Role of ion energy flux on the structural and morphological properties of silicon oxy-nitride composite films deposited by plasma focus device

ABSTRACT

Crystalline silicon oxy-nitride (SiON) composite films are deposited on Si substrate for multiple (5, 15, 25 and 50) focus shots (FS) by plasma focus device. The X-rays diffraction patterns reveal the development of various diffraction peaks related to Si, Si₃N₄, and SiO₂ phases which confirms the formation of SiON composite film. The intensity of Si₃N₄ (1 0 2) plane is linearly increased with the increase of FS. The Si₃N₄ (1 0 2) phase does not nucleate for 5 FS. Raman analysis confirms the formation of β–Si–N phase. Raman and Fourier transform infrared spectroscopy analysis reveals that the strength of chemical bonds like Si–N, Si–O formed during the deposition process of SiON composite films is associated with the bonds intensity which in turn depends on the number of FS. The field emission scanning electron microscopic analysis reveals that the surface morphology like size, shape and distribution of micro/nano-dimensional particles, film compactness and the formation of micro-rods, micro-teethes and micro-tubes of SiON composite films is entirely associated with the rise in substrate surface transient temperature which in turn depends on the increasing number of FS. The EDX spectrum confirms the presence of Si (22.5?±?4.7 at. %), N (13.4?±?4.5 at. %) and O (54.7?±?11.3 at. %) in the SiON composite film. The thickness of SiON composite film deposited for 50 FS is found to ～15.47?µm.     

1:1分步亚微米光刻镜头

本文介绍一个数值孔径0.4、视场10×10mm~2可用于1:1分步投影光刻机的镜头的光学设计及其模型实验结果.光学设计在Wynne-Dyson的1:1折反式系统的基础上,对该系统作了某些改变.实验结果表明,该镜头具有亚微米的光刻分辨率.     

Practical alternating least squares for tensor ring decomposition

Tensor ring (TR) decomposition has been widely applied as an effective approach in a variety of applications to discover the hidden low-rank patterns in multidimensional and higher-order data. A well-known method for TR decomposition is the alternating least squares (ALS). However, solving the ALS subproblems often suffers from high cost issue, especially for large-scale tensors. In this paper, we provide two strategies to tackle this issue and design three ALS-based algorithms. Specifically, the first strategy is used to simplify the calculation of the coefficient matrices of the normal equations for the ALS subproblems, which takes full advantage of the structure of the coefficient matrices of the subproblems and hence makes the corresponding algorithm perform much better than the regular ALS method in terms of computing time. The second strategy is to stabilize the ALS subproblems by QR factorizations on TR-cores, and hence the corresponding algorithms are more numerically stable compared with our first algorithm. Extensive numerical experiments on synthetic and real data are given to illustrate and confirm the above results. In addition, we also present the complexity analyses of the proposed algorithms.     

全息模拟再现像的三维重构

提出一种全息模拟再现像的三维重构方法,可以模拟再现得到三维再现像.计算机模拟再现许多幅在不同深度位置的二维光强分布;利用灰度级变化的聚焦度评价方法,通过寻找最大聚焦度值,确定再现三维像各像点的深度信息.实验证明,该方法能实现模拟再现像的三维重构,使数字全息术有希望成为一种全新的三维面形检测技术.再现像三维重构的实现可以更客观地对全息图进行像质评价,并验证计算机制全息术算法的正确性.     

遥感相机自动检焦技术研究

将基于图像处理的自动检焦技术应用于线阵CCD推扫成像的空间遥感相机中。图像法检焦的关键在于对焦评价函数的选取。通常对焦评价函数是在摄影目标不变的情况下得出的,而推扫成像的线阵CCD相机在任意时刻所拍摄的景物都是不同的,这就给对焦评价函数的选取增加了难度。用功率谱的方法对任意景物在空间频域进行分析表明,功率谱对于自然景物具有一定的不变性。由此建立了基于功率谱的对焦评价函数,采用小波去噪与亮度归一化相结合的图像预处理技术有效地去除了图像噪声和亮度变化对对焦精度的影响。通过对功率谱评价函数进行加权处理,提高了对焦评价函数曲线的灵敏度。仿真实验表明了所构造的对焦评价函数是可行的。     

气体体积粘性对二维环形激波聚焦的影响

基于体积粘性系数ζ的分子运动论和连续介质理论,对二维环形激波聚焦（马赫数Ma=2.0）的体积粘性效应进行数值研究,结果表明：对于热完全气体,体积粘性使得激波汇聚中心点处的压力减小、温度增加、密度减小,聚焦点物理参数的改变量分别可达20%、10%、30%,体积粘性效应对环形激波聚焦的影响是不可忽略的;与转动模态相比,在振动模态下环形激波聚焦的体积粘性效应更为明显,因为激波聚焦点附近的体积粘性应力ζ▽·V与热力学压力p达到同一数量级,从而显著改变了流动参数.     

高次柱面反射型太阳能聚光镜的光学设计

提出了一种新型高效太阳能聚光镜, 这种聚光镜用一组特定系数, a₂, a₄, a₆, a₈, a₁₀, a₁₂, a₁₄, a₁₆ 与 C的高次柱面内壁的一部分作为反射镜. 利用高次柱面方程和光反射定律, 推导出了在高次柱面内壁上太阳反射光束的方向矢量与高次柱面系数C, a₂,a₄, a₆, a₈, a₁₀, a₁₂, a₁₄, a₁₆的关系, 通过优化设计这些系数, 可以使入射到高次柱面内壁上的太阳光束反射后全部聚焦在一条与柱面母线平行的宽度很窄的线段上, 形成线聚光. 这组特定系数用粒子群优化算法求得, 并经计算机模拟证明其聚焦效果. 用这组特定系数的高次柱面作为聚光镜, 其对光的压缩比可达148倍, 其线性光斑可作为一种强光源或高温光源. 高次柱面反射镜可由金属或玻璃直接磨制而成, 也可由高次柱面骨架和铺设在骨架上的镀铝聚酯薄膜构成. 关键词： 太阳能聚光镜 高次柱面 多项式系数优化 线性聚焦     

基于像散法的线阵CCD相机检焦技术

航天立体测绘相机受卫星发射过程的振动、冲击以及复杂的空间环境的影响,相机的靶面将不同程度地偏离相机的焦平面,导致图像分辨率下降.对于测绘相机,其主点位置和主距变化量直接影响地面目标定位准确度.为了弥补利用编码器进行检焦的不足,提出了一种基于像散量的检调焦方法.该方法采用四象限光电探测器测量相机靶面变化引起的像散量,参照已标定的靶面位置与像散量之间的关系,计算出靶面偏离相机焦平面的实际大小和方向.这种检焦方法包含引起相机靶面离焦的所有因素,试验结果表明,基于像散法的测绘相机调焦机构的分辨率可达0.025 mm.     

一种新颖的简易凸透镜自动测焦设计方法

提出一种凸透镜自动测焦的设计方法。该方法直接从凸透镜焦距定义出发,应用凸透镜汇聚平行光于焦点测量其焦距,平行光采用激光器→扩束-准直镜获得。巧妙运用光敏电阻阵列设计解决调"共轴"问题,恰当设计测量过程轻松给出焦距测试结果。设计集光机电技术于一体,各部分技能又都很基础,具有广泛的实用性,整体设计方案可拓性也很强,具有较高的教学价值。     

Dimension-Splitting for Simplifying Diffusion in Lattice-Gas Models

We introduce a simplified technique for incorporating diffusive phenomena into lattice-gas molecular dynamics models. In this method, spatial interactions take place one dimension at a time, with a separate fractional timestep devoted to each dimension, and with all dimensions treated identically. We show that the model resulting from this technique is equivalent to the macroscopic diffusion equation in the appropriate limit. This technique saves computational resources and reduces the complexity of model design, programming, debugging, simulation and analysis. For example, a reaction-diffusion simulation can be designed and tested as a one-dimensional system, and then directly extended to two or more dimensions. We illustrate the use of this approach in constructing a microscopically reversible model of diffusion-limited aggregation as well as in a model of growth of biological films.