193nm光刻曝光系统的现状及发展

投影曝光工艺是集成电路制造过程中的关键环节,曝光系统的工艺水平已成为衡量微电子制造技术的重要标志。重点介绍了目前193 nm光刻设备曝光系统的发展现状和趋势,以及为提高曝光质量所采用的相关分辨率增强技术;通过分析曝光系统的构成和其中的关键技术,探讨了国内研制相关曝光设备所面临的挑战。     

THE DEVELOPMENT OF NATIONAL ZHOU PEIYUAN COMPETITION ON MECHANICS

全国周培源大学生力学竞赛为《力学与实践》编委会发起并承办的一项大学生科技赛事,经过三十多年的发展,已经成功举办了12届,也成为展示高校力学教学水平的一个窗口。在《力学与实践》创刊40周之际,本文对全国周培源大学生力学竞赛的发展历程和组织模式进行了较为系统的回顾和梳理;对各届的组织规模和创新形式进行归纳与汇总;并通过案例说明力学竞赛对力学教学和人才培养所发挥的作用。     

Developments in electrochemical processes for recycling lead–acid batteries

The lead–acid battery recycling industry is very well established, but the conventional pyrometallurgical processes are far from environmentally benign. Hence, recent developments of lead–acid battery recycling technologies have focused on low-temperature (electro)hydrometallurgical processes, the subject of this review, covering modified electrolytes, improved reaction engineering, better reactor design and control of operating conditions.     

Freeze–Thaw-Promoted Fabrication of Clean and Hierarchically Structured Noble-Metal Aerogels for Electrocatalysis and Photoelectrocatalysis

Noble-metal aerogels (NMAs) have drawn increasing attention because of their self-supported conductive networks, high surface areas, and numerous optically/catalytically active sites, enabling their impressive performance in diverse fields. However, the fabrication methods suffer from tedious procedures, long preparation times, unavoidable impurities, and uncontrolled multiscale structures, discouraging their developments. By utilizing the self-healing properties of noble-metal aggregates, the freezing-promoted salting-out behavior, and the ice-templating effect, a freeze–thaw method is crafted that is capable of preparing various hierarchically structured noble-metal gels within one day without extra additives. In light of their cleanliness, the multi-scale structures, and combined catalytic/optical properties, the electrocatalytic and photoelectrocatalytic performance of NMAs are demonstrated, which surpasses that of commercial noble-metal catalysts.     

Experimental and numerical investigations of bi-injection moulding of PA66/LSR peel test specimens

Bi-injection moulding is a widely used process to manufacture engineering products and consumer goods. Typically, a thermoplastic is combined with rubber or another thermoplastic to create colour differences or hard and soft areas, respectively. The aim of this study was to optimise the injection parameters and processing conditions for the moulding of two-component standard peel test specimens with suitable functional properties. In this work, all parameters of thermo-rheo-kinetic behaviour were identified to predict the entire filling stage and the effect of a liquid silicone rubber cross-linking reaction during the injection moulding process. The models of Carreau-Yasuda and Isayev-Deng regarding the thermal dependence assumed by Arrhenius’ law were used. In our study, over-injection moulding is simulated and examined using finite element software (Cadmould 3D) to investigate the thermo-rheo-kinetic behaviour and the adhesion of liquid silicone rubber during the filling mould process in over-moulding. Numerical simulation results were then compared with the experimental results, and good agreement was obtained.     

Use and Abuse of Entropy in Biology: A Case for Caliber

Here, I discuss entropy and its use as a tool in fields of biology such as bioenergetics, ecology, and evolutionary biology. Statistical entropy concepts including Shannon’s diversity, configurational entropy, and informational entropy are discussed in connection to their use in describing the diversity, heterogeneity, and spatial patterning of biological systems. The use of entropy as a measure of biological complexity is also discussed, and I explore the extension of thermodynamic entropy principles to open, nonequilibrium systems operating in finite time. I conclude with suggestions for use of caliber, a metric similar to entropy but for time-dependent trajectories rather than static distributions, and propose the complementary notion of path information.     

Atmospheric gamma rays in the energy region 40–1000 GeV

A large stack of lead-emulsion sandwich detector assembly was flown over Hyderabad, India. High energy gamma rays at the float altitude were unambiguously identified from the cascades they induced, and their energies reliably determined by improved methods. From an analysis of 163 gamma rays of energy ≳ 30 GeV, it is found that the differential energy spectrum is represented by the power lawJ _r (E)= 129·4E ^{−2·62±0·12} photons m⁻² sr⁻¹sec⁻¹ GeV⁻¹ at an effective atmospheric depth of 14·3 g cm⁻²; this is the first reliable balloon measurement of atmospheric gamma rays in the energy range 40–1000 GeV. After correcting for the gamma rays radiated by the primary cosmic ray electrons, the production spectrum of gamma rays, resulting from the collisions of cosmic ray nuclei with air nuclei, at the top of the atmosphere isP _r (E, 0)=8·2 × 10⁻⁴ E^2.60±0.09 photons g⁻¹sr⁻¹sec⁻¹ GeV⁻¹. The atmospheric propagation of the electromagnetic component due to the cascade process is also derived from the gamma ray production spectrum.