硅的等离子体深腐蚀

湿法化学腐蚀已被广泛地应用于敏感器件传感结构的微细加工中.近年来,在VLSI中等离子体干法腐蚀已成为获得细线条图形的可行技术.然而,干法腐蚀工艺无论是等离子体腐蚀或反应离子腐蚀,相对于湿法腐蚀来说都是比较慢的.在需要深腐蚀的应用中(如电子束光刻的对准符号刻蚀,电路隔离槽或敏感器件的微细结构腐蚀)当前都着力提高腐蚀速率.在传感器的开发中,主要问题之一是封装,为简化到处于测量环境的传感器的外部连接,希望通过传感器背面进行连接.在化学传感器中,背面连接最为有利.因为假如所有的引线都     

Efficient Visible Electroluminescence from Porous Silicon Diodes Passivated by Carbon Films

By using n-butylamine as a carbon resource,carbon film is deposited on the p-n porous silicon (PS) surface with a radio-frequency glow discharge plasma system.Raman spectra and infrared reflection (IR) spectra of the carbon films indicate that there are amine-group and hydrogen atoms therein.The IR spectra of the passivated PS samples exhibit that the PS surfaces are mainly covered with Si-C,Si-N and Si-O bonds.Electroluminescence (EL) spectra show that the EL intensity of the passivated PS diodes increases greatly and the blueshift of the EL peak occurs compared with the diodes without treatment.Both of these are stable while the passivated diodes are exposed to the air indoors.The I-V characteristics reveal that the passivated diodes have a smaller series resistance and a lower onset voltage.The influence of the carbon film passivation on EL properties of PS has also been discussed.The results have proven that carbon film passivation is a good way to enhance the PS luminescent intensity and stability.     

Photoluminescence Characterization of Silicon Nanoparticles Hybridized Europium Complex

A europium complex Eu (DBM)3 TPPO (Eu tris(benzoylmethide)-(triphenylphosphine oxide)) and silicon nanoparticles have been hybridized.The hybridization can evidently change the photoluminescence (PL) characteristics of the Eu complex in the following aspects:under an excitation of 390nm,the intensity of the PL peak at 611nm due to the ^5Du-^7F2 transition of the Eu^3 ions has been increased by 30%,and thc integrated PL intensity in the visible range has been increased by nearly 3 times;the PL excitation efficiency beyond 440nm has been improved cvidently;the peak in the PL excitation spectrum shifts from 408nm to 388nm,and the PL decay time decreases from 2.07 to 0.96μs,The experimental results indicatde that in the PL process,the photoexcited energy may transfer from the silicon nanoparticlcs to the Eu^3 ions.     

Single＆Two—photon Excited Fluorescence of Two New Compounds with 2—Benzothiazoly as Electron Acceptor

Two new D-x-A type compounds,where electron-donor D is tertiary amino group,electron-acceptor A is 2-benzothiazolyl and x is two conjugated styryl units,have been synthesized.They are named as trans,trans-2-{4-[4-(N,N-diethylamino)styryl]styryl}-1,3-benzothiazole and trans,trans-2-{4-[4-(N,N-diphenylamino)styryl]styryl}-1,3-benzothiazole.Both compounds show strong two-photon excited fluorescence in yellow-orange region when excited by a femtosecond laser at 800nm.     

A New Pathway to Synthesize Cyclomercurated Ferrocenylimines Containing Heterocyclic Ring

The cyclomercurated ferrocenylimines containing heterocyclic ring were prepared by the condensation of cyclomercuration of acylferrocene with the appropriate heterocyclic amine.This procedure provides an efficient method for the synthesis of cyclomerucurated ferrocenylimines containing heterocyclic ring which are difficultly synthesized by the conventional method.The reaction mechanism is proposed.