基于液滴外延法的Al(In)纳米结构在GaAs(001)的形成机制

采用液滴外延法在GaAs(001)衬底上同时沉积In、Al液滴形成纳米结构,利用原子力显微镜(AFM)对实验样品进行形貌表征,并通过X射线光电子能谱(XPS)与扫描电子显微镜分析In、Al组分比样品表面元素分布。实验结果显示,混合沉积后的表面InAlAs纳米结构密度随着In组分的降低而降低,而单个纳米结构的尺寸变大。SEM与XPS测试结果证明表面的In并没有因为衬底温度过高而全部偏析。根据实验结果推测,In&Al液滴同时沉积到表面形成InAl混合液滴。当液滴完全晶化后纳米结构中心出现孔洞,而产生这一现象的主要原因是液滴向下刻蚀。     

Enhanced ferromagnetism by preventing antiferromagnetic MnO2 in InP:Be/Mn/InP:Be triple layers fabricated using molecular beam epitaxy

The p-type InP:Be/Mn/InMnP:Be triple epilayers were prepared using MBE to increase T_c (>300 K) by preventing MnO₂. After milling 1–3 nm of epilayers thickness from the top surface, the transmission electron microscopy (TEM) and X-ray diffraction (XRD) revealed no MnO₂ and precipitates, and TEM and XRD results coincide with results of ferromagnetism. The enhanced ferromagnetic transition at >300 K corresponds to InMnP:Be. The increased ferromagnetic coupling without MnO₂ is considered to originate from the increased p–d hybridation. These results demonstrate that InP-based ferromagnetic semiconductor layers having enhanced ferromagnetism can be formed by above process.     

Transmission electron microscopy study of hexagonal GaN film grown on GaAs (0 0 1) substrate by using AlAs nucleation layer

Hexagonal gallium nitride (h-GaN) films have been grown on AlAs nucleation layer by using radio frequency (RF) plasma source-assisted molecular beam epitaxy on GaAs (0 0 1) substrate. Transmission electron microscopy (TEM) techniques are used to characterize such h-GaN epilayers. TEM results show that (0 0 0 1) atom planes of h-GaN are parallel to (0 0 1) atom planes of the GaAs substrate. Defects, such as stacking faults and dislocations, have also been observed.     

RHEED monitoring of AlN epitaxial growth by plasma-assisted molecular beam epitaxy

We have studied the epitaxial growth of AlN layers by plasma-assisted molecular beam epitaxy (MBE) on 6H–SiC substrate. Reflection high-energy electron diffraction (RHEED) was used to monitor the growth by the observation of the 2D–3D growth transition, respectively, in Al- and N-rich conditions. Special attention was given to the elimination of the Al droplets which often form in Al-rich conditions. Different growth procedures are proposed to avoid the appearance of these droplets while keeping a 2D growth. Each of the procedure gives AlN epilayers with identical crystalline quality and low surface roughness as measured, respectively, by X-ray diffraction and atomic force microscopy.     

Quasi-continuous-wave operation of AlGaAs/GaAs quantum cascade lasers

Quasi-continuous-wave operation of AlGaAs/GaAs-based quantum cascade lasers (λ9 μm) up to 165 K is reported. The strong temperature dependence of the threshold current density and its higher value in high duty cycle is investigated in detail. The self-heating effect in the active region is explored by changing the operating duty cycles. The degradation of lasing performance with temperature is explained.     

Formation of high-density GaAs hexagonal nano-wire networks by selective MBE growth on pre-patterned (0 0 1) substrates

Attempts were made to grow high-density GaAs hexagonal nano-wire networks on (0 0 1) patterned substrates by selective molecular beam epitaxy. To form a hexagon, - and 5 1 0-directions were combined. By the growth of straight wire arrays in each direction, the growth mode, conditions and mechanism were investigated. The wire width was shown to be determined for both directions by the facet boundary planes resulting from the growth rate difference on different facets. By optimizing growth conditions, highly uniform and smoothly connected hexagonal nano-wire networks with a density of 3×10⁸ cm⁻² were successfully formed.     

α-Sn thin film grown on GaAs substrate by MBE and investigation of its multiquantum well structure

α-Sn thin films have been grown on GaAs (001) single crystal substrates by molecular beam epitaxy (MBE). The α-Sn growth process has been characterizedin situ by reflection high energy electron diffraction (RHEED), and the transmission electron microscope (TEM) was used to analyze the interface structures. The measurement results indicate that our metastable a-Sn films have both higher temperature stability which increases by 30°C (from 70 to 100°C) and thickness stability which increases by 200 nm (from 500 to 700 nm) in comparison with previous reports. Other improvements in electrical properties have also been observed. In addition, a new model of multiquantum well structure has been suggested. Project supported by the National Natural Science Foundation of China (Grant No. 69586001).     

GS-MBE生长的GaP/Si的XPS研究

利用X射线光电子能谱(XPS)深度剖析方法对气体源分子束外延(GS-MBE)生长的GaP/Si异质结构进行了详细的分析.其结果表明:(1)外延层内Ga、P光电子峰与GaP相相符,且组份分布均匀,为正化学比GaP.(2)在不同富PH₃流量条件下生长的样品,其表面富P量稍有不同,而GaP外延层内的测试结果相同.界面也未见有P的富集.(3)XPS剖析至GaP/Si界面附近,随外延层界面向衬底过渡,Si2p光电子峰向高结合能方向移动,且其结合能高于原衬底p型Si,接近于n型Si.但Ga、P光电子峰未发现有明显能移.(4)在XPS检测限内,外延层内和界面都未见有C、O等沾污.这一研究表明:无污染的本底超高真空、相对过剩的富₃生长环境、成功的Si衬底清洗方法等措施保证了GS-MBE生长出正化学比GaP/Si外延异质结构.     

Nanoscale patterning using nanochannel glass replica films

Nanochannel glass replica films have been used as masks for thein-situparallel patterning of GaAs/AlGaAs single quantum wells during growth by MBE. Quantum well pyramids with lateral dimensions as small as 500 nm exhibit low temperature (5 K) photoluminescence associated with the 50 Å well thickness of the structure. By control of the replica membrane properties and deposition conditions, we demonstrate that it may be possible to reduce the lateral dimensions of layered structures beyond what would normally be expected from the starting apertures.     

Growth of Ge islands on prepatterned Si (0 0 1) substrates

We report on the growth and properties of Ge islands grown on (0 0 1) Si substrates with lithographically defined two-dimensionally periodic pits. After thermal desorption and a subsequent Si buffer layer growth these pits have an inverted truncated pyramid shape. We observe that on such prepatterned substrates lens-like Ge-rich islands grow at the pit bottoms with less Ge deposition than necessary for island formation on flat substrates. This is attributed to the aggregation of Ge at the bottom of the pits, due to Ge migration from the pit sidewalls. At the later stages of growth, dome-like islands with dominant {1,1,3} or {15,3,23}, or other high-index facets [i.e. {15,3,20} facets] are formed on the patterned substrates as shown by surface orientation maps using atomic force microscopy. Furthermore, larger coherent islands can be grown on patterned substrates as compared to Ge deposition on flat ones.