193nm光刻曝光系统的现状及发展

投影曝光工艺是集成电路制造过程中的关键环节，曝光系统的工艺水平已成为衡量微电子制造技术的重要标志。重点介绍了目前193nm光刻设备曝光系统的发展现状和趋势，以及为提高曝光质量所采用的相关分辨率增强技术；通过分析曝光系统的构成和其中的关键技术，探讨了国内研制相关曝光设备所面临的挑战。     

Polymer Nanocomposites for Emulsion‐Based Coatings and Adhesives

Emulsion‐based coatings and adhesives are in growing demand due to an increased awareness of health and safety issues arising from solvent‐based polymer manufacturing processes. However, emulsion‐based techniques often require additional development to achieve equal or better application performance compared to solvent‐based processes. The inclusion of nanoparticles in emulsion‐based coatings and adhesives can be considered as a promising means to enhance performance. This paper reviews the current progress on the synthesis of emulsion‐based nanocomposites for coating and adhesive applications and addresses the principles and techniques for nanoparticle dispersions and their inclusion into polymer latexes. The effects of nanoparticle shape and size on the enhancement of nanocomposite properties are also highlighted. Among the reinforcing nanoparticles such as nanoclays, carbon nanotubes, and cellulose nanocrystals (CNCs), CNCs are promising due to their abundance, nontoxicity, and accessible surface hydroxyl groups, which facilitate their compatibility with polymer latexes via physical and chemical treatments.     

An experimental investigation on pool boiling heat transfer enhancement using Cu-Al2O3 nano-composite coating

Pool boiling heat transfer performances of Cu-Al₂O₃-coated copper surfaces have been studied experimentally for its potential use in heat transfer applications. In the present study, a two-step electrochemical deposition method is examined. This method provides an easy control on surface properties such as porosity and coating thickness. The deposition method is studied carefully and responsible surface morphology parameters are reported. After performing the pool boiling experiments on coated surfaces with DI water, the maximum critical heat flux of 1800 kW/m² and heat transfer coefficient of 193 kW/m² K, which are 68% and 260% higher than that of bare surface, respectively.     

A Micellar Mitotane Formulation with High Drug‐Loading and Solubility: Physico‐Chemical Characterization and Cytotoxicity Studies in 2D and 3D In Vitro Tumor Models

Adrenocortical carcinoma (ACC) is a rare tumor and prognosis is overall poor but heterogeneous. Mitotane (MT) has been used for treatment of ACC for decades, either alone or in combination with cytotoxic chemotherapy. Even at doses up to 6 g per day, more than half of the patients do not achieve targeted plasma concentration (14–20 mg L^?1) even after many months of treatment due to low water solubility, bioavailability, and unfavorable pharmacokinetic profile. Here a novel MT nanoformulation with very high MT concentrations in physiological aqueous media is reported. The MT‐loaded nanoformulations are characterized by Fourier transform infrared spectroscopy, differential scanning calorimetry, and powder X‐ray diffraction which confirms the amorphous nature of the drug. The polymer itself does not show any cytotoxicity in adrenal and liver cell lines. By using the ACC model cell line NCI‐H295 both in monolayers and tumor cell spheroids, micellar MT is demonstrated to exhibit comparable efficacy to its ethanol solution. It is postulated that this formulation will be suitable for i.v. application and rapid attainment of therapeutic plasma concentrations. In conclusion, the micellar formulation is considered a promising tool to alleviate major drawbacks of current MT treatment while retaining bioactivity toward ACC in vitro.     

基于粗糙集理论的胸部X线数字图象增强方法的研究

采用一种基于粗糙集理论实现胸部X线数字图象增强的新方法,该方法根据粗糙集的条件属性,将一幅采用双能量算法获得的肺部软组织X线数字图象划分为不同的子图象,然后对各个子图象分别作衬比增强从结果中可看出,采用种方法处理后得到的图象效果较为理想,能给临床上的医学工作者提供清晰的图象,同时也为后续的计算机辅助诊断提供有效的依据.     

新型制冷机冷凝器壳侧的传热强化研究

针对现行制冷机冷凝器的不足 ,设计了适用于冷凝传热的新型折流杆冷凝器的壳程内部结构 ,并分析了其传热强化机理。在重力控制条件下 ,对不同内部支承结构与管束组合的冷凝器进行了传热实验研究 ,得到了水蒸汽在冷凝器壳侧的冷凝传热特性曲线。采用冷凝传热强化因子的概念 ,建立了预测该种折流杆冷凝器壳侧冷凝传热膜系数的计算公式 ,为折流杆冷疑器在制冷系统中的设计应用提供了理论依据。     

钛酸锶晶体的光致介电常数激增以及超顺电大极化子理论

钙钛矿类化合物钛酸锶具有明显的光致介电增长的性质,这是由于被光激发至Ti⁴⁺的3d能带上的电子具有良好的巡游特性,为了进一步揭示光致介电增长的微观机理,这里假设巡游电子同时与两类声子发生耦合作用,一方面,电子与A_1g模式的晶格呼吸子发生强相互作用,另一方面,电子还与T_1u模式的非简谐声子具有相对较弱的耦合.通过变分法计算可得,这种复杂的电声耦合作用在晶体中形成两种极化子:自陷极化子和超顺电大极化子.正是由于超顺电大极化子的形成,导致了光致介电激增的现象.     

基于Retinex理论与概率非局部均值的红外图像增强方法

针对传统红外图像增强算法中细节模糊及过度增强的问题,提出了一种基于Retinex理论与概率非局部均值相结合的红外图像增强方法.首先通过单尺度Retinex方法调整图像中过暗与过亮部分的灰度级;然后利用概率非局部均值对图像进行分解处理得到基本层与细节层,对基本层采用直方图均衡化拉伸对比度,对细节层采用非线性函数进行增强;最后,将不同层次的结果融合得到对比度与细节增强的红外图像.用该方法对多组不同场景的红外图像进行仿真实验,并将其与多种增强方法进行主、客观对比分析,结果表明所提方法在红外图像的细节及对比度增强方面都获得了更好的效果.     

结合幅度谱和功率谱字典的语音增强方法

从双路字典学习、噪声功率谱估计、语音幅度谱重构角度提出了一种改进的谱特征稀疏表示语音增强方法。在字典学习阶段,融合功率谱与幅度谱特征,采用区分性字典降低语音字典和噪声字典的相干性;在语音增强阶段,提出一种噪声功率谱估计方法对非平稳噪声进行跟踪估计;考虑到幅度谱和功率谱特征对不同噪声的适应程度不同,设计了语音重构权值表。对分别由幅度谱和功率谱恢复而来的两路信号进行自适应加权重构,结合相位补偿函数得到增强后的语音信号。实验结果表明,该方法在平稳、非平稳噪声环境下相比于单一谱特征的语音增强方法平均提高31.6%,改善了语音增强方法的性能。