The use of “actinometer” gases in optical diagnostics of plasma etching mixtures: SF6-O2

The spectroscopic emission intensities from excited F atoms in SF₆-O₂ discharges at 1 torr have been correlated to the densities of atoms in their ground electronic state by measuring the excitation efficiencies of the electrons in the energy range 11 to 17 eV with a method which essentially consists in the analysis of the emission of Ar or N₂, added as actinometer gases to the discharge mixtures. The general applicability of the method has been tested by a direct titration of F atoms with chlorine. The spectroscopic analysis has allowed the determination of useful information on the trends of both the electron densities and their energies as a function of the oxygen percent in the feed.     

Laser-induced fluorescence microscopic system using an optical parametric oscillator for tunable detection in microchip analysis

A laser-induced fluorescence microscopic system based on optical parametric oscillation has been constructed as a tunable detector for microchip analysis. The detection limit of sulforhodamine B (Ex. 520 nm, Em. 570 nm) was 0.2 mol, which was approximately eight orders of magnitude better than with a conventional fluorophotometer. The system was applied to the determination of fluorescence-labeled DNA (Ex. 494 nm, Em. 519 nm) in a microchannel and the detection limit reached a single molecule. These results showed the feasibility of this system as a highly sensitive and tunable fluorescence detector for microchip analysis.     

Determination of aluminum in serum by capillary zone electrophoresis with laser-induced fluorescence detection

Summary A novel method of separating and detecting trace aluminum by capillary zone electrophoresis is described. Aluminum is reacted with lumogallion [4-chloro-3-(2,4-dihydroxyphenylazo)-2-hydroxybenzen-1-sulphonic acid] so that the complex can be selectively and sensitively detected by a laser-induced fluorescence detector after capillary electrophoretic separation. Using the proposed method, limits of detection in the sub parts per billion range are achieved. The technique is applied to the determination of aluminum in human serum.     

激光诱导荧光光谱分析法研究 Ⅳ.钐-三氟乙酰丙酮-三正辛基膦化氧-浓乳-100的荧光特性研究及应用

采用激光诱导荧光光谱测定装置研究了Sm-三氟乙酰丙酮(TFA)-三正辛基膦化氧(TOPO)体系的激光诱导发光特性和发光机理。根据配合物体系中各组份的光谱特性和光谱能级,提出Sm-TFA-TOPO体系的能量传递机制。拟定了在农乳-100存在下,TFA-TOPO体系测定痕量钐的激光诱导荧光光谱分析新方法。不经分离,用于氧化钇和合成水样中痕量钐的测定,操作简便、快速,结果令人满意     

Role of Hydrodynamic Conditions in the Distribution of Anodic Dissolution Rates in Cavity Etching Regions during Electrochemical Micromachining of Partially Insulated Surfaces

Experimental study of the distribution of local rates of electrochemical micromachining in the presence of photoresist masks in various hydrodynamic conditions (macroscopically nonuniform rotating disk electrode, sprayer flow, an electrode placed into a cell with chaotic bulk electrolyte mixing) shows that the maximum etching localization is achieved at the control of the dissolution rate by the mass transport rate (at achieving the anodic limiting current). The localization enhancement as compared to the primary current distribution takes place in the case of a turbulent flow at hydrodynamic conditions where the removal of dissolution products from the undercutting region is hindered. These conditions (electrochemical reaction limited by the ion mass transport rate, high resistance to the mass transport in the undercutting region) are necessary for the localization enhancement using a pulsed anodic–cathodic treatment.     

Application of capillary electrophoretic immunoassay to analysis of estradiol in women's serum

Summary A rapid and sensitive capillary electrophoretic immunoassay is described for determination of estradiol in women's serum. Addition of thermally reversible hydrogel in the buffer, serving as a replaceable packing material, improved the reproducibility of the method. Using a laser-induced fluorescence detector this method can be applied to the determination of estradiol at concentrations as low as 30.6 pg mL¹. Estradiol levels in 16 normal women's serum were measured at the range 115≈370 pg mL¹. The results of this method have been found to correlate well with those of chemiluminescent immunoassay.     

Investigation of helium addition for laser-induced plasma spectroscopy of pure gas phase systems: Analyte interactions and signal enhancement

The role of helium addition on the analyte signal enhancement in laser-induced breakdown spectroscopy for analysis of pure gaseous systems was examined using carbon and hydrogen atomic emission lines. Increased analyte response, as measured by peak-to-base and signal-to-noise ratios, was observed with increasing helium addition, with maximum enhancement approaching a factor of 7. Additional measurements revealed a significant decrease in plasma electron density with increasing helium addition. To explore the mechanisms of analyte signal enhancement, the helium emission lines were also examined and found to be effectively quenched with nitrogen addition. In consideration of the data, it is concluded that the role of metastable helium is not as important as the overall changes in plasma properties, namely electron density and laser-plasma coupling. Helium addition is concluded to affect the electron density via Penning ionization, as well as to play a role in the initial plasma breakdown processes.     

Analysis of powdered tungsten carbide hard-metal precursors and cemented compact tungsten carbides using laser-induced breakdown spectroscopy

Laser-induced breakdown spectroscopy (LIBS) has been applied to the direct analysis of powdered tungsten carbide hard-metal precursors and cemented tungsten carbides. The aim of this work was to examine the possibility of quantitative determination of the niobium, titanium, tantalum and cobalt. The investigated samples were in the form of pellets, pressed with and without binder (powdered silver) and in the form of cemented tungsten carbides. The pellets were prepared by pressing the powdered material in a hydraulic press. Cemented tungsten carbides were embedded in resin for easier manipulation.

Several lasers and detection systems were utilized. The Nd:YAG laser working at a basic wavelength of 1064 nm and fourth-harmonic frequency of 266 nm with a gated photomultiplier or ICCD detector HORIBA JY was used for the determination of niobium which was chosen as a model element. Different types of surrounding gases (air, He, Ar) were investigated for analysis. The ICCD detector DICAM PRO with Mechelle 7500 spectrometer with ArF laser (193 nm) and KrF laser (248 nm) were employed for the determination of niobium, titanium, tantalum and cobalt in samples under air atmosphere. Good calibration curves were obtained for Nb, Ti, and Ta (coefficients of determination r² > 0.96). Acceptable calibration curves were acquired for the determination of cobalt (coefficient of determination r² = 0.7994) but only for the cemented samples. In the case of powdered carbide precursors, the calibration for cobalt was found to be problematic.     

Mechanism of silicon film deposition in the RF plasma reduction of silicon tetrachloride

Plasma-chemical reduction of SiCl₄ in mixtures with H₂ and Ar has been studied by optical emission spectroscopy (OES) and laser interferometry techniques. It has been found that the Ar:H₂ ratio strongly affects the plasma composition as well as the deposition (r _D) and etch (r _E) rates of Si: H, Cl films and that the electron impact dissociation is the most important channel for the production of SiCl_x species, which are the precursors of the film growth. Chemisorption of SiCl_x and the reactive surface reaction SiCl_x+H–SiCl_(x–1)0+HCl are important steps in the deposition process. The suggested deposition model givesr _D [SiCl_x][H], in agreement with the experimental data. Etching of Si: H, Cl films occurs at high Ar: H₂ ratio when Cl atoms in the gas phase become appreciable and increases with increasing Cl concentration. The etch rate is controlled by the Cl atom chemisorption step.     

Coelectroosmotic capillary electrophoresis of phenolic acids and derivatized amino acids using N,N-dimethylacrylamide-ethylpyrrolidine methacrylate physically coated capillaries

Two different families of compounds, i.e., phenolic and amino acids have been separated by capillary electrophoresis using a physically adsorbed polymer as capillary coating. The polymer used was N,N-dimethylacrylamide-ethylpyrrolidine methacrylate (DMA-EpyM) and it provided an stable coating by only flushing the capillary with a DMA-EpyM aqueous solution for 2 min between runs. The usefulness of this procedure has been demonstrated through the fast analysis of different families of solutes. Two different detection systems, diode-array detector and laser-induced fluorescence, have been used to determine phenolic acids and derivatized amino acids with fluorescein isothiocyanate, respectively. The main factors affecting reversal of electroosmotic flow (EOF) such as pH, type and concentration of buffer, and concentration and influence of organic solvents, as well as all the instrumental conditions were studied and optimized for both families of compounds.