Pore size distributions in low‐k dielectric thin films from X‐ray porosimetry

X‐ray reflectivity has been used to determine the mass uptake of probe molecules in porous thin films supported on thick silicon wafers. The adsorption occurs by capillary condensation when the films are exposed to probe vapor at controlled partial vapor pressures. The probe solvent partial pressure was varied by mixing saturated air and dry air at constant temperature or by changing sample temperature at a constant vapor concentration. Pore size distribution in the films can be calculated from the probe uptake with typical porosimetric approaches such as the application of the Kelvin equation to convert partial pressure into pore size. For illustration, the pore size distribution of three different nanoporous thin films, the primary candidate of ultra‐low‐k interlevel dielectrics in the next generation of integrated circuit chips, was determined with this technique. These samples represent different generations of low‐k dielectrics developed by industry. © 2002 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 40: 2170–2177, 2002     

COMPENSATION EFFECT OF POLYIMIDE THIN FILMS ON NORMALLY WHITE TWISTED NEMATIC LIQUID CRYSTAL DISPLAYS

The disadvantages of Normally White Twisted Nematic Liquid Crystal Display (NW-TN-LCD) were discussed. The reason that the negative birefringent polyimide thin filmswere used to compensate NW-TN-LCD to decrease off-axis leakage, improve contrast ratiosand enlarge viewing angles was explained in this paper. A certain polyimide thin film wastaken as an example to show compensation effect on NW-TN-LCD.     

Photocatalytic Oxidation of Aniline in the Gas Phase Using Porous TiO2 Thin Films

The gas-phase photocatalytic oxidation of aniline on a new kind of porous nano-TiO₂ composite films is investigated. The composite film was prepared on glass fiber with the water glass as binders and dilute H₂SO₄ solution as solidifying reagent. The surface characters were observed by scanning electron microscope. The photocatalytic degradation of aniline on the composite films was carried out in a TiO₂/UV system. Some important factors affecting the photodegradation, such as the concentration of TiO₂, the initial concentration of aniline, and the existing water vapor, are also studied. The product of photocatalytic oxidation was detected by Fourier transform-Infrared. The partial intermediate products were absorbed on TiO₂ surface, which resulted in catalyst deactivation. But when it was irradiated under UV illumination or solar irradiation for some time, the catalyst could be reused without loss of catalytic activity. Translated from the Journal of Wuhan University (Natural Science Edition), 2005, 51(2) (in Chinese)     

Visible Up-Conversion Luminescence in Ho3+: BaTiO3 Nano-Crystals Prepared by Sol Gel Technique

Visible up-conversion emissions at (435, 545, 580, 675 and 690 nm) and (437, 547 575 and 675 nm) have been observed from the sol-gel derived nano-crystalline Ho³⁺: BaTiO₃ powders and thin films respectively, under 808 nm laser diode excitation emissions. Combined with the energy level structure of Ho³⁺ ions and the kinetics of the visible emissions, the up-conversion mechanism has been analyzed and explained. The blue, green and red emissions of both samples has been attributed to the ground state-directed transition from (⁵F₁), (⁵S₂) and (⁵F₅), which are populated through excited state absorption (ESA) for 808 nm excitation. Nano-structure pure barium titanate and doped with different concentrations of Ho³⁺ ions in the from of powder and thin film have been prepared by sol-gel technique, using barium acetate (Ba(Ac)₂), and titanium butoxide (Ti(C₄H₉O)₄), as precursors. The thin films were prepared by sol-gel spin coating method. The as-grown thin films and powders were found to be amorphous, which crystallized to the tetragonal phase after heating at 750°C in air for 30 minutes. The crystallite sizes of the thin film and powder both doped with 4% Ho³⁺ ions was found to be equal to 11 and 16 nm, respectvely.     

Electron microscopic phase analysis of BN-thin films

A series of BN films was deposited by means of r.f. magnetron sputtering of a h-BN target onto Si(1OO) surfaces. Hereby, the substrate bias voltage was varied. Special interest is focussed to the influence of the deposition parameters on the orientation of the growing hexagonal BN film with respect to the substrate. For structural investigation, cross section samples were prepared. In addition to HRTEM and diffraction investigations, especially electron energy loss spectroscopy (EELS) was applied successfully for phase identification. For negative bias voltages of U _B =–300 V and U _B =–350V, we found a phase system consisting of a first-grown 25 nm thick layer of hexagonal structure with the c axis parallel to the substrate surface followed by the cubic phase.Dedicated to Professor Dr. rer. nat. Dr. h.c. Hubertus Nickel on the occasion of his 65th birthday     

Heterometallic lead-titanium oxyalkoxide precursors to lead titanate thin films

Two lead titanium oxyalkoxides with composition Pb₂Ti₄O₂(O₂CCH₃)₂(OC₂H₅)₁₄ and Pb₂Ti₂O₂(O₂CCH₃)₂(OCH(CH₃)₂)₈ have been isolated and characterised by elemental analysis, IR, ²⁰⁷Pb NMR and molecular weight measurements. X-ray structural analysis of the 1:2 complex confirmed the presence of two Pb₂Ti₂O units which are linked by a common Pb···Pb edge and are held together by alkoxide and acetate bridges. The acetate groups have migrated from the Pb to the Ti centres during the reaction. Hydrolysis of the 1:1 Pb/Ti complex produced clear gels providing the H₂O/complex ratio was less than 4. Heat treatment of the gel results in loss of residual organics below 400°C. The XRD pattern indicates the presence of the pyrochlore and perovskite phases after heating at 500°C but the sample is poorly crystalline. Complete conversion to the perovskite phase of lead titanate occurs on heating to 600°C for 1 hour. Thin films of lead titanate were deposited by dip-coating a solution of this complex in isopropanol. Analyses of the films, carried out using electron microprobe, Scanning Auger Spectroscopy and Rutherford Backscattering, indicated that they were of excellent quality, crystalline after heating at 600°C and with relatively sharp substrate-coating interface.     

Linked crystallites in the conducting topmost layer of polymer bilayer films controlled by temperature: from micro- to nanocrystallites.

Temperature has great impact on the structure and size of the linked crystallites of the conducting topmost layer formed at the surface of a polycarbonate film via the reaction BEDT-TTF+IBr [BEDT-TTF=bis(ethylenedithio)tetrathiafulvalene]. We show that fine temperature control permits formation of a semiconducting topmost layer of alpha'-(BEDT-TTF)(2)(I(x)Br(1-x))(3) crystallites with either micro- or nanometre size, a result that opens a route to miniaturized conducting plastic materials.     

四元缔合物体系薄层树脂相分离与光度法联用测定痕量钴

提出了在酸性条件下 (pH=5.0),利用阳离子交换树脂-丁二酮肟-碘-钴四元体系,通过薄层树脂相光度法测定钴的新方法。本法灵敏度高 (e454=1.7105L/molcm),比水相光度法提高14倍,精密度理想 (测定2.0礸/ml Co(II) 6次,RSD=1.3%),选择性好。实测药品VB12及天然水中钴,线性范围0.024~2.0礸/ml (定容50ml),检出限10.4ng/ml。     

Synthesis and characterization of new poly[phenylquinoxaline(ether)imides]

A series of new aromatic poly[phenylquinoxaline(ether)imides] were synthesized by solution polycondensation of aromatic diamines containing preformed phenylquinoxaline groups with dianhydrides having ether linkages and isopropylidene or hexafluoroisopropylidene units. All polymers are readily soluble in polar organic solvents (N-methylpyrrolidinone, DMF, dimethylacetamide) and in less polar liquids such as chloroform. Very thin coatings were deposited onto silicon wafers. According to atomic force microscopy, they had a smooth, pinhole-free surface. The polymers showed high thermal stability with decomposition temperatures above 470 °C and glass transition temperatures in the range of 210–238 °C, being thus characterized by a large gap between the glass transition and decomposition temperatures.Based on the report presented at the International Conference Modern Trends in Organoelement and Polymer Chemistry dedicated to the 50th year anniversary of the A. N. Nesmeyanov Institute of Organoelement Compounds of the Russian Academy of Sciences (Moscow, May 30–June 4, 2004).Published in Russian in Izvestiya Akademii Nauk. Seriya Khimicheskaya, No. 9, pp. 1952–1957, September, 2004.     

Crystallization Temperature Limit of (Ba,Sr)TiO<Subscript>3</Subscript> Thin Films Prepared by a Non Oxocarbonate Phase Forming CSD Route

A new chemical solution deposition (CSD) route for the fabrication of Ba_0.7Sr_0.3TiO₃ (BST) thin films has been developed which completely prevents the formation of an intermediate oxo-carbonate phase. The latter has been reported previously by several authors to be responsible for increased crystallization temperatures. Barium and strontium diaminoethoxides were synthesized starting from pure barium and strontium metal and aminoethanol. These alkoxides were found to be readily soluble in a wide range of solvents and thus were excellent candidates for the CSD process. To prepare a stable precursor solution the aminoalkoxides were dissolved in 2-butoxyethanol and then used for the deposition of BST thin films. We conclude that the minimum crystallization temperature of 600C to be independent of the formation of the oxo-carbonate phase. DTA-TGA were performed on the precursors and their solutions to study their decomposition behaviour. All films annealed at different temperatures were physically characterized by XRD, IR, and SEM. The films prepared by this route at 650C were found to have high dielectric constant and the leakage currents were comparable to BST films prepared by normal carboxylate based routes at 750C.