关于超大规模集成电路制造中的应力迁移问题

应力迁移是影响集成电路（ＩＣ）金属配线可靠性的缺陷之一。它缘起于绝缘膜与金属配线之间的热应力。本文概要介绍两种性质的绝缘膜产生的两种应力缺陷以及检测方式，并分类说明金属膜厚、线宽温度等与应力的关系。简要说明应力迁移产生的可能机理及目前采取的几种对策。     

Compressive Spectral Video Sensing using the Convolutional Sparse Coding framework CSC4D

Spectral Videos (SV) contain a scene’s spatial–spectral-time information. Just as with Spectral Images (SI), SVs require expensive sensing hardware, storage plus high frame ratios. Although Super Resolution techniques improve the quality of low-resolution SVs, Compressive Spectral Video Sensing (CSVS) senses high-quality SVs by extending the Compressive Sensing Image (CSI) techniques. CSI uses the universal Sparse Signal Representation (SSR) model for SVs and SIs despite the limited quality of the recovered signals. On the other hand, dictionaries synthesis models are used successfully for representing SIs, SVs, and in CSI. This work proposes the 4D convolutional sparse representation (CSC4D) for recovering full-resolution SV from CSVS measurements. It is based on a multidimensional formulation of the CSC model, profiting from its robustness without additional optical flow information. Extensive numerical simulations (two CSI architectures and noise models) show that the proposed CSC4D+CSVS improves the state-of-the-art in both quality and border sharpness by up to 1.5 dB.