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41.
42.
建立一个描述低能电子在多元多层介质中散射的物理模型,运用MonteCarlo方法模拟低能电子在靶体胶衬底中的复杂散射过程,在此基础上通过大量计算研究入射束能、胶层厚度、衬底材料等不同曝光条件对抗蚀剂沉积能密度分布的影响,获得沉积能分布规律:适量的低束能、薄胶层、低原子序数衬底可以使前散射电子对胶中沉积能密度分布的贡献增大、背散射电子的贡献减小,从而提高曝光分辨率.
关键词:
电子束曝光
MonteCarlo方法
低能电子散射
能量沉积 相似文献
43.
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45.
Sadaharu Jo 《Applied Surface Science》2006,252(10):3514-3519
The morphologies and lattice structures of anthracene single crystals grown from the vapor phase were investigated using optical microscopy, phase contrast microscopy, atomic force microscopy (AFM), and X-ray diffraction analysis. Common morphologies with hexagonal large planes were observed irrespective of crystal size. The observation of certain surface morphologies with a phase contrast microscopy revealed that the spiral steps originated from screw dislocations present on the (0 0 1) planes. Moreover, the center and edge of the (0 0 1) planes had large curvatures, similar to hills. Resultantly, quarter-monolayer (ML) steps were observed on the large and flat planes between both hills. 相似文献
46.
P. Kavouras Th. Kehagias K. Chrissafis Ph. Komninou Th. Karakostas 《Journal of Thermal Analysis and Calorimetry》2006,86(3):715-719
Three batch compositions of pure oxides (SiO2,
Fe2O3, PbO, Na2O)
with equivalent SiO2, Fe2O3
and PbO contents and a gradually increased Na2O content
were vitrified through heating in a high temperature electric furnace and
subsequent quenching. The resulting vitreous products were thermally treated
in order to study the devitrification behaviour, under conditions designated
from differential thermal analysis experiments. Depending on the Na2O
content, crystal phase separation gave rise to the growth of acmite and hematite
or maghemite. A uniformly phase separated glass-ceramic material, with crystallites
of similar size and population density, was produced from devitrification
of the vitreous product with the higher Na2O content. 相似文献
47.
48.
江汉平原上空QTEC变化特征的统计分析 总被引:1,自引:0,他引:1
提出了一种观测台网用多接收机性能一致性的标定方法,并利用江汉平原GPS接收台网的观测数据,分析了该地区上空QTEC的日变化、季节变化、年变化和逐年变化的统计特征.标定结果表明,不同接收机之间的仪器偏差是从双频GPS卫星信标推算QTEC的主要误差来源之一,必须校正.统计分析证实,江汉平原上空QTEC的日变化特征同时受电离层和等离子层控制,其年变化以半年周期为主,峰值和谷值分别出现在两分点和两至点附近,QTEC值的逐年变化从太阳活动峰年到低年逐年下降,与以太阳黑子数为代表的太阳活动密切相关. 相似文献
49.
CuPc molecules adsorbed on Au(1 1 0)-(1 × 2): growth morphology and evolution of valence band states
Fabrizio Evangelista A. RuoccoValdis Corradini M.P. DonzelloCarlo Mariani Maria Grazia Betti 《Surface science》2003,531(2):123-130
We present the growth morphology, the long-range ordering, and the evolution of the valence band electronic states of ultrathin films of copper phthalocyanine (CuPc) deposited on the Au(1 1 0)-(1 × 2) reconstructed surface, as a function of the organic molecule coverage. The low energy electron diffraction patterns present a (5 × 3) reconstruction from the early adsorption stages. High-resolution UV photoelectron spectroscopy data show the disappearance of the Au surface states related to the (1 × 2) reconstruction, and the presence of new electronic features related to the molecule-substrate interaction and to the CuPc molecular states. The CuPc highest occupied molecular orbital gradually emerges in the valence band, while the interface electronic states are quenched, upon increasing the coverage. 相似文献
50.
M. Ismail A. Farraga H. A. Abdusalam Th. El-Sherbini 《International Journal of Theoretical Physics》2004,43(1):111-125
The scattering of electrons by atomic copper has been studied using Born approximation and the concept of the generalized oscillator strength (GOS). Differential and total cross-sections for the excitation of the 3d10 4p2 P state are calculated at incident energies of 100 eV and are compared with other available experimental and theoretical data. The agreement between our calculation for the differential cross-section and the available experimental results is fairly good at the forward angles, while the agreement at large angles is poor. The calculated total cross-sections are compared with the experimental data and those predicted by several theories. It is found that our calculation for the total cross-sections are in a good agreement with the close coupling calculation of Msezane and Henry (1986a, Physical Review A
33, 1631) for incident energies greater than 20 eV. The integrated cross-section measurements of Ismail and Teubner (1995, Journal of Physics B: Atomic, Molecular and Optical Physics
28, 4164) are in good agreement with the present calculation. 相似文献