Nitroxide mediated synthesis of low dispersity random copolymers for low‐loss optical waveguides

Candidate materials for low‐loss optical waveguides based on poly(glycidyl methacrylate‐ran‐pentafluostyrene) [P(GMA‐ran‐PFS)] copolymers were synthesized by nitroxide mediated polymerization (NMP) initiated with BlocBuilder^® [N‐(2‐methylpropyl)‐N‐(1‐diethlphosphono‐2,2‐dimethylpropyl)‐O‐(2‐carboxylprop‐2‐yl) hydroxylamine] bearing a succinimidyl ester group (NHS‐BlocBuilder) at 90 °C in 1,4 dioxane. The copolymerizations yielded copolymers with low dispersity M_w/M_n between 1.2 and 1.4. The core structure of single‐mode channel waveguides was fabricated by direct UV lithographic patterning. The copolymers with low M_w/M_n resulted in line width roughness (LWR) of about 0.16 μm, whereas LWR of copolymers with M_w/M_n=3.5 but similar compositions was about 0.5 μm. The improvement in microstructural control allotted by NMP permitted finer pattern replication for copolymers desired for optical waveguides, as suggested for photoresist polymers. © 2013 Wiley Periodicals, Inc. J. Polym. Sci., Part A: Polym. Chem. 2013, 51, 2970–2978     

Direct patterning of polysilanes and polygermanes using interference lithography

The direct patterning of poly(p‐methoxyphenylmethylsilane) (PMPMS) and poly(p‐methoxyphenylmethylgermane) (PMPMG) by interference lithography is reported. Copyright © 2011 John Wiley & Sons, Ltd.     

超分辨近场结构技术及其应用

超分辨近场结构(Super RENS)技术是在传统的超分辨光盘技术和近场光学的基础上发展起来的新技术。介绍了Super RENS技术的基本原理:利用掩膜层的非线性效应或表面等离子体增强效应,在近场区域可以记录、读出超过衍射极限的信号。综述了该技术在纳米光信息存储和光刻方面应用研究的最新进展,提出了存在的问题,展望了它的发展前景。     

气体靶激光等离子体软X-射线源实验研究

介绍了一种无碎屑、高亮度、高工作频率的气体靶激光等离子体软X 射线源。其喷气阀门由压电陶瓷驱动 ,工作频率可达到 40 0Hz。与金属靶激光等离子体软X 射线源相比 ,此光源无碎屑。与喷嘴由电磁阀控制的气体靶激光等离子体软X 射线源相比 ,它有较高的工作频率。一工作在模拟模式的通道电子倍增器被用于探测来自光源的软X 射线辐射 ,其输出信号经过一电荷灵敏前置放大器进一步放大变成电压脉冲信号 ,脉冲幅度与输入电荷灵敏前置放大器的电量成正比。实验测得CO2 ,Xe和Kr在 8～ 2 2nm软X 射线投影光刻常用波段的光谱辐射特性。CO2 光谱包括类锂和类铍离子跃迁形成的线谱 ,Xe光谱是多电荷氙离子 4d 5f,4d 4f,4d 6p和 4d 5p跃迁所形成的光谱。Kr气体靶光谱包括类铜离子、类镍离子、类钴离子和类铁离子跃迁形成的线谱和连续谱。     

Evidence for diffusion-limited kinetics during electromigration-induced step bunching on Si(1 1 1)

We have measured how the initial terrace width l₀ on vicinal Si(1 1 1) surfaces influences the rate of step bunching and the minimum terrace width within a bunch when direct-current heated at 940-1290 °C. A comparison of this data with analytic solutions and numerical simulations of the conventional “sharp-step” model give strong evidence that the kinetic length d is relatively small (d < ∼20 nm) in both temperature regime I (∼850-950 °C) and regime III (∼1200-1300 °C), in which step-down current is required for step bunching. This indicates that surface mass transport is diffusion-limited in both regimes I and III when l₀ > 20 nm, and hence that the adatom attachment- and terrace diffusion-hopping rates are of comparable magnitude. We also observe similar scaling with initial terrace width in temperature regime II (∼1040-1190 °C), in which step-up current is required for bunching, suggesting a similar step bunching mechanism in all three temperature regimes.     

Electronic states in a step quantum well in a magnetic field

The quantum states and energy spectrum of an electron in a rectangular step quantum well in a magnetic field parallel to the plane of two-dimensional electronic gas are investigated. It is shown that the joint effect of a magnetic field and confining potential of quantum well results in radical change of the electron energy spectrum. The energy dependencies on the parameters of the quantum well and magnetic field induction are investigated. Numerical calculations are carried out for an AlAs/ GaAlAs/ GaAs/ AlAs step quantum well.     

用于先进半导体制程的光刻反向计算技术(ILT)

此篇论文将介绍一个用于半导体光罩上图样设计以及可用于实际生产的光刻反向计算技术（ILT）。在论文中将讨论有关ILT的最新发展，包括在超成像极限协助图样（SRAF）的生成，可增加制程宽容度的ILT，以及如何生成满足光罩生产标准的图样等方面。从内部的研究结果和客户的使用结果可以看出，ILT已经不再只是一种用于研究的工具，而是已经可以用于先进半导体制程的大规模生产。在对各个环节优化之后，ILT可以增加制程的宽容度，同时将光罩的成本控制在可以接受的水平。     

Programmable Engineering of a Biosensing Interface with Tetrahedral DNA Nanostructures for Ultrasensitive DNA Detection

Self‐assembled DNA nanostructures with precise sizes allow a programmable “soft lithography” approach to engineer the interface of electrochemical DNA sensors. By using millimeter‐sized gold electrodes modified with several types of tetrahedral DNA nanostructures (TDNs) of different sizes, both the kinetics and thermodynamics of DNA hybridization were profoundly affected. Because each DNA probe is anchored on an individual TDN, its lateral spacing and interactions are finely tuned by the TDN size. By simply varying the size of the TDNs, the hybridization time was decreased and the hybridization efficiency was increased. More significantly, the detection limit for DNA detection was tuned over four orders of magnitude with differentially nanostructured electrodes, and achieved attomolar sensitivity with polymeric enzyme amplification.