灵敏低k材料与铜兼容的去胶机

一种成功的抗蚀剂和刻蚀残渣去除胶机必须满足大批量IC制造环境中可接受的3个条件:(1)与灵敏低K介质材料的兼容性;(2)去除抗蚀剂和刻蚀残渣;(3)与基质金属包括铜、钴、钨等金属的兼容性。而AirProdul公司的EZ系列去胶机成功地满足了这些要求。一些含氟化物的产品与灵敏的低k介质,例如多孔的低k材料、HSQ和其它超低k材料是能够很好共处的。对由测量刻蚀速率以及键合保留物和暴露于这些除胶机的覆盖膜组成的介质材料确定的兼容性进行了评价,并对作图衬底的浸泡试验所确定的清洗效力也一并进行了评价。     

Investigation into CO2 laser cleaning of titanium alloys for gas-turbine component manufacture

This paper reports results of the investigation into the feasibility of using a CO₂ laser technology to perform critical cleaning of gas-turbine aero-engine components for manufacture. It reports the results of recent trials and relates these to a thermal model of the cleaning mechanisms, and describes resultant component integrity. The paper defines the experimental conditions for the laser cleaning of various aerospace-grade contaminated titanium alloys, using a continuous wave CO₂ laser. Laser cleaning of Ti64 proved successful for electron beam welding, but not for the more sensitive Ti6246. For diffusion bonding the trials produced a defective standard of joint. Effects of oxide formation is modelled and examined experimentally.     

超声波清洗机的技术现状与建议

文章对超声波清洗机发生器的生产技术进行回顾分析，并对行业如何健康发展提出自己的建议。     

以人为本发展绿色清洗技术

对锅炉清洗全过程进行职业安全、健康及环境风险管理，告别污染与清洗相伴的时代，是清洗从业者当前研究发展的重要任务。     

对民用空气净化器技术与市场的阶段性调研报告

对目前民用空气净化器市场的乱象和我国《空气净化器》标准的缺陷给予评论,并对民用空气净化器的性能在模拟民居环境非密闭实验仓内的实验验证。     

Megasonic cleaning of wafers in electrolyte solutions: Possible role of electro-acoustic and cavitation effects

Investigations have been conducted on the feasibility of removal of particles from silicon wafers in electrolyte solutions of different ionic strengths irradiated with megasonic waves. Cleaning experiments have been performed using potassium chloride (KCl) as a model electrolyte and silica particles as model contaminant particles. Particle removal efficiency (PRE) increases with KCl concentration and transducer power density and much lower power densities may be used at higher KCl concentration for a comparable level of cleaning. Enhanced cleaning in KCl solutions has been explained as due to two types of electro-acoustic potentials, namely, ionic vibration potential (IVP) and colloidal vibration potential (CVP) that arise when the sound wave propagates through the electrolyte solution. Theoretical computations have shown that the removal forces due to CVP are much larger in magnitude than those due to IVP and are comparable to van der Waals adhesion forces.The effect of ionic strength on cavitation has been investigated through the measurement of acoustic pressure in solutions using a hydrophone. Using Fourier transformation of time dependent pressure data, the size distribution of stable bubbles in KCl solutions of different concentration has been obtained.     

Utilization of profilometry, SEM, AFM and contact angle measurements in describing surfaces of plastic floor coverings and explaining their cleanability

The tendency to soil and cleanability of ten commercial plastic floor coverings: eight vinyl (PVC) floor coverings, one vinyl composite tile and one plastic composite tile, were examined. Floor coverings were soiled with inorganic, organic and biological soil. The cleanability was measured both by bioluminescence of ATP (adenosine triphosphate) and colorimetrically. The surface topography was studied by AFM, SEM and with a profilometer. From the 2D- and 3D-profilometric measurements several characteristic parameters of the surface profiles were extracted. The tendency to soil and cleanability were compared with the characteristics of the surface. A weak correlation was found between roughness and soilability but no correlation between roughness and cleanability. Roughness had no correlation with contact angle.     

激光清洗技术在微电子领域的应用

本文介绍了激光清洗技术在微电子领域的应用，对该技术在清除细微颗粒方面所具有的独到的优越性进行了探讨。     

关于制药企业空调净化系统的验证

结合空调净化系统的相关规范和GMP认证要求，介绍了空调净化系统的验证内容和方法。空调净化系统验证合格才能投入正常运行。     

ELGA全自动超纯水处理系统的工艺和设备特点

在集成电路工业已经进入超大规模集成电路时代的今天,如何使超纯水这一重要基础材料的纯度达到电子级Ⅰ级水准,已成为我国净化技术中超纯水处理领域一个急待解决的技术问题。本文专题介绍英国ELGA公司全自动超纯水处理系统工艺流程和设备的特点,最后介绍了该系统生产的超纯水所达到的质量指标。