A model for the etching of silicon in SF6/O2 plasmas

A model has been developed to describe the chemistry which occurs in SF₆/O₂ plasmas and the etching of silicon in these plasmas. Emphasis is placed nn the gas-phase free radical reactions, and the predictions n( the model are compared with experimental results. Forty-seven reactions are included, although a subset of 18 reactions describes the chemistry equally well. Agreement between the calculated and measured concentrations of stable products downstream of the plasma is better than a factor of 2. The need for additional kinetic data and fàr well-characterized diagnostic studies of SF₆/O₂ plasmas is discussed.     

Particle velocity measurements in induction plasma spraying

Laser Dopple anemometry (LDA) measurements of the particle velocity are carried out during an induction plasma spraying operation. The velocity of nickel alloy particles, or molten droplets, at the exit of an induction plasma torch prior to impact on the substrate is shown to vary with the plasma and powder injection conditions. Plasma spraying under soft vacuum (150–450 Torr) gives rise to substantially higher particle velocities (40–60 m/sec) compared to those attained at atmospheric pressure (10–20 m/sec).     

The use of “actinometer” gases in optical diagnostics of plasma etching mixtures: SF6-O2

The spectroscopic emission intensities from excited F atoms in SF₆-O₂ discharges at 1 torr have been correlated to the densities of atoms in their ground electronic state by measuring the excitation efficiencies of the electrons in the energy range 11 to 17 eV with a method which essentially consists in the analysis of the emission of Ar or N₂, added as actinometer gases to the discharge mixtures. The general applicability of the method has been tested by a direct titration of F atoms with chlorine. The spectroscopic analysis has allowed the determination of useful information on the trends of both the electron densities and their energies as a function of the oxygen percent in the feed.     

Chemical modification of polymer surfaces: a review

The main approaches that have been taken to chemically modify polymer surfaces are introduced and reviewed. These are wet chemical oxidation, plasma treatment, classical organic chemistry, and attachment of polymer chains. The extent to which each of these approaches can produce the specific modifications desired is discussed, and any unwanted effects that commonly occur are cited. Finally, the need for using several methods of surface analysis in concert to obtain adequate surface characterization is described.     

Deposition of plasma conjugated polynitrile thin films and their optical properties

The plasma polymerization of 4-phenylbenzonitrile was carried out with the objective of synthesizing a novel conjugated polynitrile thin film with a better optical property. The structure, compositions and morphology of the plasma-polymerized 4-phenylbenzonitrile (PPBPCN) thin films were investigated by Fourier transform infrared (FTIR), X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM). A fine, homogenous PPBPCN film with a large π-conjugated system and a high retention of the aromatic ring structure of the starting monomer in the deposited plasma films is obtained when a low discharge power of 30 W was used during film formation. For the first time, a blue emission with relatively high photoluminescence intensity for PPBPCN thin films was observed.     

Synthesis and characterization of PAni–SiO2 and PTh–SiO2 nanocomposites' thin films by plasma polymerization

In the present work, we explore the possibility to deposit polyaniline–silicon dioxide (PAni–SiO₂) and polythiophene–silicon dioxide (PTh–SiO₂) nanocomposites through a plasma polymerization route. The films were generated by spraying of mixtures of nano-sized silica particles dispersed in the liquid monomer into a plasma stream of the DC-plasma discharge reactor. The silica in the resulted polymer matrix changes the conduction mechanisms varying from ohmic to ballistic and traps inducing the space charged limited currents (SCLC). The silica modifies the morphology and composition of the deposited films.     

On the Reactivity of Silver Electrodes in a Chlorine Radiofrequency Plasma — Plasma Oxidation vs. Thermal Oxidation

The plasma‐electrochemical growth of an ion‐conducting film by the oxidation of a metal in an electronegative plasma is investigated and compared with results from thermal oxidation. As model system we studied the oxidation kinetics of silver electrodes in a Cl₂ rf plasma. The electrochemical control of the reaction by external currents through the product layer using the plasma as a fluid electrode was achieved. Both potentiostatic and galvanostatic control of the reaction was applied. The morphology of the product layer and its temporal evolution was investigated using SEM. A formation of silver chloride surface patterns in the oxidation process takes place if a simple stability criterion is not fulfilled. Specific surface morphologies were found under different experimental conditions. The morphology of the product layer is influenced by the external electric current and the substrate temperature. The influence of the plasma phase on the thermodynamics and kinetics of the oxidation process is discussed. The role of excited plasma species, the electrical charging of the surface and radiation from the plasma are taken into account.     

A specific sensitive HPLC method for determination of plasma dopamine

Summary We describe here a sensitive, selective and rapid method to quantitate plasma catecholamines, especially dopamine, using high-performance liquid chromatography with electrochemical detection. This method requires a 10-minute run time and has a threshold for detection of 2 picograms, (10pg/ml).A number of commonly employed mobile phases for catecholamine analysis have been tested and have failed to detect dopamine in biological samples. Neither acetonitrile (3–7%) or methanol, (5–8%) in the mobile phase has produced consistently interpretable data either due to inability to detect or interference from co-eluting substances. Optimal detection was achieved with a mobile phase containing sodium acetate (6.8g), citric acid (5.9g), EDTA (48mg), di-n-butylamine (270l), Na-1-octane sulfate (850mg), methanol (100 ml) (amounts refer to 1 liter aqueous solution) (pH 4.3). The mobile phase was passed through a Waters 5 resolve C₁₈ column using a Waters 590 pump and m460 electrochemical detector and 740 data module, Flow rate was 0.9ml/min. Using this method, normal values in human and swine left ventricular myocardium and human and swine plasma have been established for norepinephrine, epinephrine, and dopamine.     

等离子体聚萘薄膜作发光层的蓝色发光二极管

等离子体聚萘薄膜作发光层的蓝色发光二极管马於光，唐建国，张海峰，沈家骢，刘式墉，刘晓东（吉林大学分子光谱与分子结构开放实验室，集成光电子学国家重点实验室，长春，１３００２３）（白求恩医科大学）关键词等离子体聚合物，蓝光，发光二极管Ｂｕｒｒｏｕｇｈｅｓ...     

等离子体辐照的聚乙烯表面接枝交联共聚合

聚合物利用低温等离子体预辐照进行表面接枝共聚合已有报道.此方法的优点是接枝层被限制在聚合物表面,辐照过程对基材本体性质无影响,且整个过程对环境无污染. 用等离子体使聚合物表面产生自由基,不需要表面具有不饱和键或特殊官能团,因而适用于任何聚合物,甚至于一些无机物如玻璃等.利用等离子辐照后暴露于空气的聚合物表面上生成的过氧自由基或过氧化物进行接枝反应,一般接枝量不大.本工作中,我们自己设计了反应器,以超高分子量聚乙烯(UHMWPE)为基材,以甲基丙烯酸甲酯(MMA)为接枝单体,在无氧条件下利用等离子体辐照产生的表面自由基进行了接枝聚合,产物接枝量高达10％.还用顺磁共振技术对表面自由基性质及其在接枝过程中的行为进行了跟踪研究.