基于PECVD工艺的a-SiC_x∶H发光微腔的研究

以 PECVD为制备工艺 ,a-Si O2 ∶ H/a-Si∶ H为布拉格反射镜多层膜 ,a-Si Cx∶ H为中间腔体发光材料 ,制备垂直腔面的发光微腔。文章通过模拟确定了微腔的多层膜层数和排列顺序 ,并对微腔的发光特性进行了反射谱和荧光谱研究。结果表明 ,该微腔性能良好 ,能激射出半高宽为 9nm、波长为 743 nm的荧光峰 ,与设计值70 0 nm基本吻合。     

Fiber Bragg Grating Pressure Sensor Based on Corrugated Diaphragm

A kind of fiber Bragg grating pressure sensor based on corrugated diaphragm is proposed. The relationship between the central wavelength of reflective wave of FBG and pressure is given, and the expression of the pressure sensitivity coefficient is also given. Within the range from 0 MPa to 0.3 MPa, the experimental pressure sensitivity is 7. 83 nm/MPa, which is 2 610 times than that of the bare fiber grating. The experimental results agree with the theoretical analysis. It is indicated that the expected pressure sensitivity of the sensor can be obtained by optimizing the size and mechanical parameters of the corrugated diaphragm.     

GJ-341小型遥控光电经纬仪测量精度的基本评析

GJ－341小型遥控光电经纬仪是典型的双反射镜式光电经纬仪，所以不可避免地存在像旋以及反射镜过多引起的系统测量精度降低等问题。GJ－341小型遥控光电经纬仪的测量精度问题长期以来困扰研制单位和使用单位。本文对GJ－341小型遥控光电经纬仪的测量精度问题进行了较系统的分析与评估，并提出提高GJ－341小型遥控光电经纬仪测量精度的途径。     

极紫外投影光刻原理装置的集成研究

论述了光刻技术发展的历程，趋势和极紫外投影光刻技术的特性，并介绍了极紫外投影光刻原理装置的研制工作，该装置由激光等离子体光源,掠入射椭球聚光镜，透射掩模，施瓦茨微缩投影物镜及相应的真空系统组成，其工作波长为13nm，在直径为0．1mm的像方视场内设计分辨率优于0．1um。     

用于X光激光实验的离轴球面反射镜线聚焦系统的研究

本文对用于Ｘ光激光实验的离轴式线聚焦光学系统作了详细的理论与实验研究。该系统已成功地用于“星光Ⅱ”激光装置的Ｘ光激光实验研究，取得了良好的结果     

Study on optical compund films

Using the compound materials and double e-gun evaporation ,the compound optical films have been successfully deposited on K9 glass substrate.The refractive index of optical compound films deposited in diffeent parameters have been measured and theoretical formula for calculation refractive index of compound films have been derived.Tt is shown that the experimental curve for the variation of re-fractive index with wavelength in 0.4-1.4цm region and the theoretical one agree very well.Using these films,the laser reflecting mirror has been successfully coat-ed.     

激光圆偏振镜相移参数的测量

CO2激光圆偏振镜是CO2激光器在工业加工中的重要光学元件,本文描述一种测量这种光学元件相位特性的方法,并对其测量误差进行了分析。     

用混合材料镀制激光反射镜

用（Ｔａ２Ｏ５＋ＺｒＯ２）和ＳｉＯ２成功地镀制出两个波段的激光反射镜，使激光破坏阈值提高５％－１５％，膜层吸收小，机械强度增加，理论计算和测量混合成分含量表明，膜成分与配比成分存在６％－１３％的偏差。