离子束刻蚀技术研究

本文介绍了离子束刻蚀技术的原理,讨论了刻蚀速率与离子束流密度、离子能量和离子束入射角度的关系。实验结果与理论分析有较好的一致性。     

Multi‐crystalline silicon solar cells with metal‐assisted nano‐texturing using HNO3 as hole injection agent

In this study, metal‐assisted etching (MAE) with nitric acid (HNO₃) as a hole injecting agent has been employed to texture multi‐crystalline silicon wafers. It was previously proven that addition of HNO₃ enabled control of surface texturing so as to form nano‐cone shaped structures rather than nanowires. The process parameters optimized for optically efficient texturing have been applied to multi‐crystalline wafers. Fabrication of p‐type Al:BSF cells have been carried out on textured samples with thermal SiO₂/PECVD‐SiN_x stack passivation and screen printed metallization. Firing process has been optimized in order to obtain the best contact formation. Finally, j_sc enhancement of 0.9 mA/cm² and 0.6% absolute increase in the efficiency have been achieved. This proves that the optimized MAE texture process can be successfully used in multi‐crystalline wafer texturing with standard passivation methods.

J –V curves and SEM images of the nano and iso‐textured samples. j_sc enhancement of 0.9 mA/cm² together with 0.6% absolute efficiency gain was observed on nano‐textured samples.     

Laser-induced damage of Ta2O5/SiO2 narrow-band interference filters under different 1064 nm Nd:YAG laser modes

The laser-induced damage (LID) behavior of narrow-band interference filters was investigated with a Nd:YAG laser at 1064 nm under single-pulse mode and free-running mode. The absorption measurement of such coatings was performed with surface thermal lensing (STL) technique. The damage morphologies under the two different laser modes were also studied in detail. It was found that all the filters exhibited a pass-band-center-dependent absorption and laser-induced damage threshold (LIDT) behavior, but the damage morphologies were diverse. The explanation was given with the analysis of the electric field distribution and the operational behavior of the irradiation laser.     

使用多光谱手段研究熔石英断裂机理

熔石英玻璃是高能激光系统中不可缺少的光学材料,其损伤问题一直是限制系统能量提升的瓶颈之一。通过纳秒激光脉冲诱导熔石英玻璃样品产生断裂,并使用多光谱手段对断裂前后样品进行检测,从而在实验和理论上了解了样品断裂形貌及内部相变结构成因,并从宏观到微观上统一解释了断裂形貌和相变结构的关系。在激光等离子冲击波作用下,熔石英发生断裂,且冲击波作用过程中在玻璃内部产生了推动裂纹扩展的尖端环向应力。在尖端环向应力作用下,不同损伤区域形成了不同扩展速度和长度的裂纹, 按照裂纹形貌特性差异可以将断裂区分为雾化区、羽毛区、镜面区三个部分。使用透射光谱、能量散射光谱检测损伤前后样品,发现裂纹的产生引起了玻璃透过率和带隙的下降,且断裂区出现氧原子游离或缺失;使用Raman光谱检测样品损伤前后不同形貌区,发现等离子冲击波使熔石英中Si-O-Si键断裂并发生重组,导致镜面区、羽毛区、雾化区三元拓扑环和四元拓扑环宏观上对应的斯石英相和柯石英相的相对含量依次升高,破坏了材料的固有原子结构特性,使材料断裂区向高密度相转变。氧游离的发生会在玻璃内部产生的大量缺陷,从而使得玻璃透过率及带隙下降,严重影响了玻璃的性能。     

激光诱导击穿光谱脉冲激光功率锁定的研究

激光诱导击穿光谱(laser-induced breakdown spectroscopy,LIBS)在煤质在线监测方面展现了突出的应用前景和研究价值。针对该技术在实际应用中会由于脉冲激光功率起伏导致的长期测量稳定性差的问题,建立了闭环负反馈式脉冲激光功率锁定装置,采用激光功率负反馈信号控制和锁定Nd∶YAG激光器输出功率。实验研究了不同分光比例脉冲激光器锁定在设定输出功率,同一分光比例激光器锁定在不同输出功率以及长时间运行时的功率锁定。结果表明,不同的分光比例对激光输出功率的锁定效果影响不大,分光比例越小,稳定速度越快;同一分光比例实现激光脉冲功率不同预设值的锁定以及在长时间运行时,采用此装置进行功率锁定后,激光输出功率处于预设区间内,RSD值由自由运行时的2.4%降低至1.1%。     

Direct micropatterning of high dielectric BaTiO3 films by laser-induced pyrolysis with a nano-crystalline seeding technique

A direct patterning method of dielectric BaTiO₃ (BT) films is proposed, which applies laser-induced pyrolysis in combination with nano-crystalline seeding technique. A precursor solution of a BT complex alkoxide containing BT nano-crystalline particles with polyvinylpyrollidone (PVP) as dispersion stabilizer was spin-coated on Pt substrate. An Ar⁺ laser beam was focused and scanned on spin-coated BT films, which induced pyrolysis and crystallization of the films with spatial selectivity. Micropatterns were obtained by striping laser-unirradiated regions on the films with HCl aqueous solution. Raman spectra of the micropattern confirmed that the structures were tetragonal crystalline BT. Clear micropatterns with a line width of ca. 3 μm and an interval of 5 μm were formed at PVP concentrations of 25 and 50 kg/m³. The dielectric constant and dissipation factor of the film fabricated at a laser energy density of 27 MW/cm² and a scanning speed of 25 μm/s attained 76.2 and 0.07, respectively, for a measurement frequency of 100 kHz.     

GaAs pyramids on GaAs/AlAs Bragg reflectors as alternative microcavities

Pyramidal microcavities are a new class of optical resonators with potentially small mode volume and high quality factor. Our GaAs pyramids with embedded InGaAs quantum dots are placed on top of GaAs/AlAs distributed Bragg reflectors to increase the optical confinement at the base of the pyramids. The pyramidal shape is achieved by a wet-chemical etching process using an AlAs sacrificial layer. Temperature-dependent micro-photoluminescence measurements are used to verify optical modes.     

激光诱导击穿光谱对四种香的快速检测

激光诱导击穿光谱技术(laser-induced breakdown spectroscopy)作为一种极具前景的分析和测量技术应用日益广泛。对四种香(艾草香、藏香、檀香、沉香)样品进行了激光等离子体光谱测量和分析, 得到了样品中元素的成分;并且对四种香样品中的Cu,Mn,Ca和Fe四种金属元素典型谱线的强度进行了统计分析和元素含量的对比。基于等离子体的局域热动力学的平衡模型, 计算了Ca元素的等离子体温度。实验结果为采用激光诱导击穿光谱对香品成分进行快速检测和分析的可行性提供了依据。     

不同气体环境下532nm激光诱导硅表面形貌的研究

研究了在不同气体环境下,利用532 nm Nd∶YAG纳秒脉冲激光累积辐照单晶硅表面形成的微结构,结果表明,在其他条件相同,背景气体不同的情况下,背景气体对硅表面形貌的形成起着重要的作用。具体分析了真空、N2和SF6 3种环境气氛下形成的微结构,结果显示,在SF6中形成的锥形微结构的数密度比在N2和真空中的大,并且锥形具有更大的纵横比;在N2、真空和SF6中形成的微结构尺寸依次减小。SF6气氛下,激光辅助化学刻蚀的效率比在真空和N2气氛中的高。另外,辐照区域边缘有波纹微结构形成,分析认为,该微结构的形成是由表面张力波的冷却导致的。     

多孔硅制备的二维光子晶体生长过程监控

采用单槽电化学腐蚀法在预置有倒金字塔结构的n型单晶硅上制备用于二维光子晶体的多孔硅。利用基于LabVIEW的虚拟仪器技术对实验仪器编程,搭建实时测控系统,实现对反应过程中所需电源的控制,并且实时显示采集到的随时间变化的电压和电流信号,将采集的数据存储在计算机里。实验表明,恒电流供电模式下致使电压剧烈变动,导致多孔硅侧向...