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41.
In this work, we study the modification of hydrogenated diamond films deposited on silicon resulting from its exposure to DBr followed by an annealing above 600 K, using high resolution electron energy loss spectroscopy (HREELS). This procedure results in silicon carbide SiC formation within the diamond film, as evidenced by the observation of a loss peak at 117 meV and its first harmonic at 233 meV in HREEL spectra. This diamond surface modification is interpreted as resulting from the reaction of products of the silicon support thermally activated etching with hydrogenated diamond. 相似文献
42.
平面凸点式封装(FBP) 总被引:1,自引:0,他引:1
QFN工艺(Quad Flat No-lead)在封装过程中大多存在着焊线牢度不够、包封溢胶、切 割毛刺等缺陷,FBP(Flat Bump Package)的出现不仅很好地解决了QFN的缺陷,而且FBP产品 在SMT工艺中能表现出更优良的特性。文章主要介绍了FBP的设计思路、结构特点、主要工艺流 程、关键工艺和衍生产品等。 相似文献
43.
Low-energy electron-enhanced etching of HgCdTe 总被引:3,自引:0,他引:3
Jaehwa Kim T. S. Koga H. P. Gillis Mark S. Goorsky Gerald A. Garwood John B. Varesi David R. Rhiger Scott M. Johnson 《Journal of Electronic Materials》2003,32(7):677-685
Low-energy electron-enhanced etching (LE4) is applied to HgCdTe to eliminate ion-induced surface damage. First, LE4 results
for patterned samples are illustrated. The LE4 mechanism is understood from a mechanistic study in terms of three etch variables:
direct current (DC) bias, gas composition, and sample temperature. For this paper, the effects of DC bias (electron energy)
and gas composition (CH4 concentration) are summarized qualitatively, followed by quantitative evidence. Etch rate, the amount of polymer, surface
stoichiometry, and surface roughness have specific relations with each etch variable under competition between pure LE4 and
polymer deposition. 相似文献
44.
H. P. Gillis D. A. Choutov K. P. Martin M. D. Bremser R. F. Davis 《Journal of Electronic Materials》1997,26(3):301-305
Hetero-epitaxial films of GaN(OOOl), deposited on SiC(OOOl) by organometallic vapor phase epitaxy and masked by 200 nm of
SiO2, have been patterned by low energy electron enhanced etching (LE4) in hydrogen and chlorine dc plasmas at room temperature.
Lines 2.0 μm wide showed highly anisotropic etching: straight side walls, no overcut, no trenching, and no “pedestal” at the
base of the line. Root mean square (RMS) surface roughness of the films as grown was 8.5–10?; after LE4, RMS surface roughness
of the etched surfaces was 2.5?. 相似文献
45.
Calcite single crystals on neutron bombardment change their colour to pale red, red and deep red, as the duration of irradiation
increases. The irradiated surface becomes rugged and on etching, a large number of micropits are observed. Using Vicker’s
hardness indenter, it is observed that the hardress of the irradiated crystal increases with the increase in the total dosage.
From Laue x-ray diffraction studies of irradiated crystals, distortion of lattice is observed. Absorption spectra in the visible
region show an extra peak for irradiated samples which is absent for radiated ones. The radiation effects are annealed to
a considerable extent on heat treatment. The implications are discussed. 相似文献
46.
研究了蚀刻气体对生长在硅衬底上纳米晶金刚石合成的影响.合成方法为热丝化学气相沉积法,衬底温度为550 oC,反应压力为4 kPa. 其中甲烷和氢气分别作为源气体和稀释气体. 氮气、氢气和氨气用作蚀刻气体. 结果表明,仅氢气作为蚀刻气体可获得最佳工艺条件. 相似文献
47.
Bimetallic SCN ligand based single crystals of manganese mercury thiocyanate (MMTC), cadmium mercury thiocyanate (CMTC) and zinc cadmium thiocyanate (ZCTC) are grown by slow solvent evaporation technique. The growth mechanism and surface features are investigated by optical microscopic techniques such as scanning electron microscopy (SEM) and atomic force microscopy (AFM). The laser induced surface damage measurements were carried out using a Q-switched Nd:YAG laser at 1064 nm with laser beam of 1.0 Hz and pulse duration 25 ps. The laser damage threshold values of MMTC, CMTC and ZCTC are found to be 15.9, 22.9 and 19.7 GW/cm2, respectively. The SEM analysis of MMTC reveals the formation of elongated dendrite growth pattern caused by the fluctuations of Mn and Hg metal ligands when thiocyanate (SCN) bridges them. The etching study indicates the occurrence of different types of etch pit patterns like terraced triangles, pillars, pyramids and rods. The AFM images confirm the formation of three major hillocks with cavities in MMTC. The measured roughness values for CMTC crystal are very much lower than that of MMTC. 相似文献
48.
The effect of change of shape of a steel ball was revealed as a result of its etching in an aqueous solution of nitric acid under influence of an external magnetic field. The elongation of a ferromagnetic ball was observed along the direction of an external magnetic field while etching took place uniformly in all the directions without magnetic field application. The steel ball etching in a magnetic field is characterized by formation of three cylindrically symmetric regions with different etching rates and surface structures, divided from each other by clear borders (namely, the pole, equator and transition regions are formed). The non-monotone dependences of etching rate, surface structure of a sample and sample shape after etching on an external magnetic field are observed. 相似文献
49.
《Journal of Macromolecular Science: Physics》2013,52(4-6):891-908
A series of polypropylenes, including two modern high crystallinity materials (HCPP) were subjected to a stepwise crystallization procedure as a guide to their properties. The results were complicated by the development of double melting endotherms at the highest crystallization temperature. Both HCPP, when grown at the temperature of 145°C, give a double melting peak, but the proportions of the two peaks varied according to the density of nucleation. By partially melting a specimen between the two peaks, it was possible to assign the higher peak to radial dominant lamellae and the lower peak to mostly tangential subsidiary lamellae filling the space in between. Uniformly cross-hatched lamellae at the center of spherulites melt along with the lower melting population in the outer regions of the spherulites. Even if differences in crystallization temperature are eliminated, the properties of nucleated as opposed to nonnucleated PP may therefore be influenced by differences between the center and periphery of spherulites, with “central” properties much more in evidence in nucleated material. The development of these double endotherms is related to morphological constraint, rather than molecular fractionation. Their form is strongly influenced by cross-hatching, but the phenomenon is still found at 160°C where cross-hatching does not form. 相似文献
50.
In order to estimate the damage densities produced by γ-rays to Makrofol-N and Makrofol-KG, some structural, optical and etching studies have been performed. It is found that both polymers are insensitive to low γ-doses (up to 103 krad) but are influenced at higher doses. The changes in etching parameters have been noticed along with the changes in the FTIR and UV–VIS spectra. The results have been discussed on the basis of some basic mechanisms of radiation interactions with organic materials. 相似文献