2019年中国声学学会青年人才托举工程项目交流会在南昌召开

为改善电磁超声换能器(electromagnetic acoustic transducer,EMAT)激发横波的特性,提出一种基于正交试验的优化方法,并利用有限元仿真软件COMSOL Multiphysics建立了横波EMAT的有限元模型,应用正交试验和极差分析法,分析了线圈各参数对电磁超声横波的近场长度和半扩散角的影响,比较了线圈各参数影响程度的大小。结果表明,激励电流的频率和线圈的尺寸对横波的传播特性有着明显影响,提高频率会使得横波的近场长度增大及半扩散角减小;其次,减小导线的宽度及间距,以缩小线圈尺寸能有效改善横波的传播特性。     

Capacitive micromachined ultrasonic transducers using commercial multi-user MUMPs process: Capability and limitations

The objective of this work is to construct capacitive micromachined ultrasound transducers (cMUTs) using multi-user microelectromechanical systems (MEMS) processess (MUMPs) and to analyze the capability of this process relative to the customized processes commonly in use. The MUMPs process has the advantages of low cost and accessibility to general users since it is not necessary to have access to customized fabrication capability such as wafer-bonding and sacrificial release processes. While other researchers have reported fabricating cMUTs using the MUMPs process none has reported the limitations in the process that arise due to the use of standard design rules that place limitations on the material thicknesses, gap thicknesses, and materials that may be used. In this paper we explain these limitations, and analyze the capabilities using 1D modeling, Finite Element Analysis, and experimental devices. We show that one of the limitations is that collapse voltage and center frequency can not be controlled independently. However, center frequencies up to 9 MHz can be achieved with collapse voltages of less than 200 V making such devices suitable for medical and non-destructive evaluation imaging applications. Since the membrane and base electrodes are made of polysilicon, there is a larger series resistance than that resulting from processes that use metal electrodes. We show that the series resistance is not a significant problem. The conductive polysilicon can also destroy the cMUT if the top membrane is pulled in the bottom. As a solution we propose the application of an additional dielectric layer. Finally we demonstrate a device built with a novel beam construction that produces transmitted pressure pulse into air with 6% bandwidth and agrees reasonably well with the 1D model. We conclude that cMUTs made with MUMPs process have some limitations that are not present in customized processes. However, these limitations may be overcome with the proper design considerations that we have presented putting a low cost, highly accessible means of making cMUT devices into the hands of academic and industrial researchers.     

RSD固态脉冲电源中的罗氏线圈电流检测技术

 介绍了基于高速大功率反向开关晶体管(RSD)的磁压缩固态脉冲电源试验平台,就RSD状态电流及磁压缩脉冲电流的波形特征对检测环节高需求的问题,研究了罗氏(Rogowski)线圈传感头的频率特性,在对比已有传感头信号处理方法的基础上,给出了一种新型结构的自积分与外积分复合式罗氏线圈的设计过程和参数选取方法,在保证传感器具有1 mV/A灵敏度的前提下,将传感器的工作频带从低频拓宽到线圈的自然角频率。给出了二级磁压缩网络放电的负载电流实验波形及RSD开关的触发、导通电流波形,验证了该罗氏线圈传感器能够满足本固态脉冲电源中的RSD开关状态电流高精度检测和负载电流的高频检测要求。     

夹心式压电超声换能器串并联传输矩阵设计法

将压电环片等效为一有源六端网络,考虑预应力螺栓对系统建模的影响,并将其等效为一机械四端网络,基于串并联传输矩阵法,建立了Langevin换能器的总体网络模型,导出其总传输矩阵,进而推算出换能器的共振频率。结果显示该方法比普遍采用的Langevin换能器传输矩阵设计法有更高的参量计算精度。此方法也为分析换能器其它电学参数提供了方便。     

矩形辐射器压电多频超声换能器的研究

研究了一种具有多个共振频率的矩形辐射器夹心式超声换能器,换能器由圆柱形后盖板、压电陶瓷晶堆及矩形六面体辐射器前盖板组合而成。利用表观弹性法和一维近似理论给出了多频换能器横向及纵向理论共振频率方程。对一种特殊情况下的此类换能器进行了有限元及实验分析,给出了各自的频率输入导纳曲线。对理论和实验结果进行分析后表明,此类矩形辐射器夹心式超声换能器可以在不同的振动模态上工作,具有多个共振频率.     

Acousto-optic interaction in a non-homogeneous acoustic field excited by a wedge-shaped transducer

The article is devoted to theoretical analysis of light diffraction in a non-homogeneous acoustic field created by a wedge-shaped piezoelectric transducer. Relationships describing electrical, acoustic and acousto-optic properties of the acousto-optic cell are derived in the approximation of a small thickness of the piezoelectric plate. Principal characteristics of acousto-optic interaction are examined such as dependences of the light diffraction efficiency on the phase mismatch and the acoustic wave amplitude. It is shown that the acoustic field has a complicated amplitude-phase structure changing with the acoustic frequency. It is demonstrated that the diffraction efficiency in the Bragg regime can approach 100% in spite of a noticeable phase mismatch. The appropriate optimal values of ultrasound power and incidence angles of light are found.     

Fabrication and evaluation of fully-sampled, two-dimensional transducer array for "Sonic Window" imaging system

A low-cost, fully-sampled, 3600 element 2D transducer array operating at 5 MHz and designed for use in a hand-held ultrasound system is described here. Four array configurations are presented - (1) array with both matching and pedestal backing layers, (2) array with a matching layer but no backing pedestal, (3) array with a backing pedestal but no matching layer, and (4) array with neither matching layer nor backing pedestal. Each array was characterized in terms of impedance measurements, pulse-echo response, and experimental beamprofile. Comparative finite element analysis simulations are also presented. Average estimated active element yield for the four arrays was 94%. The array with pedestal layer proved the most promising, providing a 26% bandwidth and a 1.7 dB improvement in sensitivity with respect to the array with neither pedestal nor matching layer. Although this bandwidth is acceptable for our specific application (C-scan imaging), reverberations within the substrate material remain a potential challenge. We are currently working to fabricate a custom PCB material to address this concern, and may also consider using a pre-compensated transmit waveform or matched digital filter approach to further reduce the effects of such reverberations.     

Five port lattice model for simulation of piezoelectric structures possessing twin, compressional modes of vibration

A method is presented for predicting the performance of multilayered piezoelectric structures which demonstrate two, loosely coupled compressional modes of vibration. A linear systems, lattice approach is developed using a matrix formulation for implementation of the transducer transfer functions in the frequency domain. The technique is computationally efficient, providing good results over a key range of transducer dimensions and is especially useful for the practical evaluation of multilayered, linear or diced array structures.     

A basic course on compiler principles

An attempt to devise a methodology of compiler design is described, and an outline is given for a possible course on this subject. The theoretical basis is formed by the concepts of phrase-structure language, finite-state- and stack-acceptor, and transducer. As their extension capable of processing context-dependent elements of languages, a so-called Table-Transducer is postulated, and it serves as the core-algorithm upon which compilers are based. The developed theory and method of compiler construction is applied to an example of a simple programming language.     

表面波电磁声换能器的设计

简要介绍了产生表面波的电磁声换能器（EMAT）的工作原理，设计，制作了收发分开的两种EMAT，并建立了实验测试系统、测量了信号和发射EMAT提离距离的关系曲线，研究了激励脉冲个数、接收线圈的匝数对换能器信号的影响等。