镜面偏心测量光学系统设计及其杂光分析

为了解决现有镜面偏心测量设备存在的问题,本文研究了一种采用切换镜头和调焦相结合的方法来设计的镜面偏心测量光学系统,使用这个光学系统,既能使被测镜面的曲率半径扩展到-∞~+∞范围,又能保证测量精度。通过Lighttools软件对这个光学系统进行光线追迹,分析其杂光分布,结果表明:准直镜头内部多次反射产生的杂光强度很低,可以忽略。而当被测镜头中存在相邻球心像距的镜面时,产生的杂光强度比较大,在后续的图像处理过程中,必须增强目标图像的对比度。利用研制的镜面偏心测量设备进行测量实验,结果进一步验证了杂光分析的正确性。     

Adaptive nematic liquid crystal lens array with resistive layer

ABSTRACT

We propose an adaptive nematic liquid crystal (LC) lens array using a dielectric layer with low dielectric constant as resistive layer. With the resistive layer and periodic-arranged iridium tin oxide (ITO) electrodes, the vertical electric field across the LC layer varies linearly over the lens aperture is obtained in the voltage-on state. As a result, a centrosymmetric gradient refractive index profile within the LC layer is generated, which causes the focusing behaviour. As a result of the optimisation, a thin cell gap which greatly reduces the switching time of the LC lens array can be achieved in our design. The main advantages of the proposed LC lens array are in the comparatively low operating voltage, the flat substrate surface, the simple electrodes, and the uniform LC cell gap. The simulation results show that the focal length of the LC lens array can be tuned continuously from infinity to 3.99 mm by changing the applied voltage.     

Software lens compensation applied to athermalization of infrared imaging systems

A different approach, aiming to achieve the constant blur status of point-spread function (PSF) at a certain defocused plane, is described. The correlation between the two PSF is used to control the PSF blur similarity, and simultaneously the Strehl ratio is also used to control the PSF blur minimization. By designing the PSF so that it is significantly insensitive to defocus or related defocus quantity, for example, due to temperature change, all the constantly blurred images can be accurately de-blurred by a simple inverse restoration filter for an adequate range of defocus. We refer to that as “software lens compensation” and apply a design method to solve the athermalization of middle wavelength infrared (MWIR) imaging systems. The resultant PSF is almost invariant in the temperature range from −10 to 50°C at the same focal plane. Consequently, the constant blur spot can be removed by a simple digital signal processing. Thus, clear and sharp de-blurred images at different temperatures are obtained.     

Effect of the defect on the focusing in a two-dimensional photonic-crystal-based flat lens

We have investigated in detail the influence of defect on the focusing of electromagnetic waves in a two-dimensional photonic-crystal flat lens by using the finite-difference time-domain method. The result shows that many focusings can be observed at the symmetrical positions when a defect is introduced into the lens. Furthermore, the wave-guides in the lens can confine the transmission wave effectively and improve the quality of the focusing.     

193nm光刻曝光系统的现状及发展

投影曝光工艺是集成电路制造过程中的关键环节，曝光系统的工艺水平已成为衡量微电子制造技术的重要标志。重点介绍了目前193nm光刻设备曝光系统的发展现状和趋势，以及为提高曝光质量所采用的相关分辨率增强技术；通过分析曝光系统的构成和其中的关键技术，探讨了国内研制相关曝光设备所面临的挑战。     

梯度折射率棒透镜的色差模型

本文提出一个梯度折射率棒透镜(GRIN－RodLens)的色差模型,并运用本模型合理地解释了在色差测量过程发现的各类色差现象.     

透镜不胶盘单件抛光技术

本文介绍了在ＹＧ３６６高速抛光机上进行的透镜不胶盘单件抛光技术。这一新的抛光方法比弹性成盘法和刚性成盘法有许多优点：它省掉了许多辅助工序，缩短了抛光时间，所以生产周期短，效率高，成本低。同时给出了根据透镜的结构参数进行生产技术准备和评估抛光过程稳定性的公式。最后提出了进一步改进的设想。     

Aberration-corrected catadioptric magnifiers useful for simple microfiche readers

The present paper considers the magnifying power and aberration properties of three different catadioptric magnifying systems useful for application as simple hand-held microfiche readers. These are in the form of a plano-convex lens, a meniscus lens and an achromatic doublet lens and all their outer surfaces have been coated with a semi-reflecting film so that they behave like catadioptric elements. These can be designed to give magnification in the range of 15 × to 25 × with sufficient eye relief. Using such magnifiers, it is possible to read microfiche having frame sizes of 16 × 12 mm and 12 × 9 mm. The cemented achromatic doublet coated on the outer surfaces seems to give a very good image for use in microfiche reader.     

Changes Brought about by a Lens in an Obliquely Incident Laser Beam

In the paraxial optics approximation, we have studied the transformation of a simple Gaussian beam of light obliquely incident on an isotropic lens for the case where the axis of the beam and the principal optical axis of the lens are crossed straight lines. The data obtained are compared with the corresponding results for the case where the axes of the beam and lens are coplanar.     

Submicron External Electro-optic Measuring System Based on an Electro-optic Solid Immersion Lens

In this paper, all electro-optic solid immersion lens (EOSIL) is introduced, which is made of GaAs. A reflecting external electro-optic measuring system based on the EOSIL is built. With a hemispherical GaAs EOSIL used as the external probe, 0.7 µm spot size is obtained when the wavelength of the probing beam from a laser diode is 1.3 µm and a microscope objective with 0.3 numerical aperture is used. The principle of the measuring system is analyzed by Jones matrix. By using the system, the electrical signals propagating on a microstrip transmission line are successfully measured. The voltage sensitivity about 5 mV/ is measured when 10 kHz sinusoidal electric signal is applied on the microstrip line.