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61.
建立一个描述低能电子在多元多层介质中散射的物理模型,运用MonteCarlo方法模拟低能电子在靶体胶衬底中的复杂散射过程,在此基础上通过大量计算研究入射束能、胶层厚度、衬底材料等不同曝光条件对抗蚀剂沉积能密度分布的影响,获得沉积能分布规律:适量的低束能、薄胶层、低原子序数衬底可以使前散射电子对胶中沉积能密度分布的贡献增大、背散射电子的贡献减小,从而提高曝光分辨率.
关键词:
电子束曝光
MonteCarlo方法
低能电子散射
能量沉积 相似文献
62.
63.
W. Gao M. Li R. Klie E.I. Altman 《Journal of Electron Spectroscopy and Related Phenomena》2006,150(2-3):136-149
Oxide catalysts are frequently used to convert toxic species to environmentally benign molecules, and to prevent the formation of toxic species in the first place. In this paper, growth and characterization of model oxide systems employed in both approaches is discussed. An example of the former approach is the selective catalytic reduction (SCR) of NO emitted from power plants by NH3, which employs tungsten and vanadium oxides supported on the anatase polymorph of TiO2. To model SCR catalysts, epitaxial titanium, vanadium and tungsten oxide films were grown using molecular beam epitaxy and magnetron sputtering. Two different anatase orientations were grown on LaAlO3 substrates and their interactions with vanadia were characterized. On LaAlO3 (0 0 1), anatase exposed a (4 × 1) reconstructed (0 0 1) surface. Vanadia lifted the reconstruction and at 1 ML a (1 × 1) surface with mostly V5+ was observed. Continued V2O5 growth led to loss of order, but at high temperatures epitaxial VO2 could be grown; vanadia behaved similarly on anatase films on LaAlO3 (1 1 0). Results suggested that the monolayer is pseudomorphic with O adsorption oxidizing the surface V to 5+, since the anatase structure cannot accommodate more bulk oxygen, only a monolayer can be pseudomorphic and have only V5+. Thus the vanadia monolayer has unique structural and chemical properties that can help explain why vanadia monolayers on TiO2 are much more active than bulk V2O5. For WO3, a series of added row reconstructions were observed as the epitaxial films were reduced. The effect of these structures on surface chemistry was characterized by studying 1-propanol adsorption. The results indicated that the structure of the WO3 surface did not alter its catalytic function but had a strong effect on reaction kinetics. As an example of a system where catalysts prevent the formation of toxic species, the reactivity of oxidized Pd surfaces used in CH4 catalytic combustion were studied. An ordered PdO-like monolayer was found to be less reactive towards CO than adsorbed O on Pd. On the other hand, the PdO layer favored a lower activation energy C3H6 oxidation pathway. The results indicated that Pd oxidation reduces the sticking coefficient of reactive species but once molecules adsorb, the oxide surface can reduce the activation energy for subsequent reaction. 相似文献
64.
Fengfu Fu Liangjun Xu Wei Ye Yiquan Chen Mingyu Jiang Xueqin Xu 《中国颗粒学报》2006,4(6):323-326
Different-sized aerosols were collected by an Andersen air sampler to observe the detailed morphology of the black carbon (BC) aerosols which were separated chemically from the other accompanying aerosols, using a Scanning Electron Microscope equipped with an Energy Dispersive X-ray Spectrometer (SEM-EDX). The results indicate that most BC aerosols are spherical particles of about 50 nm in diameter and with a homogeneous surface. Results also show that these particles aggregate with other aerosols or with themselves to form larger agglomerates in the micrometer range. The shape of these 50-nm BC spherical particles was found to be very similar to that of BC particles released from petroleum-powered vehicular internal combustion engines. These spherical BC particles were shown to be different from the previously reported fullerenes found using Matrix-Assisted Laser Desorption/Ionization Time-Of-Flight Mass Spectrometry (MALDI-TOF-MS). 相似文献
65.
Optical trapping forces of polystyrene microspheres are analyzed both theoretically and experimentally, and comparisons are
made between the two. Discrepancies are mainly caused by straight-ray approximation for axial trapping, and by trapping-position
vertical displacement due to gravity for transverse trapping. 相似文献
66.
讨论了尘埃粒子解的时空结构及其性质,导出了尘埃粒子的内空间的离散结构.证明了尘埃粒子内部的物质球是一个无坐标的平直球,因而具有最小的体积和整体的关联性.导出了在尘埃粒子的内外时空中的径向测地线并说明其连续性.阐述了由这个解所揭示的物质、引力与时空之间的内在联系.
关键词:
尘埃粒子
离散时空
测地线 相似文献
67.
Electron beam processing of poly(ethylene terephthalate) (PET) films is found to promote significant changes in the melting heat, intrinsic viscosity and polymer film-liquid (water, isooctane and toluene) boundary surface tension. These properties are featured with several maximums depending on the absorbed dose and correlating with the modification of PET surface functionality. Studies using adsorption of acid-base indicators and IR-spectroscopy revealed that the increase of PET surface hydrophilicity is determined by the oxidation of methylene and methyne groups. Electron beam treatment of PET films on the surface of N-vinylpyrrolidone aqueous solution provided graft copolymerization with this comonomer at optimum process parameters (energy 700 keV, current 1 mA, absorbed dose 50 kGy). 相似文献
68.
超子中子星性质的温度效应 总被引:2,自引:0,他引:2
从相对论平均场理论出发,考虑核子、超子和介子的相互作用,研究了温度对中子星组成粒子、状态方程和中子星质量等的影响.发现温度越高,超子在中子星内部出现时的重子数密度越低.当密度较高时,中子星的核心区主要由超子组成,即中子星转变成以奇异粒子为主要成分的超子星,并且这种转变受到温度的影响,温度越高,转变密度越低.由于超子的出现,中子星核心高密度区域的状态方程,对于不同温度,差别不大,所以有限温度中子星的最大质量都在1.8M⊙附近.这与观测结果相符. 相似文献
69.
70.
Models, describing relativistic particles, where Lagrangian densities depend linearly on both the curvature and the torsion of the trajectories, are revisited in D=3 space forms. The moduli spaces of trajectories are completely and explicitly determined using the Lancret program. The moduli subspaces of closed solitons in the three sphere are also determined. 相似文献