A Directly Patternable,Click‐Active Polymer Film via Initiated Chemical Vapor Deposition

Click‐active surfaces patterned at 200 nm resolution are demonstrated using the dual functional polymeric film, poly(propargyl methacrylate) (PPMA). The commercially available monomer of propargyl methacrylate (PMA) is polymerized in a single step by initiated chemical vapor deposition (iCVD). FT‐IR and X‐ray photoelectron spectroscopy confirm retention of the click‐active acetylene functional group in the bulk and surface of the iCVD film, respectively. Treating substrates with silane coupling agents prior to deposition results in grafting of iCVD PPMA polymers onto various inorganic surfaces. This grafting technique provides the chemical and mechanical stability required for the PPMA layer to survive the subsequent wet chemical steps used for click functionalization. Successful attachment of an azido‐functionalized coumarin dye is demonstrated. Moreover, the PPMA film displays direct positive‐tone sensitivity to e‐beam irradiation, which enables e‐beam patterning without the use of a resist layer. Direct e‐beam exposure of the multifunctional PPMA iCVD layer results in a 200 nm pattern to which quantum dot nanoparticles are selectively conjugated on the substrates by click chemistry.

     

193nm光刻曝光系统的现状及发展

投影曝光工艺是集成电路制造过程中的关键环节,曝光系统的工艺水平已成为衡量微电子制造技术的重要标志。重点介绍了目前193 nm光刻设备曝光系统的发展现状和趋势,以及为提高曝光质量所采用的相关分辨率增强技术;通过分析曝光系统的构成和其中的关键技术,探讨了国内研制相关曝光设备所面临的挑战。     

Ambiguous anti-fouling surfaces: Facile synthesis by light-mediated radical polymerization

In an attempt to create a polymer brush-based platform for the systematic study for anti-biofouling surfaces, the benefits of surface initiated, visible light-mediated radical polymerization are utilized to fabricate well-defined, chemically ambiguously patterned surfaces. A variety of analytical tools are used to illustrate the precise tuning of surface chemistry and thoroughly characterize spatially well-defined, hydrophilic/hydrophobic surfaces composed of poly(ethylene glycol methacrylate) and poly(trifluoroethyl methacrylate) with chemical definition on the micron scale. Advantages of both visible light-mediated photopolymerization and traditional copper-catalyzed atom transfer radical polymerization are combined to achieve both high spatial control and expanded monomer tolerance. © 2015 Wiley Periodicals, Inc. J. Polym. Sci., Part A: Polym. Chem. 2016, 54, 253–262     

Controlled assembly of bacteria on chemical patterns using soft lithography

Highly ordered arrays of single living bacteria were obtained by selective adsorption of bacteria onto chemical patterns with micrometric resolution. The chemically engineered template surfaces were prepared with the combination of microcontact printing process and a simple incubation technique. This methodology can be used for fundamental studies of bacterium's inner mechanisms and sub-cellular organization as well as for interfacing living bacteria with artificial microsystems.     

还原氧化石墨烯/Au复合微电极阵列的制备及光电特性

利用双光束干涉-无掩模光刻技术制备了周期性氧化石墨烯微结构阵列,利用肼蒸气对氧化石墨烯脱氧还原,然后蒸镀超薄Au薄膜制备了还原氧化石墨烯/Au复合微电极阵列(R-GO/Au).对复合电极在可见光波段的透过率和表面电阻进行了表征,结果表明,R-GO/Au复合微电极阵列具有良好的光电特性.将R-GO/Au复合微电极阵列引入到有机太阳电池中作为半透明阳极,器件的光电转化效率可达3.43%.     

Transfer of Two‐Dimensional Oligonucleotide Patterns onto Stereocontrolled Plasmonic Nanostructures through DNA‐Origami‐Based Nanoimprinting Lithography

The precise functionalization of self‐assembled nanostructures with spatial and stereocontrol is a major objective of nanotechnology and holds great promise for many applications. Herein, the nanoscale addressability of DNA origami was exploited to develop a precise copy‐machine‐like platform that can transfer two‐dimensional oligonucleotide patterns onto the surface of gold nanoparticles (AuNPs) through a deliberately designed toehold‐initiated DNA displacement reaction. This strategy of DNA‐origami‐based nanoimprinting lithography (DONIL) demonstrates high precision in controlling the valence and valence angles of AuNPs. These DNA‐decorated AuNPs act as precursors in the construction of discrete AuNP clusters with desired chirality.