镁合金表面微结构阵列的电化学微加工

研究了镁合金的约束刻蚀微加工方法. 通过对电解过程中电极表面氢离子浓度变化以及刻蚀体系对镁合金的腐蚀速率的测量与分析, 对一些可能有刻蚀作用的刻蚀体系进行了研究. 选用亚硝酸钠作为产生刻蚀剂(硝酸)的前驱体、氢氧化钠作为捕捉剂、少量硅酸钠作为缓蚀剂的约束刻蚀体系, 使用具有规整三维微立方体点阵结构的模板, 在金属镁表面加工出具有与模板互补特性的点阵微结构, 复制加工的分辨率为亚微米级. 并对刻蚀过程机理进行了探讨与分析.     

大曲率半径球面栅网加工工艺

讲述采用栅网光刻-成形球面-翻边一定型工艺解决了带翻边球冠形栅网加工的问题,与常规电火花加工栅网方法相比,该方法具有省时、高效、低成本的特点.     

Multi-hole plastic optical fiber force sensor based on femtosecond laser micromachining

We study the theoretical and experimental effects of hole quantity and inter–inter-hole spacing on insertion loss for using femtosecond laser to make bend-sensitive multi-hole plastic optical fiber(POF), and also analyze the mechanism of bending loss in multi-hole POF. A force sensor based on bending loss of the multi-hole POF is fabricated. The measurement ranges from 0 to 65 N, and the maximum output change exceeds 15.51 dB with good linearity and repeatability, and the sensitivity is 0.24 dB/N.     

飞秒激光直写铒镱玻璃波导激光器的优化设计

为了对双向抽运的飞秒激光直写铒镱共掺磷酸盐玻璃波导激光器进行数值模拟,采用铒镱共掺系统的速率方程及传输方程,对波导尺寸、激光器后腔镜反射率、掺杂铒镱离子浓度比等参量进行了优化。得到当波导长度为10mm、后腔镜反射率为0.6、掺杂铒镱离子浓度比为3.6,975nm波长400mW抽运时,有1535nm波长57mW的激光输出。结果表明,计算结果和国外相关报道的实验结果相近,能够为飞秒激光加工有源玻璃波导及其激光器设计提供一定的理论依据。     

对电火花加工规准转换的研究

正一、概述电规准是指在电火花加工中所选用的一组电脉冲参数,包括脉冲电流的峰值、脉冲的周期、脉冲的宽度和脉冲的间隔大小等电参数。在电火花成形加工中,电极会随着加工的进行而产生损耗。电规准选则是否合理,将直接影响到电加工效率和加工质量,因此,电规准应根据工件的加工质量要求、电极和工件的材料性能、机床设备与工艺指标等因素作合理的选择。电火花加工中,在粗加工完成后,再使用其他规准加工,使工件粗糙度逐步降低,逐步达到     

激光微加工的光纤法布里-珀罗应变传感器

报道了一种在光纤内部通过采用157nm激光微加工一个自封闭法布里-珀罗(F-P)腔而形成的在线式全光纤标准具。实验研究了这种标准具的应变和温度特性,结果表明,在标准具两固定点相距1m的情况下,位移-相移系数和位移-谷值波长漂移系数分别为1mrad/μm和5.2pm/μm,曲线的线性度为99.92%;在18℃～500℃的温度范围内平均温度系数为0.13mrad/℃和0.64pm/℃,温度不敏感。实验证明该标准具有很好的传感特性,能满足各种应变测试的需要,如极好的条纹对比度(高达30dB)、低温度交叉敏感、大规模生产的极大潜能、低成本和耐恶劣环境能力强等。     

微加工芯片式流通池在顺序注射可更新表面反射光谱检测中的应用

提出了一种以湿法蚀刻技术制备的用于流动注射（FI）或顺序注射（SI）进样可更新表面检测的芯片式流通池,并将此流通池与SI系统及检测器相匹配,用于顺序注射可更新表面（SI－RST）反射光谱法检测。流通池由两片玻璃封接而成,流通池通道蚀刻在玻璃基片上。流通池通过多股双岔光纤分别与光源、检测器相耦合,以实现对微珠表面的反射光谱法检测。将此SI－RST反射光谱法检测系统用于对锌的检测,并测定人发试样中微量锌的含量。     

A new process to fabricate the electromagnetic stepping micromotor using LIGA process and surface sacrificial layer technology

In this paper,a new process to fabricate an electromagnetic stepping micromotor using surface scarificial layer technology(SSLT) is illustrated,and the SEM photo of the stepping micromotor is showed.The torque of the stepping micromotor with maxsimum torque of 60μNm is directly calculated by using electromagnetics laws and the law of conservation of energy.The stator and the shaft and the rotor of the micromotor with the material of nickel are first all fabricated by normal LIGA process at the same time.The sacrificial layer structure with the material of AZ resist is made on the surface of the rotor by using SSLT.The stator and the shaft are fixed together with copper substrate instead of the old Ti substrate by electroplating.After removing the Ti substrate,PMMA resist and the sacrificial layer structure,the rotor is separated from the stator and new copper substrate,and can rotate on the new substrate driven by magnetic force.The four coils with 300 turns each are wound on iron bars by hand using microscope and stepping motor.The bars are assembled by hand into the stator holes from rear of new copper substrate to from a magnetic circuit with the stator and the rotor.A power supply with four consecutive pulses provides the current for the coils wound on the iron bars adn produces the magnetic force to drive the rotor to run with the speed of 60 rpm.