Temperature effect on deposition rate of silicon nitride films

Temperature effects on deposition rate of silicon nitride films were characterized by building a neural network prediction model. The silicon nitride films were deposited by using a plasma enhanced chemical vapor deposition system and process parameter effects were systematically characterized by 2⁶⁻¹ fractional factorial experiment. The process parameters involved include a radio frequency power, pressure, temperature, SiH₄, N₂, and NH₃ flow rates. The prediction performance of generalized regression neural network was drastically improved by optimizing multi-valued training factors using a genetic algorithm. Several 3D plots were generated to investigate parameter effects at various temperatures. Predicted variations were experimentally validated. The temperature effect on the deposition rate was a complex function of parameters but N₂ flow rate. Larger decreases in the deposition rate with the temperature were only noticed at lower SiH₄ (or higher NH₃) flow rates. Typical effects of SiH₄ or NH₃ flow rate were only observed at higher or lower temperatures. A comparison with the refractive index model facilitated a selective choice of either SiH₄ or NH₃ for process optimization.     

多元线性回归法在互联网网间结算中的应用

本文建立一个理论模型研究互联网互联结算的问题。文章利用多元线性回归法对互联网骨干网运营商(IBPs:Internet Backbone Providers)的网络价值进行评估,利用IBPs各自的网络价值对其交换速率进行加权,从而得出网络价值加权速率,依据这个速率进行结算既可以反映了每个网络对互联的贡献程度,又反映了在互联中对网络资源的被占用程度。     

遥感器CCD驱动器热设计及其在摄像过程中的温度变化

CCD驱动器是航天成像遥感器摄像过程中的主要热源之一。防止CCD驱动器过热是保证其正常工作的重要方面。介绍了遥感器的工作模式和对CCD驱动器采取的热控制措施。通过热平衡试验,利用回归的方法,对CCD驱动器在摄像过程中的温度变化规律进行了分析,同时对热控制效果进行了评估。CCD驱动器工作时升温速率在0.85℃/min左右,整个摄像过程中最高温度约为26℃,所实施的热控制措施效果理想。     

A system-theoretic framework for a wide class of systems I: Applications to numerical analysis

A system-theoretic framework is proposed, which allows the study of hybrid uncertain systems, which do not satisfy the so-called “semigroup property.” Characterizations of the notion of robust global asymptotic output stability (RGAOS) are given. Based on the provided characterizations, the qualitative behavior of hybrid systems obtained by time-discretization of systems of ordinary differential equations with a globally asymptotically stable equilibrium point, is studied.     

Local polynomial fitting under association

We consider the estimation of multivariate regression functions r(x₁,…,x_d) and their partial derivatives up to a total order p1 using high-order local polynomial fitting. The processes {Y_i,X_i} are assumed to be (jointly) associated. Joint asymptotic normality is established for the estimates of the regression function r and all its partial derivatives up to the total order p. Expressions for the bias and variance/covariance matrix (of the asymptotic distribution) are given.     

服装主观热感觉的统计分析

本文用多因子方差分析模型和多重比较分析了服装穿着时的主观热感觉与服装品种、环境条件、穿着者的活动状态与籍贯之间的关系。通过主成分回归建立了用生理指标预测主观热感觉的模型，从而得出一种定量地评价服装属性的方法。     

BAHADUR ASYMPTOTIC EFFICIENCY IN A SEMIPARAMETRIC REGRESSION MODEL

ＢＡＨＡＤＵＲＡＳＹＭＰＴＯＴＩＣＥＦＦＩＣＩＥＮＣＹＩＮＡＳＥＭＩＰＡＲＡＭＥＴＲＩＣＲＥＧＲＥＳＳＩＯＮＭＯＤＥＬ￥ＬＩＡＮＧＨＵＡ；ＣＨＥＮＧＰＩＮＧＡｂｓｔｒａｃｔ：ＴｈｅａｕｔｈｏｒＳｇｉｖｅＭＬＥθ１ＭＬｏｆθ１ｉｎｔｈｅｍｏｄｅｌＹ＝θ...     

固定设计下一类半参数回归模型的渐近性质

对固定设计下的一类半参数回归模型yi=xiβ+g(xi)+ei,i=1,2,…,n,综合最小二乘和非参数权函数估计方法,定义了,βg的估计量β∧n,gn∧及误差方差σ2的估计量σ2n∧.在适当条件下,证明它们具有强相合性和p(2)阶平均相合性.模拟的结果表明所得结果具有优良的性质.     

非参数回归函数之改良基于分割的估计的强相合性（英）

设(X,Y),(X1,Y1),…,(XnYn)为取值于 Rd× R的 i．i．d．随机变量,E(|Y|) ＜∞．设mn(x)为回归函数m(x)=E(|Y|X=x)基于分割的估计,本文在对mn(x)进行改良的条件下得到改良的基于分割的强相合估计．     

不确定非线性系统的鲁棒自适应控制器

在ｂａｃｋｓｔｅｐｐｉｎｇ程序中，把非线性自适应控制和鲁棒控制连接起来，为参数化的严格反馈系统在不确定性存在的情况下，建立了一种鲁棒自适应控制方案．非线性自适应控制被用来处理系统的线性参数化部分，而鲁棒控制通过引进非线性阻尼项被用来处理不确定性部分．与现有的方案不同，作者给出了非线性阻尼项的无限种选择，而不是仅仅一种选择．通过使用一种合适的选择，能够设计一个鲁棒自适应控制器．它不仅能够保证对不确定性的鲁棒性，而且能够使输出误差任意小，以及用较小的控制努力取得较好的性能．