微流控芯片计算机辅助设计、辅助制造方法研究

介绍了一种采用计算机辅助制造中快速成型技术实现微流控芯片快速制作的方法。采用VB二次开发工具(VBA),在计算机辅助设计(CAD)二次开发平台上建立微流控芯片三维CAD立体模型,并通过计算机软件算法对CAD模型进行分层切片,为实现微流控芯片计算机辅助制造提供加工数据。文中针对微流控芯片加工精度要求高的特点,提出了采用位图数据图像格式(BMP)数据格式取代快速成型分层切片中常用的三角面片数据格式(STL),并对具体实现方法进行了详细介绍。     

基于中心-射线模型的印鉴识别方法及其应用

支票中的有效印鉴是支票流通有效性的重要体现。通过对支票印鉴有效性的识别来达到对支票流通有效性识别的目的。根据我国支票图像的特点提出了基于中心_射线模型的有效印鉴识别方法。该方法是通过对印鉴各成份区域之间拓扑关系的识别来达到对有效印鉴识别的目的。在将该方法用于我国支票印鉴识别的同时,还利用了印鉴的色彩特征。实验结果表明,该方法可有效地识别我国支票中的有效印鉴,有效印鉴识别的错误排除率为0%,错误接收率为23.8%。     

压印光刻中的两步对正技术

压印光刻中套刻需要粗、精两级对正.实验采用一对斜纹结构光栅作为对正标记.利用物镜组观察光栅标记图像的边界特征进行粗对正,其准确度在精对正信号的捕捉范围内;利用光电接收器件阵列组合接收光栅莫尔信号,在莫尔信号的线区进行精对正.由于线性区的斜率大, 精对正过程中得到相应x,y方向的对正误差信号灵敏度高,利用高灵敏度对正误差信号作为控制系统的驱动信号,对承片台进行驱动定位,实现精对正.最终使X,Y方向上的重复对正准确度分别达到了± 21 nm(± 3σ)和±24 nm(± 3σ).     

氩离子激光固化环氧树脂制作三维微结构

利用激光束进行三维成像是通过逐层光引发聚合形成宏观尺度的三维实体 .最近出现的激光全息光刻技术是利用激光束的干涉产生三维全息图案 ,让感光树脂在全息图案中曝光 ,从而一次形成三维周期有序微结构 .通过调节激光干涉及波长可控制三维结构的形状及尺寸 .利用该技术获得亚微米尺度上周期性重复的三维微结构 ,可用于制作三维光子晶体 [1,2 ]等具有独特性能的聚合物材料 .本文用铁芳烃化合物与特种环氧树脂配制成阳离子型可见光固化树脂 ,在氩离子激光器产生的多束可见连续激光相干形成的空间干涉光场中曝光 ,成功地制备出亚微米量级的三…     

步进扫描差示扫描量热法研究不同链结构的聚乙烯类聚烯烃热力学特性

采用步进扫描差示扫描量热法研究了几种具有不同链结构的聚乙烯类聚烯烃的热力学性质.结果表明,不同链结构的聚烯烃在热力学平衡熔融态下,其绝对比热容的温度依赖性在实验误差范围内几乎相同;而无论链结构的变化如何,在极低温度下稳定结晶态的热容也非常接近.但在熔融温度范围内,比热容对不同聚烯烃的链结构非常敏感,这是由于在远低于聚烯烃主熔化峰温度范围内,聚乙烯晶体结构中的不同支链的影响.在时间-热流的步进扫描曲线中,具有长支链结构的聚烯烃表现出独特的熔融-再结晶行为,这可能是由于交联点之间较长的受约束链段的运动在熔融过程中得到释放并重排所致.     

Heat‐Free Biomimetic Metal Molding on Soft Substrates

Fabrication of bio‐templated metallic structures is limited by differences in properties, processing conditions, packing, and material state(s). Herein, by using undercooled metal particles, differences in modulus and processing temperatures can be overcome. Adoption of autonomous processes such as self‐filtration, capillary pressure, and evaporative concentration leads to enhanced packing, stabilization (jamming) and point sintering with phase change to create solid metal replicas of complex bio‐based features. Differentiation of subtle differences between cultivars of the rose flower with reproduction over large areas shows that this biomimetic metal patterning (BIOMAP) is a versatile method to replicate biological features either as positive or negative reliefs irrespective of the substrate. Using rose petal patterns, we illustrate the versatility of bio‐templated mapping with undercooled metal particles at ambient conditions, and with unprecedented efficiency for metal structures.     

分辨力增强技术的频谱分析

离轴照明和衰减型相移掩模作为重要的分辨力增强技术,不仅可以提高光刻的分辨力,同时还可以改善成像焦深,扩大光刻工艺窗口,实现65~32 nm分辨成像。从频谱的角度分析了离轴照明和衰减型相移掩模对成像系统交叉传递函数和像场空间频率分布的影响,研究这两种技术的物理光学本质,由此进一步优化光学成像系统设计、分辨力增强技术和确定设备使用的参量。对分辨力增强技术的频谱分析研究表明,分辨力增强技术通过调整像场频谱分布,改善了光学光刻的图形质量。对于65 nm密集图形,离轴照明和相移掩模结合后可以使成像衬比度最高达到0.948,工艺窗口在5%曝光范围内焦深达到0.51μm。     

迈克尔逊风场干涉仪基准光程差及步长误差容限分析

迈克尔逊干涉仪风场探测是在一定的基准光程差的基础上,通过动镜步进或四分区镀膜的方法,获得一个波长范围内步进间隔为λ/4的四步干涉强度.在此过程中存在的基准光程差误差及步长误差将对结果产生影响.对在一定的结果不确定度允许范围内的误差变量的容限值进行了讨论.在可以预知的误差存在情况下的精确结果的得出给出了计算方法.     

Effective wave propagation along a rough thin-elastic beam

Two methods for computing the complex-valued effective wavenumber of a rough beam in the context of linear time-harmonic theory are presented. The roughness of the beam is modelled as a continuous random process of known characteristic length and root-mean-square amplitude for either the beam mass or the beam rigidity. The first method is based on a random sampling method, with the effective wave field calculated as the mean of a large ensemble of wave fields for individual realisations of the roughness. The individual wave fields are calculated using a step approximation, which is validated for a deterministic problem via comparison to results produced by an integral equation approach. The second method assumes a splitting of the length scale of the fluctuations and an observation scale, employing a multiple-scale approximation to derive analytical expressions for the effective attenuation rate and phase change. Numerical comparisons show agreement of the results of the random sampling method and the multiple-scale approximation for a wide range of parameters. It is shown that the effective wavenumbers only differ by a real constant between the cases of varying beam mass and rigidity.     

A computer program for automated step edge motion analysis from scanning probe microscopy images

A computer algorithm was developed to automatically track the displacement of straight step edges between sequential scanning probe microscopy images of single-crystal surfaces. The program utilizes the Canny edge detection algorithm followed by the Hough Transform of the edge map to identify step edges according to their direction, relative to the image axes, and according to their displacement, relative to the image origin. The tracking of individual steps is facilitated by the fact that straight edges in general maintain their direction and therefore, steps of similar displacement but different direction can be sorted. The algorithm is based on the assumption that the rate of image acquisition is much greater than the rate of (mono)layer growth/dissolution, requiring that changes in step displacement are small in successive images. The change in step displacement in sequential images leads directly to the calculation of the step speed. By tabulating all changes in step displacement through a sequence of images, a statistical representation of the step edge data is produced. The program was evaluated using a sequence of 20 atomic force microscopy images from a calcite (104) surface growing from a supersaturated aqueous solution. The program required, in total, 5 CPU-minutes running on a Pentium 4 processor to compute the mean step speed with 60% precision whereas the equivalent number of measurements performed “by hand” required 6 person-hours at 70% precision. For comparable output, the computer program therefore represents a factor of about 100 decrease in required effort.