Automatic Deformation Analysis in Electronic Speckle Pattern Interferometry Using One Speckle Interferogram of Deformed Object

We propose a new fringe analysis method that uses only one speckle interferogram of a deformed object to obtain phase change distribution by deformation. This method uses cos^-1 operations to extract absolute, not signed, values of new phase after deformation. Considering the phase changes in a small local area, true phase changes retain almost the same value by assuming a continuous deformation in the area. This retention determines the sign of the new phase. From the new phase and the initial phase, the phase change distribution by the deformation can be obtained. Experimental results show the usefulness of this method.     

ESPI solution for non-contacting MEMS-on-wafer testing

Rapid progress in the field of micro-electro-mechanical systems (MEMS) makes the development of appropriate measuring and testing means timely. Characterizing the mechanical properties of MEMS structures at a very early stage of manufacturing is a challenging task for quality assurance in this field. The paper describes a new solution that is based upon the vibration analysis of the microparts. The nanometer amplitudes are detected by advanced electronic speckle pattern interferometry (ESPI). A specific signal processing technique has been applied to make the solution robust. Comprehensive numerical simulations provide the theoretical base for the HNDT concept. A laboratory system for 4″ wafer has been built, and extensive tests show that such key properties as e.g. the thickness of springs or membranes can be determined exactly. Automated frequency scanning and corresponding digital image processing open the way to reliable and fast industrial systems for MEMS testing on wafer level.     

光纤全息散斑干涉计量

脉冲激光经光导纤维传输后，其偏振性变化为随机分布，相干性有所降低，但它用在全息干涉计量中却有突出的优点，对于涉条纹的形成和清晰度没有影响。经常使用的光纤散斑全息干涉系统有两种类型：一种是只用传光束形成物光，参考光，此种系统形成的全息象清晰度有所下降，但做全息干涉计量时对条纹的衬比度和清晰度没有任何影响．另一种类型是物光和参考光都是用光导纤维传输，然后用光纤传象束将物体的象进行传输，再用透镜将其成象在底片上，做双曝光全息干涉时则形成全息散斑干涉计量，用全息方法再现时干涉图类似“杨氏”条纹。本文对上述两种系统，结合实验结果、分三种情况进行了研究。文章共分为三个部分：（一）引言；（二）散斑全息干涉计量；（三）结论。     

Study of the multilayer PCB CTEs by moiré interferometry

Microelectronics packaging has been developing rapidly due to the demands for faster, lighter and smaller products. Printed circuit boards (PCBs) provide mechanical support and electrical interconnection for electronic devices. Many types of composite PCBs have been developed to meet various needs. Recent trends in reliability analysis of PCBs have involved development of the structural integrity models for predicting lifetime under thermal environmental exposure; however the theoretical models need verification by the experiment.

The objective of the current work is the development of an optical system and testing procedure for evaluation of the thermal deformation of PCBs in the wide temperature range. Due to the special requirements of the specimen and test condition, the existing technologies and setups were updated and modified. The discussions on optical methods, thermal loading chambers, and image data processing are presented. The proposed technique and specially designed test bench were employed successfully to measure the thermal deformations of PCB in the −40°C to +160°C temperature range. The video-based moiré interferometry was used for generating, capturing and analysis of the fringe patterns. The obtained information yields the needed coefficients of thermal expansion (CTE) for tested PCBs.     

时间序列散斑干涉技术研究及应用

当用相干激光照射在一个连续位移或变形的漫射物体表面时,在与参考光形成干涉的接收面上即产生一随时间变化的散斑干涉场通过对这一干涉场的时间域进行分析,可实现时变位移场的定量检测本文介绍了基本时间序列散斑干涉场的扫描相位方法和时间序列相位法的相位函数解调原理,探讨了它们的计量特性,并将其用于火箭固体燃料性能的检测.     

A curve fitting signal processing scheme for a white-light interferometric system with a synthetic source

A white-light interferometric system, which comprises two Michelson interferometers linked by a 100 μm diameter core multimode step index fibre has been investigated, where a signal processing scheme, using curve fitting, has been introduced to suppress the noise induced in the system. The theoretical resolution of such a sensor with the use of an appropriate curve fitting signal processing scheme has been discussed. The experimental results obtained show the short term repeatability (to three standard deviations) to be better than 5 nm after signal processing, under conditions where the fibre is constantly vibrated in a known and reproducible way.     

E. 高速全息摄影和激光干涉测量的进展

本文对高速全息摄影和激光干涉测量术的最新发展作了详细评述。     

Geometric Phase Observation with Dispersed Fringes

Geometric and dynamic phases are separately observed using dispersed fringes, and the difference between them is clearly demonstrated. Independence of geometric phase of wavelength is straightforwardly shown in the dispersed fringe.     

Measuring small wavelength differences by heterodyne interferometry and optical activity of chiral crystal

The optical activity of a chiral crystal and common-path heterodyne interferometry are used in a simple measurement technique that was developed to measure small wavelength differences. When circularly polarized heterodyne light passes through a chiral crystal, the plane of polarization rotates. The phase difference between the right- and left-circular lights is directly proportional to the angle of rotation. The rotation angle depends strongly on the wavelength. The phase difference can be accurately detected and substituted into specially derived equations to estimate wavelength variations. The feasibility of this method was demonstrated and the wavelength sensitivity was about 0.00812 nm. This method provides the advantages of a simple structure, ease of operations, a large wavelength measurement range and high sensitivity.     

Development of an integrated optical system for warpage and hermeticity test of microdisplay

We have developed an integrated optical system to measure the warpage of a microdisplay product at post-packaging die-attach temperature and to test its hermeticity after manufacturing. This system is constructed based on the principle of Twyman/Green (T/G) interferometry and Newton interferometry. T/G interferometry is used to characterize warpage of the microdisplay's base-plate, while Newton interferometry is used to characterize the gap variance between face-plate and base-plate of the microdisplay. With these measurements, deformation and shape of the microdisplay can be comprehensively determined during its manufacturing process, which is critical for its quality test and reliability evaluation. Delicate mechanical system was designed to facilitate the optics integration and alignment. To evaluate the performance of the optical system itself, warpage of a sample was re-measured with Tailor–Hobson profilometer whose resolution is 10 nm, the results from these two testing systems agree well with each other. Some application examples of the integrated testing system were presented to verify its work efficiency.