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11.
12.
铝互连线的电迁移问题历来是微电子产业的研究热点,其面临的电迁移可靠性挑战也是芯片制造业最持久和最重要的挑战之一.从20世纪90年代开始,超深亚微米(特征尺寸≤0.18 μm)铝互连技术面临了更加复杂的电迁移可靠性问题.从电迁移理论出发,分析概括了铝互连电迁移问题的研究方法,总结了上世纪至今关于铝互连电迁移问题的主要经验;最后结合已知的结论和目前芯片制造业现状,分析了当前超深亚微米铝互连线电迁移可靠性挑战的原因和表现形式,提出了解决这些问题的总方向.
关键词:
电迁移
铝互连
微结构 相似文献
13.
采用甚高频等离子体增强化学气相沉积技术制备了系列微晶硅薄膜太阳电池,指出了气体总流量和背反射电极的类型对电池性能参数的影响.电池的I-V测试结果表明:随反应气体总流量的增加,对应电池的短路电流密度、开路电压和填充因子都有很大程度的提高,结果使得电池的光电转换效率得以提高.另外,ZnO/Ag/Al背反射电极能明显提高电池的短路电流密度,进而也提高了电池的光电转换效率.对气体总流量和背反射电极类型影响电池效率的原因进行了分析.
关键词:
微晶硅薄膜太阳电池
气体流量
ZnO/Ag/Al背反射电极 相似文献
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Patrick Dehornoy 《Algebra Universalis》2002,48(2):223-248
We solve the word problem of the identity x(yz) = (xy)(yz) by investigating a certain group describing the geometry of that identity. We also construct a concrete realization of the
one-generated free algebra relative to the above identity.
Received March 23, 2001; accepted in final form July 6, 2002. 相似文献
17.
We establish the existence and stability of multidimensional transonic shocks for the Euler equations for steady potential compressible fluids. The Euler equations, consisting of the conservation law of mass and the Bernoulli law for the velocity, can be written as a second-order, nonlinear equation of mixed elliptic-hyperbolic type for the velocity potential. The transonic shock problem can be formulated into the following free boundary problem: The free boundary is the location of the transonic shock which divides the two regions of smooth flow, and the equation is hyperbolic in the upstream region where the smooth perturbed flow is supersonic. We develop a nonlinear approach to deal with such a free boundary problem in order to solve the transonic shock problem. Our results indicate that there exists a unique solution of the free boundary problem such that the equation is always elliptic in the downstream region and the free boundary is smooth, provided that the hyperbolic phase is close to a uniform flow. We prove that the free boundary is stable under the steady perturbation of the hyperbolic phase. We also establish the existence and stability of multidimensional transonic shocks near spherical or circular transonic shocks.
18.
A (w,r) cover‐free family is a family of subsets of a finite set such that no intersection of w members of the family is covered by a union of r others. A (w,r) superimposed code is the incidence matrix of such a family. Such a family also arises in cryptography as the concept of key distribution pattern. In the present paper, we give some new results on superimposed codes. First we construct superimposed codes from super‐simple designs which give us results better than superimposed codes constructed by other known methods. Next we prove the uniqueness of the (1,2) superimposed code of size 9 × 12, the (2,2) superimposed code of size 14 × 8, and the (2,3) superimposed code of size 30 × 10. Finally, we improve numerical values of upper bounds for the asymptotic rate of some (w,r) superimposed codes. © 2004 Wiley Periodicals, Inc. 相似文献
19.
Noboru Nakatani 《Optical Review》2003,10(4):206-210
This paper describes a compulsorily phase locked differential interferometer using an orthogonally polarized light source of a modulated LD with high extinction ratio to reduce non-linearity of the interferometer caused by polarization cross-talk. The current modulated LD is used as a light source to make the interferometer compact and for the scanning phase of the interferometer. The interferometer is operated compulsorily at the maximum inclination point of the fringe intensity curve by fringe scanning and an electric system. A Wollaston prism of high extinction ratio (50 dB) is used to combine the polarizing beams and to make the polarization cross-talk very small. In one light source the polarized output beams are on the same propagation axis; in the other they have a small crossing angle (2.5 mrad ∼ 10 mrad) to completely exclude non-linearity of the interferometer causded by polarization cross-talk. Using jets of a gas mixture of nitrogen and ethylene, this interferometer was demonstrated to be useful in detecting the photothermal effect of a photothermal velocimeter under phase fluctuation in a turbulent flow. 相似文献
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