Large-area microwave and radiofrequency plasma etching of polymers

We have investigated O₂/CF₄ plasma etching of five commercial polymers: polyimide, polyamide, polyethylene terephthalate, polycarbonate and cured epoxy resin. A new large-area microwave plasma apparatus has been used in this work, but the same apparatus can also be used as a capacitively coupled radiofrequency (13.56 MHz) discharge reactor. The effect of operating parameters such as pressure, etchant gas composition, excitation frequency and sample temperature upon etch kinetics has been examined. We have observed distinct maxima in the etch rate as functions of pressure and CF₄ concentration. Activation, energies evaluated from the Arrhenius plots fall in the range 0.04-0.2 eV, in agreement with data in the literature. Dry etch susceptibility of a given polymer correlates strongly with the degree of unsaturation in the polymer's structure     

Operation of the quasi-optical gyrotron at harmonics of the gyrofrequency

This paper investigates the performance of a quasioptical gyrotron, when the electron beam interacts with the radiation fields at harmonics of the gyrofrequency. The nonlinear equations of motion are obtained in the slow-timescale. The expression for the linear gain is derived and the conditions for excitation are given (frequency threshold, optimal operating point, bean current and resonator quality thresholds). In the nonlinear regime, it is shown that maximum efficiencies comparable to those at the fundemental (50%) are possible, albeit at a prohitively high radiation field amplitude, while realistically feasible field amplitudes can give somewhat smaller, but nevertheless still high efficiencies (15%). Finally, the results are suplemented by empirical scaling laws, useful for experimental designs.     

Experimental and Theoretical Studies of a Pulsed Microwave Excited Ar/CF4 Plasma

The present work deals with a pulsed microwave discharge in an Ar/CF ₄ gas mixture under a low pressure (1–10 mbar). The discharge chamber developed has a cylindrical geometry with a coupling window alternatively made of quartz or alumina. The setup allows one to investigate the plasma–wall interactions (here etching of the quartz window) and the ignition process of the pulsed microwave plasma. Microwave pulses with a duration of 50–200 s and repetition rate between 1 and 10 kHz are typical for the experiments. The space-time behavior of the fluorine number density in the discharge has been investigated experimentally by optical actinometry. The discharge kinetics is modeled using electron-transport parameters and rate coefficients derived from solutions of the Boltzmann equation. Together with the solution of the continuity and electron balance equations and the rate equations describing the production of CF _x (x=2, 3, 4) radicals and F atoms, a good agreement between experimental and theoretical data can be achieved.     

Synthesis of 2-(α-Hydroxyalkyl)-2-Oxazoline under Microwave Irradiation in Bluk

Four 2-(α-hydroxyalkyl)-2-oxazolines and a 2-(α-hydroxy-α,α-diphenyl)-2-benzooxazole were synthesized from β-amimoalcohols and α-hydroxy carboxylic acids under microwave irradiation in the absence of a solvent.     

微波消解/ICP-AES法测定污水处理厂污泥中的重金属

采用微波消解/电感耦合等离子发射光谱法(ICP-AES)测定了城市污水处理厂污泥中Cd、Cr、Cu、Mn、Mo、Ni、Pb、Zn等8种重金属元素,并优化了ICP仪器工作参数及微波消解条件.方法的检出限为0.001～0.01mg/L.相对标准偏差为2.0%～9.2%(n=7),回收率为85.3%～105.0%.     

Relationship between Muscle Flexibility and Characteristics of Muscle Contraction in Healthy Women during Different Menstrual Phases

Objective: Skeletal muscle function is vital for preventing injury during exercise. It has been reported that skeletal muscle function fluctuates with the menstrual cycle and is considered one of the causes of injury. This study aimed to clarify the relationship between muscle flexibility and muscle contraction characteristics and their changes with the menstrual cycle. Methods: The subjects were healthy women who voluntarily participated in the study through recruitment posters. Muscle flexibility was measured with the passive knee extension (PKE) test, isokinetic knee flexor strength, and the maximum muscle strength exertion angle under two conditions of 60°/s and 120°/s in dominant hamstrings. Additionally, their correlations were analyzed and compared between the menstrual and ovulatory phases. Results: Sixteen subjects (mean age: 20.56 ± 0.73 years; body mass index: 20.21 ± 1.60) participated in the study. Correlation analysis showed a significant negative correlation between PKE and the maximum muscle strength exertion angle under the condition of 60°/s during the menstrual phase (r = –0.54; p = 0.03). No significant difference was observed in the two-group comparison of the variables measured during the menstrual and ovulatory phases. Conclusion: This study confirmed that the more flexible muscles generate the maximum strength at a more contracted position during the menstrual phase in women. In the future, it is necessary to examine the relationship between the results of this study and exercise performance and injury occurrence.     

微波加热制备含稀土(La2O3)矿渣微晶玻璃研究

利用矿渣制备微晶玻璃是提高矿产资源利用率的主要形式之一。本文以白云鄂博尾矿为原料,采用微波一步法制备了CaO-MgO-Al₂O₃-SiO₂(CMAS)系辉石相矿渣微晶玻璃。选择835 ℃作为晶化温度,研究了微波加热对微晶玻璃析晶行为和微观组织的影响。以La₂O₃作为研究变量探讨了La₂O₃添加对矿渣微晶玻璃析晶行为的作用。与传统的热处理制度相比,微波加热可以在较短的时间内达到较高的析晶效果。同时La₂O₃的添加促进了晶粒细化。由拉曼光谱分析,La离子添加会导致玻璃网络中桥氧的增多,促进了辉石相析晶。在La的添加量为4%(质量分数)时硬度最高,达到了829.22 MPa。     

一种基于热离子二极管的大功率微波探测器

 主要给出了波导型的X波段大功率微波探测器的结构、标定方法和标定结果。该新型大功率微波探测器具有承受微波峰值功率高（可达100 kW）,时间响应快（响应时间小于2.0 ns）,不需要同步信号,抗干扰能力强等特点。根据不同的需要,可以制作成波导型和同轴型的大功率微波探测器。波导型探测器由热离子二极管、标准波导、滤波器和外电路组成,其工作频率范围为波导的工作频率范围;而同轴型探测器由热离子二极管、同轴波导,滤波器和外电路组成,可以宽带使用。标定结果表明该探测器很适合高功率微波峰值功率测量,尤其是在强电磁干扰环境和高重频微波脉冲条件下的测量,为解决功率测量不准的技术难题提供一种有效的技术手段。     

无光滤波六倍频微波信号产生的系统设计

基于两个级联偏振调制器,提出了一种高频谱纯度、稳定的六倍频微波信号产生方法。该方法通过适当调整偏振片的偏振方向、射频驱动信号电压和相位,实现无光滤波器条件下、任何波段六倍频微波信号的产生。利用Optisystem平台搭建的仿真系统,以S波段4 GHz信号为例,验证了该设计系统产生的六倍频信号质量,并分析了非理想射频驱动电压和相位对六倍频信号质量的影响,结果表明：该设计系统能产生最大光边带抑制比、射频无杂散抑制比分别为21.3,15.2 dB的六倍频微波信号;且非理想驱动电压和相位差的偏离应控制在理想值5%的范围之内。     

高电子迁移率晶体管放大器高功率微波损伤机理

在TCAD半导体仿真环境中,建立了0.25 m栅长的AlGaAs/InGaAs高电子迁移率晶体管(HEMT)低噪声放大器与微波脉冲作用的仿真模型,基于器件内部的电场强度、电流密度和温度分布的变化,研究了1 GHz的微波从栅极和漏极注入的损伤机理。研究结果表明,从栅极注入约40.1 dBm的微波时,HEMT内部峰值温度随着时间的变化振荡上升,最终使得器件失效,栅下靠源侧电流通道和强电场的同时存在使得该位置最容易损伤;从漏极注入微波时,注入功率的高低会使器件内部出现不同的响应过程,注入功率存在一个临界值,高于该值,器件有可能在第一个周期内损伤,损伤位置均在漏极附近。在1 GHz的微波作用下,漏极注入比栅极注入更难损伤。