圆形复合式磁控溅射阴极设计及其放电特性模拟研究

基于二维有限元算法使用COMSOL软件对圆形复合式磁控溅射阴极的磁场进行了计算,结合Matlab优化工具箱分别采用遗传算法和模拟退火算法对圆形复合式磁控溅射阴极的结构进行优化,得到靶材利用率达到最大的最优结构.对得到的最优化磁控阴极,基于自洽粒子模拟方法,使用VSim软件对不同工况下的放电特性进行了模拟.研究发现随着磁场非平衡度的增加,阴极表面电势降落最大的位置和等离子体聚集的位置,沿着阴极表面外沿不断向阴极中心移动,阴极表面磁场的强度不断减小.随着磁场非平衡度的增加,等离子体密度先增加后减小,鞘层厚度先减小后增加,等离子体的密度和鞘层厚度不仅与磁场非平衡度有关,而且与磁场强度有关.最后根据粒子模拟的结果,对复合式磁控阴极的靶材刻蚀深度进行了研究.研究发现,在优化前后靶材的刻蚀范围从60 mm扩展至整个靶面,极大地提高了靶材利用率.     

电子碰撞诱导原子从低激态向高激态弛豫

本文根据空心阴极放电中电子能量分布的物理图象,分析了原子从低激态向高激态弛豫的可能途径。建立高低激态集居数密度增量的关系。讨论高激态集居数密度增量获得可观量的条件。根据此条件分别选取钠原子的基态3s~2S_(1/2)和铜原子的亚稳态4s~2D_(3/2)为与激光共振的下能级,并激发具有较大自发发射几率的3s~2S_(1/2)→3p~2P°_(1/2)(和3p~2P°_(3/2))和4s~2D_(3/2)→4p~2P°_(1/2)跃迁,在远离上能级的高激态上观测到敏化荧光,并精确测得这些态的自发发射系数比值,而在更高激态上没有观测到敏化荧光,表明讨论中提出的条件是合理的。     

铥原子激发能级超精细结构常数的测定

用铥空心阴极灯,采用光电流光谱技术测得铥原子21条一级跃迁谱线,确定了相应跃迁上能级的超精细结构常数,其中7个能级的参数为首次发表,运用同一空心阴极灯,采用双色双光子级联共振技术,由荧光法首次测得4个第二激发能级的超精细结构常数.     

气体放电等离子体特性测量I-V曲线不对称性的研究

利用气体放电双探针法研究了等离子体的I-V曲线中的电流I相对于电压V轴交点的不对称性,并提出2种可能的解释:一认为是由于两探针表面积不同引起的;二认为是由于探针所在处等离子体电位不等引起的.本文利用仪器的工艺误差和调换放电管电压的方法,对提出的2种可能原因分别进行验证,并指出第二种解释的合理性,并对其进行了理论分析.     

利用发射光谱进行常压介质阻挡放电等离子体诊断及其在材料表面改性上的应用(英文)

使用介质阻挡放电光谱诊断装置,对常压介质阻挡放电在材料改性过程中的等离子体发射光谱进行测量,记录和比较了空气、氦气和氩气常压介质阻挡放电等离子体发射光谱,并运用氩元素谱线的相对强度来诊断电子温度等物理参量,以达到对材料表面改性过程的实时监控。工作的结果对常压介质阻挡放电及其在材料改性上的应用具有重要的意义     

Synthesis of nanoparticles in an atmospheric pressure glow discharge

Nanopowders are produced in a low temperature, non-equilibrium plasma jet (APPJ), which produces a glow discharge at atmospheric pressure, for the first time. Amorphous carbon and iron nanoparticles have been synthesized from Acetylene and Ferrocene/H₂, respectively. High generation rates are achieved from the glow discharge at near-ambient temperature (40–80°C), and rise with increasing plasma power and precursor concentration. Fairly narrow particle size distributions are measured with a differential mobility analyzer (DMA) and an aerosol electrometer (AEM), and are centered around 30–35 nm for carbon and 20–25 nm for iron. Particle characteristics analyzed by TEM and EDX reveal amorphous carbon and iron nanoparticles. The Fe particles are highly oxidized on exposure to air. Comparison of the mobility and micrograph diameters reveal that the particles are hardly agglomerated or unagglomerated. This is ascribed to the unipolar charge on particles in the plasma. The generated particle distributions are examined as a function of process parameters.     

倾斜直流场下的介质板击穿统计分析

传统分析介质板次级电子倍增问题的粒子追踪算法方法存在运算耗时长、运算量大等缺点,为此采用统计方法实现了倾斜强直流场下介质击穿过程中次级电子倍增效应的数值模拟,给出了击穿过程中电子数量,电子渡越时间等关键参数的时间图像,同时研究了倾斜角、介质表面光滑度和次级电子产生率对次级电子倍增效应的影响。研究结果表明：强直流场下的次级电子倍增效应存在倾斜角的区域,倾斜角太大或者太小,都可能不会发生次级电子倍增效应,如果倾斜角位于区域内,则饱和状态时电子数目随着倾斜角度的变大而变小;选取光滑系数和次级电子产生系数越小的介质材料,抑制次级电子倍增效应的效果越好。     

Design of a multi-cusp ion source for proton therapy

The permanent magnets of the discharge chamber in a multi-cusp proton source are studied and designed. The three electrode extraction system is adopted and simulated. A method to extract different amounts of current while keeping the beam emittance unchanged is proposed.     

丝电爆过程的电流导入机理

丝电爆制备纳米粉时, 电流从电极导入金属丝的过程直接影响电极烧损和粉末中微米级大颗粒产生. 分别通过接触和气体放电两种方式导入电流进行电爆试验. 结果表明, 光测量装置检测到的丝端部光电流几乎与回路放电电流同时产生, 而中间位置的光电流则要滞后一段时间; 由探针收集的产物确定, 金属丝端部主要形成熔融粒子, 中间部分主要形成气相粒子. 分析可知, 接触方式导入电流时, 丝端部也存在气体放电现象, 大电流主要通过气体放电形成的等离子体导入. 等离子体对电流的旁路作用会阻碍能量向金属丝沉积, 这是产生微米级大颗粒和"积瘤"主要原因. 通过气体放电方式导入电流时, 电极烧损明显减轻, 并可以避免"积瘤"产生.     

Study on the Relation Between Discharge Voltage and Magnetic Field Topography in a Hall Thruster Discharge Channel

The relation between magnetic field topography and operating voltage is investigated in a 1kW Hall thruster discharge channel in order to focus the ion beam effectively and optimize the performance. The curvature of magnetic field line (α) is introduced to characterize the differences of topologies. The optimized magnetic field distribution under each operating voltage is obtained by experiment. Through the curvature transformation, we find that the area of (α > 1) in the channel gradually decreases with the increase of the operating voltage. In response to the results above, two dimensional plasma flows are simulated employing Particle‐in‐Cell method. The distributions of the electric potential, ion density and ion radial velocity are calculated to understand the important influence of the relation above on ion beam focusing. The numerical results indicate that magnetic field curvature and thermal electric field control the ion beam in the ionization and acceleration zone, respectively. The magnetic field topography and discharge voltage interact with each other and together form the focusing electric field. The ion radial mobility is suppressed effectively and the ion beam is focused to the channel centerline. In addition, for a given voltages, when the area of (α > 1) is larger than the optimal scope, the electric potential lines excessively bend to the anode causing ion over focus; contrarily, the electric potential lines will bend to the exit and defocus ions. All these results suggest the relation between magnetic field topography and discharge voltage is important to the ion radial flow control and performance optimization of the Hall thruster (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)