A Simplified Model for the Etch Rate of Novolac-Based Photoresist

The novolac-based resins used as positive-tone photoresists are frequently etched in an oxygen plasma. It is desirable to have a predictive model of the photoresist etch rate but, for process improvement, control, and analysis, the development of a rigorous mechanistic model is impractical. Instead, a simplified mechanistic model is derived, here, according to the method proposed by Hougen and Watson for the study of fluid–solid interactions. This model derivation method is employed in order to arrive at a functional form that represents chemical etching of the resist by oxygen radicals, assisted by the plasma ion flux. Values for model parameters are determined from process data by nonlinear regression. The quality of the model fit to the data is tested statistically.     

奇异非线性二阶三点边值问题正解的存在唯一性

本文研究了一类奇异非线性二阶三点边值问题，通过摄动技巧和比较原理获得了所论问题正解的存在唯一性。     

STURM COMPARISON THEOREM OF SOLUTION FOR SECOND ORDER NONLINEAR DIFFERENTIAL EQUATIONS

In this paper, we establish some differential identities and obtain some Sturm comparison theorems for the second order nonlinear differential equation by using them.and generalize some classicial Sturm comparison theorems.     

On performance comparison of MR/GI/1 queues

In this paper we are interested in the effect that dependencies in the arrival process to a queue have on queueing properties such as mean queue length and mean waiting time. We start with a review of the well known relations used to compare random variables and random vectors, e.g., stochastic orderings, stochastic increasing convexity, and strong stochastic increasing concavity. These relations and others are used to compare interarrival times in Markov renewal processes first in the case where the interarrival time distributions depend only on the current state in the underlying Markov chain and then in the general case where these interarrivai times depend on both the current state and the next state in that chain. These results are used to study a problem previously considered by Patuwo et al. [14].Then, in order to keep the marginal distributions of the interarrivai times constant, we build a particular transition matrix for the underlying Markov chain depending on a single parameter,p. This Markov renewal process is used in the Patuwo et al. [14] problem so as to investigate the behavior of the mean queue length and mean waiting time on a correlation measure depending only onp. As constructed, the interarrival time distributions do not depend onp so that the effects we find depend only on correlation in the arrival process.As a result of this latter construction, we find that the mean queue length is always larger in the case where correlations are non-zero than they are in the more usual case of renewal arrivals (i.e., where the correlations are zero). The implications of our results are clear.     

On streamline diffusion arising in Galerkin FEM with predictor/multi‐corrector time integration

In the present paper, the author shows that the predictor/multi‐corrector (PMC) time integration for the advection–diffusion equations induces numerical diffusivity acting only in the streamline direction, even though the equations are spatially discretized by the conventional Galerkin finite element method (GFEM). The transient 2‐D and 3‐D advection problems are solved with the PMC scheme using both the GFEM and the streamline upwind/Petrov Galerkin (SUPG) as the spatial discretization methods for comparison. The solutions of the SUPG‐PMC turned out to be overly diffusive due to the additional PMC streamline diffusion, while the solutions of the GFEM‐PMC were comparatively accurate without significant damping and phase error. A similar tendency was seen also in the quasi‐steady solutions to the incompressible viscous flow problems: 2‐D driven cavity flow and natural convection in a square cavity. Copyright © 2002 John Wiley & Sons, Ltd.     

Exact L 2 Small Balls of Gaussian Processes

We prove a comparison theorem extending Li(6) and develop a complex-analytic approach to treat L ² small ball probabilities of Gaussian processes. We demonstrate the techniques for the m-times integrated Brownian motions and in examples where one can not apply Li comparison theorem.     

PARTICIPATION IN INTERNATIONAL ENVIRONMENTAL AGREEMENTS: THE ROLE OF TIMING AND REGULATION

ABSTRACT. We analyze the formation of self‐enforcing international environmental agreements under the assumption that countries announce their participation either simultaneously or sequentially. It is shown that a sequential formation process opens up possibilities for strategic behavior of countries that may lead to inferior outcomes in terms of global abatement and welfare. We then analyze whether and under which conditions a regulator like an international organization, even without enforcement power, can improve upon globally suboptimal outcomes through coordination and moderation, given that recommendations must be Pareto‐improving to all parties.     

PERIODIC BOUNDARY VALUE PROBLEMS FOR FIRST ORDER FUNCTIONAL DIFFERENTIAL EQUATIONS

In this paper, we investigate the periodic boundary value problems for nonlinear first order functional differential equations. By establishing a new comparison result, criteria on the existence of maximal and minimal solutions are obtained.     

Cavitated bifurcation for composed compressible hyper-elastic materials

The cavitated bifurcation problem in a solid sphere composed of two compressible hyper-elastic materials is examined. The bifurcation solution for the composed sphere under a uniform radial tensile boundary dead-load is obtained. The bifurcation curves and the stress contributions subsequent to the cavitation are given. The right and left bifurcation as well as the catastrophe and concentration of stresses are analyzed. The stability of solutions is discussed through an energy comparison. Project supported by the National Natural Science Foundation of China (No. 19802012).     

Development of standards for reliable surface analyses by ISO technical committee 201 on surface chemical analysis

The need for reliable surface analyses together with quality‐management requirements for analytical laboratories led the International Organization for Standardization (ISO) to form its Technical Committee (TC) 201 on Surface Chemical Analysis in 1991. This article describes the organization of TC 201, the strategies that have been found useful for identifying and assessing possible projects for new international standards, and the 57 international standards and other documents prepared to date by TC 201. Standards have now been developed for Auger‐electron spectroscopy, glow‐discharge spectroscopy, various types of scanning probe microscopy, secondary‐ion mass spectrometry, sputter‐depth profiling, total‐reflection X‐ray fluorescence spectroscopy, X‐ray photoelectron spectroscopy, and X‐ray reflectometry. In addition, standards have been developed with definitions of terms used in surface chemical analysis; the handling, preparation of specimens for surface analysis; information and data‐transfer formats; and methods for determining the lateral resolution of beam‐based methods of surface analysis. Copyright © 2014 John Wiley & Sons, Ltd.