Multilayered Cu–Ti deposition on silicon substrates for chemiresistor applications

Abstract

On the perspective to develop CuO–TiO₂ MOS, multilayered Cu and Ti thin layers were alternatively deposited on silicon wafers using 25?keV Ar?+?ion beam sputtering and, subsequently, oxidized by thermal annealing in air at 400?°C for 24?h. The deposited films have variable ratios of the Cu and Ti % at. One of the main goal is to obtain such multilayers avoiding the presence of Cu–Ti–O compounds. The samples were characterized in terms of composition (by RBS and SIMS analyses) and morphology (by AFM and SEM investigations). In particular, SIMS maps allows to observe the spatial distribution and thickness of each phase of the Cu/Ti multilayers, and further to observe Cu diffusion and mixing with Ti, as well as phase separation of CuO and TiO₂ in the samples. The reasons of this effect represent an open issue that has to investigated, in order to improve the MOS fabrication.     

A new route of the reaction of EtAlCl2 with α-olefins catalyzed by Ti complexes

A new method for the synthesis of dialkyl(ethyl)alanes by the reaction of EtAlCl₂ with -olefins in the presence of Mg and a catalytic amount of Cp₂TiCl₂ (Ti(OPrⁱ)₄, Ti(OBuⁿ)₄) in THF was developed.     

Structure of Sol-Gel-Derived Sodium Dititanate Glass

The sodium dititanate, Na₂O·2TiO₂ glass was prepared by the sol-gel method. The structure of the glass, especially local environment of Ti⁴⁺ ions was examined using X-ray diffraction and X-ray absorption fine structure (XAFS) analyses, and was compared with that of the melt-derived glass with the same composition. It was found that Ti⁴⁺ ions are rather in five-fold coordination state, forming TiO₅ pyramids with one doubly bonded Ti=O in the gel-glass, while they were in lower coordination state or four-fold coordination in the melt-derived glass.     

钇对金属陶瓷力学性能和组织的影响

研究了添加钇对Ｔｉ（Ｃ，Ｎ）基金属瓷力学性能和组织的影响。结果表明，加入适量的钇能提高Ｔｉ（Ｃ，Ｎ）基金属陶瓷的抗变强度和硬度，其原因是由于钇与杂质硫起反应在化合物，净化了陶瓷相－金属相，陶瓷相－陶瓷相界面提高子界面结合强度     

Titanium‐implanted CaTiO3 films and their changes in Hanks' solution

Titanium‐implanted CaTiO₃ film was prepared and then characterized by x‐ray photoelectron spectroscopy (XPS) and Rutherford backscattering spectrometry (RBS) before and after immersion in Hanks' solution for 7 days. An as‐prepared specimen contained a small amount of Ar implanted during sputtering, although the pressure was as low as 10^?4 Torr. Even though Ar convolution increased with an increase in the relative Ti ion dose, most of the convoluted Ar was not from the Ar gas used for Ti ion production but rather was from the Ar gas used for sputtering the CaTiO₃. During Ti implantation, the CaTiO₃ films were ion‐etched by Ti ions. The composition of the CaTiO₃ film was not changed to any great degree by the Ti implantation, however its properties changed considerably. After immersion in Hanks' solution, the thickness of the specimen not implanted with Ti decreased the most whereas the [Ca]/[P] ratio, which was nearly unity before exposure, decreased significantly, becoming 0.23 on the Ti‐implanted specimen prepared at 200 W and 0.13 on the Ti‐implanted specimen prepared at 50 W. It was also observed by XPS that the ratio [Ca]/[P] was ～1.9 for all Ti‐implanted specimens after immersion in Hanks' solution for 7 days. Judging from the binding energies of Ca 2p_3/2 and P 2p electrons and the [Ca]/[P] ratio, it was suggested that a hydroxyapatite‐like substance had formed on the surfaces of the Ti‐implanted specimens after immersion in Hanks' solution. Copyright © 2003 John Wiley & Sons, Ltd.     

Influence of the cathodic polarization on the stability of Ti surface in concentrated KOH solutions

The stability of spontaneous thin layers and thin layers formed upon cathodical polarization of Ti in KOH solutions have been studied by potentiostatic and ellipsometric methods. At open circuit potential (OCP) the strongly adherent films, whose thickness depends on the concentration of the KOH solution, were formed. During the cathodic polarization the transformation of these films to weakly adsorbed precipitated layers on the electrode surface was observed. Comparing the theoretically computed curves with the experimental Ψ vs Δ loci measured ellipsometrically, the complex indices of refraction and the thickness of the generated films, from 3.6 to 60 nm in 1 M KOH and from 36 to 105 nm in 5 M KOH (adherent to the electrode surface), were determined. At OCP the rate of film growth increases with increasing the concentration of KOH solution. Cathodic polarizations change the chemical composition and retard the rate of film growth. Based on the ellipsometric and electrochemical data the chemical compositions of the formed films consisted of TiO₂, Ti₂O₃, TiO₂·H₂O, Ti(OH)₃ and TiOOH·nH₂O.     

稀土在低硫铌钛钢中的作用

在实验条件下采用50kg真空感应炉炼和两段控制轧制工艺，并采用WE－60型万能拉伸试验机，JB－30B型冲击试验机，MM6型及OLYMPUS－PME3型光学金相显微镜，IBAS－2000图相分析等手段研究了稀土对低硫铌钛钢性能，组织及夹杂物的影响。在低硫铌钛钢中的试验结果表明，稀土元素的加入使力学性能变化各异，它使钢的横向屈服点和抗拉强度先下降而后上升；延伸率则无下降而后上升；稀土对钢的横向冲击功则表现为先上升而后下降，并且在－20℃以上，适量的稀土加入可以明显改善其冲击功的各向异性；稀土的加入并不能改变钢的显微组织类型，钢的组织为铁素体＋珠光体，但稀土会使钢中珠光体数量增加，铁素体数量减少，在钢中夹杂物方面，稀土加入则表现为它一方面 化钢液，使钢中夹杂物数量减少，另一方面是使钢中夹杂物的颗粒球化，细化和弥散化，从而改善夹杂物的分布。     

激发态Ti＋(3d14s2)与丙炔醇气相反应理论研究

用量子化学密度泛函(DFT)方法研究了激发态Ti^＋(3d¹4s²)与丙炔醇(PPA)气相反应的机理. 在B3LYP/DZVP水平上, 优化了反应的两个通道的反应物、中间体、过渡态和产物的几何构型, 并在MP4/[6-311＋G**(C,H,O)＋Lanl2dz (Ti)]水平上计算了各驻点的单点能量. 为了确证过渡态的真实性, 在B3LYP/DZVP水平上进行了内禀坐标(IRC)计算和频率分析, 获得了二重态反应势能面, 确定了反应机理. 研究结果表明生成产物为[C₃H₃O]^＋和Ti—H的通道是主要反应途径.     

Fabrication of PbTiO3 Ceramic Fibers by Sol-Gel Processing

The sol-gel processing was applied to the fabrication of PbTiO₃ fibers. Pb(CH₃COO)₂·3H₂O and Ti(OC₃H ₇ ⁱ )₄ were refluxed with stirring in 2-methoxyethanol to form Pb-methoxyethoxide and Ti-methoxyethoxide, respectively, followed by mixing with stirring in 2-methoxyethanol to form Pb−Ti double alkoxide. The hydrolysis and polycondensation reaction of this double alkoxide gave polymerized products, and as a result the viscosity of the solution increased, suggesting that linear polymers were produced through the hydrolysis and polycondensation reaction. Homogeneous PbTiO₃ gel fibers were drawn from the spinnable viscous solutions, which were wellcrystallized into perovskite type PbTiO₃ at 650°C. The heat-treated fibers were a few centimeters long and from 10 to 100 μm in diameter. The fiber was made up of extremely uniform grains. Electron diffraction revealed a preferred growth of (101) planes along the fiber axis, which might be due to the linear molecular characteristics of the alkoxide.     

丁二烯催化环化三聚中多金属的协同效应

研究了第二过渡金属化合物对ＴｉＣｌ４／ＡｌｅＴ１．４６ｃＬ１．５４催化丁二烯环化三聚的多金属协同效应。结果表明，极少量的第二过渡金属化合物，如Ｃｒ，（ａｃａｃ）３，Ｍｎ（ａｃａｃ）３，ＮｉＣｌ２，ＺｒＣｌ４等加入ＴｉＣｌ４／ＡｌＥｔ１．４６Ｃｌ１．５４体系后不同程度地提高了丁二烯环化三聚的选择性，并改变了体系的最大速率和催化剂效率。