Defocusing image to pattern contact holes using attenuated phase shift masks

The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.     

基于C6711处理器cdma2000 1X系统前向信道信号的处理

在cdma20001x前向信道中,要对一段信号进行传送,一般选用QPSK调制,因为QPSK调制比QAM更适合噪音环境。采用TI6000系列的TMS320C6711芯片处理前向信道信号,可以对复杂性和实时性较高的信号做采集、量化、编码、调制等实时处理,主要功能通过软件编程实现,从而使系统具有结构灵活、可靠性高、可扩展等优点。     

机械力化学作用对低介硅灰石瓷料的相变和相组成的影响

采用X射线衍射仪(XRD)、差热分析(DTA)手段详细研究了由氧化物粉末制备硅灰石陶瓷时,机械力化学作用及后续热处理对硅灰石陶瓷相组成和相变过程的影响,分析了机械力化学在球磨过程中的作用机理主要是细化晶粒、使晶格畸变、晶格缺陷增多、非晶化和诱导低温化学反应。结果表明:高能球磨中的机械力化学作用能够有效地降低硅灰石陶瓷的烧成温度(11160~11220℃)。探明了经高能球磨的样品在烧成过程中的晶相转变规律。瓷料最终的晶相为单一的-硅灰石(高温变体)。     

连续波雷达测距中的解模糊技术

研究连续波雷达测距中的距离模糊问题，分析几种常用解模糊方法的性能，并讨论参差比的选取对测距范围的影响。     

双频抽运提高SBS相位共轭保真度

相位共轭保真度是相位共轭镜技术用于强激光系统中的一个重要指标。采用四波混频加强SBS的方法 ,其相干拍频驱动声子场 ,能提高SBS相位共轭保真度。对于双频单池结构 ,使用列阵相机测量激光束能量远场角分布 ,在SBS转换效率最佳时 ,对相干驱动SBS相位共轭保真度进行了实验研究     

Towards implementation of a nickel silicide process for CMOS technologies

In this paper, we review some of the advantages and disadvantages of nickel silicide as a material for the electrical contacts to the source, drain and gate of current and future CMOS devices. We first present some of the limitations imposed on the current cobalt silicide process because of the constant scaling, of the introduction of new substrate geometries (i.e. thin silicon on insulator) and of the modifications to the substrate material (i.e. SiGe). We then discuss the advantages of NiSi and for each of the CoSi₂ limitations, we point out why Ni is believed to be superior from the point of view of material properties, miscibility of phases and formation mechanisms. Discussion follows on the expected limitations of NiSi and some of the possible solutions to palliate these limitations.     

带通采样在数据采集中的应用研究

在数据采集中采用带通采样，可大大降低采样率，但系统中的抗混叠滤波器会造成相位的非线性。采用对滤波后的信号进行带通采样，然后再用FRR滤波器校正相位的非线性，从而不失真地还原原信号，最后在Matlab中进行仿真，验证了该方法的有效性。     

V波段小型化低相噪频率综合器

本文研究了一种V波段超小型低相噪频率综合器,研制了L段捷变频频综、Ku波段取样锁相源、上变频组件、倍频器等四个小型化组件.为了得到较低的相位噪声和捷变频速度,本捷变频频综采用上变频-倍频方案,其中DRO PLS保证低相位噪声性能,L波段捷变频频综保证捷变频功能.该频综尺寸为100×80×30mm³,相位噪声低于-86dBc/Hz(1kHz),捷变频时间小于40μs,杂波抑制优于-60dBc.     

Phase separation in blends of two homopolymers and a diblock copolymer during film casting

Demixing during film casting of blends of polystyrene, polymethylmethacrylate, and a symmetric diblock copolymer of styrene and methylmethacrylate is discussed. The concentration fluctuations in the homogeneous solutions were calculated in mean field approximation. The structures in the homogeneous and demixed solutions and in the dry films were measured by small-angle x-ray scattering, and the morphologies of the dry films were characterized by transmission electron microscopy. The structure of the dry blends is evidently already pre-formed in solution.     

光束发散度对紫外写入光纤光栅的影响

用傅里叶衍射光学分析了准分子激光束发散度对于光纤光栅制备的影响，发现光束发散角使光纤光栅的布拉格波长发生改变，相位版后干涉场沿光纤轴向和径向不均匀，对制备30dB高反射率光纤光栅造成困难。实验结果与理论分析基本一致，相对于理想平行光束情况，会聚光束使得光纤光栅布拉格波长出现在短波一边，发射光束使得光纤光栅布拉格波长出现在长波一边。