排序方式: 共有63条查询结果,搜索用时 31 毫秒
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利用企业的电子陶瓷工艺制备了CeO2掺杂Bi0.5(Na1-x-yLixKy)0.5TiO3无铅压电陶瓷,并研究了CeO2掺杂对该体系陶瓷的介电压电性能与微观结构的影响。X-射线衍射结果表明,掺杂的CeO2扩散进入了Bi0.5(Na1-x-yLixKy)0.5TiO3钙钛矿结构的晶格;SEM观察结果表明,少量的CeO2掺杂可改进该陶瓷的微结构;介电压电性能研究结果表明,CeO2掺杂对该陶瓷体系的综合性能有较大改善,室温下该体系配方的压电常数d33可达199 pC/N,径向机电耦合系数kp达39.3%,同时降低了陶瓷的介电损耗(tanδ=2.0%),提高了其机械品质因数。 相似文献
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In this paper, the metamorphic high electron mobility transistors (mHEMTs) are investigated numerically and compared with pseudo-morphic high electron mobility transistors (pHEMTs). The two-dimensional device simulator, MEDICI, is used to solve the Poisson's equation and the electron/hole current continuity equations. The influences of δ-doping concentration and position, gate width, spacer thickness, etc. on the performances of HEMTs are explored. It shows clearly that mHEMTs have higher transconductances, drain currents and DC voltage swings than pHEMTs. 相似文献
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采用sol-gel法制备了Y3+掺杂Ba0.90Sr0.08Ca0.02TiO3(BSCT)纳米粉体及细晶陶瓷。通过TG-DTG、XRD、SEM和TEM对样品结构及形貌进行了表征,并测试了陶瓷的介电性能。研究表明,Y3+掺杂BSCT纳米粉体主要为立方相BaTiO3,烧结后陶瓷晶粒尺寸在0.68~2.24μm可控,Y3+掺杂可以抑制陶瓷晶粒的生长,使陶瓷的tC向低温方向移动。随Y3+掺杂量的增大,陶瓷的介电温谱εr-t趋于平缓,当x(Y3+)为7.0%时,陶瓷的室温εr大幅度提高到9 176。 相似文献
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以十甲基环五硅氧烷和甲烷作为反应气体,采用电子回旋共振等离子体化学气相沉积(ECR-C VD)方法制备了k = 2.45,485℃下的热稳定性优良的SiCOH低介电常数薄膜.通过薄膜结构的 FTIR谱分析,比较了十甲基环五硅氧烷(D5)液态源和不同甲烷流量下制备的薄膜的键结构差 异,发现在沉积过程中甲烷含量的增大,一方面有利于D5源环结构的保留,另一方面有利于 薄膜中形成高密度的CHn基团.高密度碳氢大分子基团的存在降低了薄膜密度, 结合薄膜中形成的本构孔隙、低极化率Si—C键以及—OH键减少的共同作用,导致薄膜介电 常数的降低.
关键词:
低介电常数
SiCOH薄膜
碳氢掺杂 相似文献
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Abstract An improved r.f. heavy ion source, which can operate with gases, liquids and solids is described. The operating temperature of the ion source may reach 1000°C. It can therefore, generate ion beams of a considerable number of elements. including metallic ions. At present, ion beams of S+, Al+, As+. Zn+, Mg+, Cd+, Ag+, Sm+, Te+, Se+, Sn+, In+, Hg+, etc. have been extracted. The extracted total beam current ranges from several hundred microamperes to the order of milliampere. The useful fraction of ion in the total beam is 70–90%. Life span of the source ranges from 40 hours to more than 100 hours. The emittance of the source is 3 × 10?6 cm rad. Structure and operating characteristics of this ion source are discussed. 相似文献
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Two-dimensional doping sheets (“δ-doping”) are integral parts of many novel semiconductor device concepts. Their practical realization in silicon (Si), however, was long delayed by the difficulty to introduce dopants into Si in a well-controlled way during epitaxial growth. Recent advances in the understanding of epitaxial growth and the incorporation of dopants in Si have overcome these difficulties and opened a new field in Si materials and device research. In this article, we review the growth, processing, and characterization of epitaxially grown 5-doped Si. Furthermore, we discuss the electronic subband states of such structures. Finally, we give an overview of device concepts that use 5-doping and analyze their properties. 相似文献
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Basma A.A. Balboul 《Thermochimica Acta》2006,445(1):78-81
The reaction between lanthanum oxide and strontium carbonate was studied non-isothermally between 350 and 1150 °C at different heating rates, intermediates and the final solid product were characterized by X-ray diffractometry (XRD). The reaction proceeds through formation of lanthanum oxycarbonate La2O(CO3)2, lanthanum dioxycarbonate La2O2CO3, and non-stoichiometric strontium lanthanum oxide La2SrOx (x = 4 + δ). La4SrO7 was found to be the final product which begins to form at ∼700 °C. Li+ doping enhances the formation of the final product as well as commencement of the reactions at lower temperatures. 相似文献
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