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71.
72.
研究了在不同气体环境下,利用532nmNd:YAG纳秒脉冲激光累积辐照单晶硅表面形成的微结构,结果表明,在其他条件相同,背景气体不同的情况下,背景气体对硅表面形貌的形成起着重要的作用。具体分析了真空、N2和SF6 3种环境气氛下形成的微结构,结果显示,在sF6中形成的锥形微结构的数密度比在N2和真空中的大,并且锥形具有更大的纵横比;在N2、真空和sF6中形成的微结构尺寸依次减小。sF6气氛下,激光辅助化学刻蚀的效率比在真空和N2气氛中的高。另外,辐照区域边缘有波纹微结构形成,分析认为,该微结构的形成是由表面张力波的冷却导致的。 相似文献
73.
74.
In this paper, multilayer structures of porous silicon were fabricated by using electrochemical etching and characterized for its optical properties and surface morphology. Samples of monolayer of porous silicon were grown to study the characteristics of porous layer formation with respect to applied current density, etching time and hydrofluoric acid concentrations. Photoluminescence peaks of red emission at wavelength 695 and 650 nm were observed from multilayer porous silicon structures. By atomic force microscopy measurement, hillocks like surface were clearly observed within the host material, which confirmed the formation of pores. 相似文献
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77.
In this study, effect of lanthanum substitution on the phase composition, lattice parameters and magnetic properties of barium hexaferrite has been studied in samples synthesized in ammonium nitrate melt. Samples, prepared with different lanthanum amount and having various initial Fe/(Ba+La) ratios in between 12 and 2 {(Ba1−xLax)·n Fe2O3, where 0≤x≤1 and 1≤n≤6)}, are sintered at temperatures from 800 to 1200 °C. The lattice parameters, both a and c, decreases with increasing La amount which results in a decrease of the unit cell volume. The scanning electron microscope micrographs show that the pure and La-substituted sample with x=0.3, both calcinated at 1000 °C, have grain sizes smaller than 1 μm. The coercivities of the La-substituted samples increase with increasing La amount and reaches to a maximum value of 5.73 kOe, when x=0.3. Sintering at higher temperatures (above 1000 °C) decreases the coercivity, resembling a transition from single to multi-domain behavior of the particles, while saturation magnetization of the samples continues to increase due to the increasing grain size. Magnetization measurements of the samples prepared with different Fe/(Ba+La) molar ratios, n's, revealed that the specific saturation magnetization slightly increases with decreasing n, while coercivities fluctuates around 5.5 kOe. However, a sharp increase in the saturation magnetization has been observed in the sample having n=1 and washed in HCl. It was measured as 59.2 emu/g at 15 kOe, which is higher than that of the pure sample (57.5 emu/g). Thus, the magnetic parameters are optimized in the sample Ba0.7La0.3Fe12O19 so as to maximize both coercivity and specific saturation magnetization in the HCl-washed sample synthesized by starting with an unusually low Fe/(Ba+La) molar ratio of 2 (or n=1). 相似文献
78.
Stefan Rysy Horst Sadowski Reinhard Helbig 《Journal of Solid State Electrochemistry》1999,3(7-8):437-445
Both n- and p-type SiC of different doping levels were electrochemically etched by HF. The etch rate (up to 1.5 μm/min) and
the surface morphology of p-type 6H-SiC were sensitive to the applied voltage and the HF concentration. The electrochemical
valence of 6.3 ± 0.5 elementary charge per SiC molecule was determined. At p-n junctions (p-type layer on a n-type 6H-SiC
substrate) a selective etching of the p-type epilayer could be achieved. For a planar 6H-4H polytype junction (n-type, both
polytypes with equal doping concentrations) the 4H region was selectively etched under UV illumination. Thus polytype junctions
could be marked by electrochemical etching. With HCl instead of HF no etching of SiC occurs, but a SiO2 layer (thickness up to 8 μm) is formed by anodic oxidation.
Received: 29 October 1998 / Accepted: 27 January 1999 相似文献
79.
A facial chemical etching method was developed for fabricating superhydrophobic aluminum surfaces. The resultant surfaces were characterized by scanning electron microscopy, water contact angle (WCA) measurement, and optical methods. The surfaces of the modified aluminum substrates exhibit superhydrophobicity, with a WCA of 154.8° ± 1.6° and a water sliding angle of about 5°. The etched surfaces have binary structure consisting of the irregular microscale plateaus and caves in which there are the nanoscale block‐like convexes and hollows. The superhydrophobicity of aluminum substrates occurs only in some structures in which the plateaus and caves are appropriately ordered. The resulted surfaces have good self‐cleaning properties. The results demonstrate that it is possible to construct superhydrophobic surface on hydrophilic substrates by tailoring the surface structure to providing more spaces to trap air. Copyright © 2009 John Wiley & Sons, Ltd. 相似文献
80.
Two quartz crystal microbalances have been mounted in a planar rf discharge system in such a way that the potential of the microbalances with respect to the glow discharge can be varied. This apparatus allows a rapid simulation of the etching directionality that can be expected in real pattern transfer situations in that operating one microbalance at ground and one at a negative potential gives a measure of the sidewall and vertical etch rates, respectively. The voltage threshold for ion-assisted etching has been determined to be 20 V which is the approximate value of the plasma potential in this asymmetric system. 相似文献