DC plasma etching of silicon by sulfur hexafluoride. Mass spectrometric study of the discharge products

Polycrystalline silicon wafers were etched in dc discharges of SF₆. SF_x species were extracted from the discharges and measured with a mass spectrometer. A systematic procedure was used to measure the SF _x ⁺ signals such that they are indicators of events in the discharge close to the sample undergoing etching. The picture that emerges is remarkably simple and shows the relative stability of several SF_x species including SF₆, SF₄, SF₂, and SF which are shown to be extracted from the discharge both in the presence and absence of the silicon sample. When silicon is being etched on the cathode of the discharge cell, the only significant additional products are SiF₄ and S₂F₂. A comparison of blank and sample data for opposite substrate polarities shows that there is only a small cation-assisted etching effect and suggests that ions do not play an important role in the etching of silicon by SF₆ discharges.     

Intensity distribution in the vibronic Γ7(2 T 2g )→Γ8(4 A 2g ) transition of ReBr 6 2− in Hexahalogenostannate host crystals

The phosphorescence spectra of ReBr ₆ ^2– doped A₂SnX₆ (A = K, Rb, Cs; X = Cl, Br) have been measured at 10 K. The spectra consist of a weighted sum of progressions associated with the local modes of the ReBr ₆ ^2– center. By a fit to a generalized Lorentzian line shape function the totally symmetric distortion of the ₇(² T _2g ) excited state relative to the ₈(⁴ A _2g ) ground state has been determined.Dedicated to Professor Dr. H.-H. Schmidtke on the occasion of his 50th birthday.     

Preparation and Photophysics of 2-(1-Pyrenyl)acrylic Acid and Its Methyl and 2′,2′,6′,6′-Tetramethyl-4′-Piperidyl Esters

Novel probes represented connection of pyrene as chromophore and sterically hindered amine stabilizers (HAS) in the form of esters of 2-(1-pyrenyl)acrylic acid were synthesized. HAS was in the form of parent amine (PAP) as well as stable nitroxyl radical form (PAP-NO^.). Photophysics of these probes were compared with their precursor as 2-(1-pyrenyl)acrylic acid (PAA) and its methyl ester (PAM). The fluorescence spectrum of PAA strongly depends on the acidity of the solution. The spectrum in neutral methanol indicates that it originates from the anionic form –COO⁻. Changes of acidity or basicity of methanol solution resulted in the changes of shape, position as well as the intensity of fluorescence band. This is due to the presence of protolytic equilibria, either in the ground state or in the singlet excited state, leading to the formation of molecular form –COOH and the cationic form –COOH₂⁺. The ester analogues did not show any changes in various pH conditions. Fluorescence of all probes depends on the polarity of solvents and the presence of oxygen. Intermolecular quenching was studied with external quenchers TEMPO and oxygen and the data were compared with the intramolecular quenching using 1′-oxo-2′,2′,6′,6′-tetramethyl-4′-piperidinyl-2-(1-pyrenyl)acrylate (PAP-NO^.).     

Study of 19Na at SPIRAL

The excitation function for the elastic-scattering reaction p( ¹⁸Ne, p) ¹⁸Ne was measured with the first radioactive beam from the SPIRAL facility at the GANIL laboratory and with a solid cryogenic hydrogen target. Several broad resonances have been observed, corresponding to new excited states in the unbound nucleus ¹⁹Na. In addition, two-proton emission events have been identified and are discussed.     

On the riemann zeta-function and the divisor problem II

Let Δ(x) denote the error term in the Dirichlet divisor problem, and E(T) the error term in the asymptotic formula for the mean square of . If E ^*(t)=E(t)-2πΔ^*(t/2π) with , then we obtain

A half-moment model for radiative transfer in a 3D gray medium and its reduction to a moment model for hot, opaque sources

We present in this paper a new 3D half-moment model for radiative transfer in a gray medium, called the model, which uses maximum entropy closure. This model is a generalization to 3D of the 1D version recently proposed in (J. Comp. Phys. 180 (2002) 584). The direction space Ω is divided into two pieces, Ω⁺ and Ω^-, in a dynamical way by the plane perpendicular to the total radiative flux, and the half moments are defined from these subspaces. The model closure and the integrations of the radiative transfer equation performed on the moving Ω^± spaces are detailed. 1D planar results, which have motivated the extension of the model of (J. Comp. Phys. 180 (2002) 584) to multi-dimensions, are shown. These results are very good. The model is thereafter derived for 3D spherically symmetric geometry, where the correctness of the non-trivial border terms can be checked. Two 3D spherically symmetric problems are numerically solved in order to show the accuracy of the closure and the role of the border terms. Once again, compared to the solution obtained with a ray tracing solver, results are very good. From the 3D half-moment model, a new moment model, called , is derived for the particular case of a 3D hot and opaque source radiating into a cold medium, for applications such as simulations of stellar atmospheres and fires. Two-dimensional numerical results are presented and compared to those obtained solving the RTE and with other moment models. They demonstrate the very good accuracy of the model, its good convergence properties, and better prediction compared to all other existing moment models in its domain of applicability.     

High-power continuous-wave operation of a diode-pumped laser at

The continuous-wave laser properties of an efficient diode-pumped Nd:GdVO₄ crystal operating at formed with a simple plane-concave cavity have been studied. With the incident pump power of 21 W, an output power of 6.9 W was obtained, giving an optical conversion efficiency of 32.8% and a slope efficiency of 35.3%. The laser characterization of two different Nd³⁺-doped concentration of Nd:GdVO₄ crystals were studied.     

A note on the fundamental solution for the Tricomi-type equation in the hyperbolic domain

Barros-Neto and Gelfand (Duke Math. J. 98 (3) (1999) 465; Duke Math. J. 117 (2) (2003) 561) constructed for the Tricomi operator on the plane the fundamental solutions with the supports in the regions related to the geometry of the characteristics of the Tricomi operator. We give for the Tricomi-type operator a fundamental solution relative to an arbitrary point of Rⁿ⁺¹ with the support in the region t?0, where the operator is hyperbolic. Our key observation is that the fundamental solution for the Tricomi-type operator can be written like an integral of the distributions generated by the fundamental solution of the Cauchy problem for the wave equation. The application of that fundamental solution to the L^p-L^q estimate for the forced Tricomi-type equation is given as well.     

Bacteriochlorin <Emphasis Type="Italic">e</Emphasis><Subscript>6</Subscript> as a sensitizer for photodynamic therapy

A simple scheme of modification of the native pigment bacteriochlorophyll a, extracted from the biomass of phototropic bacteria, for the purpose of obtaining a water-soluble derivative — bacteriochlorin e ₆ — which is similar in molecular structure to the effective sensitizer chlorin e ₆ and, in addition, has an intense longwave absorption band in the near-infrared region of the spectrum where biological tissues weakly absorb light — has been developed. The ease of production of bacteriochlorin e ₆ in combination with its physicochemical and spectral properties allow it to be considered as a promising sensitizer for photodynamic therapy.Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 71, No. 6, pp. 745–748, November–December, 2004.This revised version was published online in April 2005 with a corrected cover date.