands of benzocyclobutene (BCB) polymer embedded in a silicon substrate. Embedded BCB in silicon (EBiS) can be used as an alternative to silicon dioxide in fabrication of electrostatic micromotors, microgenerators, and other microelectromechanical devices. EBiS takes advantage of the low dielectric constant and thermal conductivity of BCB polymers to develop electrical and thermal isolation integrated in silicon. The process involves conventional microfabrication techniques such as photolithography, deep reactive ion etching, and chemical mechanical planarization (CMP). We have characterized CMP of BCB polymers in detail since CMP is a key step in EBiS process. Atomic force microscopy (AFM) and elipsometry of blanket BCB films before and after CMP show that higher polishing down force pressure and speed lead to higher removal rate at the expense of higher surface roughness, non-uniformity, and scratch density. This is expected since BCB is a softer material compared to inorganic films such as silicon dioxide. We have observed that as the cure temperature of BCB increases beyond 200 °C, the CMP removal rate decreases drastically. The results from optical microscopy, scanning electron microscopy, and optical profilometry show excellent planarized surfaces on the EBiS islands. An average step height reduction of more than 95% was achieved after two BCB deposition and three CMP steps.     

微机电安全密码锁的设计技术

微机电安全密码锁是一类用于确保“要害系统”安全性的装置 ,也可称为微锁、微型组合锁、微型密码鉴别器或微型使用控制开关。本文重点介绍了微机电安全密码锁的基本功能单元 :即鉴别器机构、驱动器与能量耦合器 ,结合工作原理的分析 ,探讨了装置总体设计中应考虑的关键问题     

探空集成传感器设计

微型化、集成化可以使得传感系统减少体积、重量，降低成本，提高系统的可靠性，具有重要的科学意义。本文设计了一个用于测量大气湿度、温度和气压检测微型集成传感器。考虑到MEMS加工工艺兼容性，分别采用空气导热检测法、铂电阻法和电容法对湿度、温度、压力进行检测，并且进行了理论计算，设计了加工工艺步骤，制作出雏形器件。     

MEMSE类放大器

对采用 MEMS开关的 E类放大器进行了原型仿真 ,并且通过工艺流片制作 MEMS开关 ,搭建 E类放大器电路进行测试 .测试结果显示 ,这种机械式的放大器同样能实现有源放大器的功能 .测试得到的放大器实际效率与原型模拟结果一致 ,而放大器的功率增益高达 2 0 0 0 .