Si(001)衬底上闪锌矿ZnO的制备与分析

采用分子束外延方法在室温下于Si(001)表面上生长ZnO材料。实验发现:样品为闪锌矿和六角结构的ZnO混合多晶薄膜,其表面分布着一系列具一定取向的近似长方形的纳米台柱结构。在不同参数的高温退火后,这些梯形台柱将变小,形成梯形纳米环,或分解为较小的纳米柱及其团簇结构等。分析表明:ZnO混合多晶薄膜的形成,以及表面纳米台柱的演变,与Si(001)衬底、较低温的生长温度及热效应等因素相关联。     

MBE自组织生长多层竖直自对准InAs量子点结构的研究

利用MBE方法在(001)GaAs衬底上生长了多层竖直自对准InAs量子点结构。透射电子显微镜的观察表明,多层量子点成一系列柱状分布。同单层量子点相比,多层量子点的光荧光谱线发生红移。这表明由于量子点中载流子波函数的扩展和交迭,柱中量子点之间有耦合现象发生。光荧光谱线半高宽随温度的反常变化说明载流子还会在邻近柱中隧穿.     

Combinatorial discovery of anomalous substrate effect on the photochemical properties of transition metal-doped epitaxial SrTiO3 heterostructures

Epitaxial Sr(V_xCr_yTi_1−x−y)O₃ (0≤x+y≤0.05) ternary composition spreads were grown on two different single crystal substrates, LaAlO₃ and Nb-doped SrTiO₃, by use of combinatorial laser molecular beam epitaxy with a specially patterned slide masking plate. The photocatalytic activity on the composition spreads was evaluated by the photo-reduction of Ag⁺ in an AgNO₃ aqueous solution to deposit Ag metal on the spreads. The V-doping effect was found to depend greatly on the substrate: the photodeposition of Ag was much enhanced in the composition region of SrV_0.05Ti_0.95O₃ only on the Nb-doped SrTiO₃, but not on the LaAlO₃ and non-doped SrTiO₃.     

Local band gap modulation of AlGaAs grown on patterned GaAs substrates

The growth of AlGaAs layers on patterned GaAs substrates by molecular-beam epitaxy is strongly determined by the interfacet surface migration of Ga adatoms, leading to a pronounced variation of the local Al concentration. Taking advantage of this migration process, we have overgrown mesa structures, that consist of intersecting stripes or partially overlapping squares, to obtain a local maximum or minimum, respectively, of the AlGaAs band gap on top of the mesas.     

测定GaAs(001)衬底上InAs的生长速率

报道了间接测定InAs生长速率的方法.通过设置不同Ga源温度,固定In源温度;和固定Ga源温度,设置不同In源温度,在GaAs(001)衬底上生长GaAs与InGaAs,用RHEED强度振荡测定GaAs与InGaAs的生长速率.验证了InGaAs的生长速率为GaAs的生长速率与InAs的生长速率之和,得到了In源温度在845～880℃时InAs的生长速率曲线.     

ZnO单晶和BeZnO合金的生长及其紫外探测器研究

用分子束外延(MBE)的方法在c面蓝宝石衬底上生长出了高质量的ZnO单晶薄膜和BexZn1-xO合金薄膜。X射线光电子能谱(XPS)测试结果表明,合金材料中Be元素的摩尔分数分别为1.8%、4.9%、8.0%和15.3%。在此基础上制备了ZnO基和BexZn1-xO基的金属-半导体-金属(MSM)结构紫外探测器。ZnO单晶探测器的响应波长为375nm,在1V电压下,350nm处的光响应度高达43A/W,光电流和暗电流之比达到105量级。在BexZn1-xO基紫外探测器中,其截止响应波长随着合金中Be含量的增加逐渐蓝移,其中Be0.153-Zn0.847O合金探测器的截止响应波长为366nm,紫外波段和可见波段的光电流之比达到2~3个数量级,具有良好的信噪比。此外,提出了氧气等离子体表面处理降低探测器暗电流的方法,并使ZnO单晶探测器的暗电流降低了4个数量级。     

Interdiffusion phenomena in InGaAs/GaAs superlattice structures

We have studied structural properties of InGaAs/GaAs superlattice sample prepared by Molecular Beam Epitaxy (MBE) using high resolution X‐ray diffractometer (HRXRD). Increasing strain relaxation and defect generations are observed with the increasing Rapid Thermal Annealing (RTA) temperature up to 775 °C. The higher temperatures bring out relaxation mechanisms; interdiffusion and favored migration. The defect structure and the defects which are observed with the increasing annealing temperature were analyzed. Firstly, the in‐plane and out‐of‐plane strains after the annealing of sample were found. Secondly, the structural defect properties such as the parallel X‐ray strain, perpendicular X‐ray strain, misfit, degree of relaxation, x composition, tilt angles and dislocation that are obtained from X‐ray diffraction (XRD) analysis were carried out at every temperature. As a result, we observed that the asymmetric peaks especially in asymmetric (224) plane was affected more than symmetric and asymmetric planes with lower polar or inclination angles due to c‐direction at low temperature. These structural properties exhibit different unfavorable behaviors for every reflection direction at the increasing temperatures. The reason is the relaxation which is caused by spatially inhomogeneous strain distribution with the increasing annealing temperature. In the InGaAs superlattice samples, this process enhances preferential migration of In atoms along the growth direction. Further increase in the annealing temperature leads to the deterioration of the abrupt interfaces in the superlattice and degradation in its structural properties. (© 2010 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

生长温度对In_(0.5)Ga_(0.5)As/GaAs量子点尺寸的影响

采用分子束外延(MBE)技术制备In_(0.5)Ga_(0.5)As/GaAs量子点,利用扫描隧道显微镜(STM)对不同衬底温度下生长的样品进行表征分析.研究表明量子点密度随温度升高先增大后减小,其尺寸随温度的升高而增大.另外,量子点以S-K模式生长并受Ostwald熟化机制影响,其尺寸增大所需的能量来自应变能和温度提供的能量,高温条件下表面原子的解吸附作用会限制量子点的生长.     

Molecular beam epitaxy growth and characterization of self-assembled InAs quantum dots on (1 0 0) InAlAs/InP substrates

Self-assembled InAs quantum dots (QDs) on In_0.52Al_0.48As layer lattice matched to (1 0 0) InP substrates have been grown by molecular beam epitaxy (MBE) and evaluated by transmission electron microscopy (TEM) and photoluminescence (PL). TEM observations indicate that defect-free InAs QDs can be grown to obtain emissions over the technologically important 1.3–1.55 μm region. The PL peak positions for the QDs shift to low energy as the InAs coverage increases, corresponding to increase in QD size. The room temperature PL peak at 1.58 μm was observed from defect-free InAs QDs with average dot height of 3.6 nm.     

Controlling anisotropy of GaSb(As)/GaAs quantum dots by self-assembled molecular beam epitaxy

A systematic study was performed to control the geometrical anisotropy of GaSb(As)/GaAs quantum dot structures formed by the Stranski–Krastanov growth mode of molecular beam epitaxy. In particular, effects of both the Sb₄ beam flux and the As₄ background pressure on the geometrical anisotropy were clarified and elongated QDs with lateral aspect ratio greater than 3 were successfully formed. Under a low As₄ background pressure, As₄ is found to act as surfactant to influence the adatom diffusion and change the density of QDs. By contrast, under high As₄ background pressure, the intermixing of As and Sb takes place and reduces strains induced by the lattice mismatch.