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X-ray reflectivity (XRR), X-ray fluorescence (XRF) and small angle X-ray scattering (SAXS) techniques are used to the monitoring of Cu/porous low κ processes, which are developed for the next generation (≤65 nm) integrated circuits. Sensitivity of XRR and XRF is sufficient to detect drifts of the copper barrier layer, copper seed layer and Cu CMP (chemical-mechanical polishing) processes. Their metrology key parameters comply with production requirements. SAXS allows determining the pore structure of low κ films: average pore size and pore size distribution. 相似文献
14.
Highly ordered composite nanowires with multilayer Ni/Cu and NiFe/Cu have been fabricated by pulsed electrodeposition into
nanoporous alumina membrane. The diameter of wires can be easily varied by pore size of alumina, ranging from 30 to 100 nm.
The applied potential and the duration of each potential square pulse determine the thickness of the metal layers. The nanowires
have been characterized by transmission electron microscopy (TEM), magnetic force microscopy (MFM), and vibrating sample magnetometer
(VSM) measurements. The MFM images indicate that every ferromagnetic layer separated by Cu layer was present as single isolated
domain-like magnet. This technique has potential use in the measurement and application of magnetic nanodevices. 相似文献
15.
LiNbO3∶Cr∶Cu晶体吸收特性及非挥发全息存储研究 总被引:1,自引:1,他引:0
研究了LiNbO3∶Cr∶Cu晶体的吸收特性,发现LiNbO3∶Cr∶Cu(含0.14 wt.% Cr2O3 和 0.011 wt.% CuO)晶体存在两个明显的吸收峰,中心波长分别位于480 nm和660 nm; 随着Cr的含量逐渐减小,Cu的含量逐渐增大,短波段不存在明显吸收峰,掺Cr的含量越大,中心波长在660 nm处的吸收越大;633 nm红光虽然位于中心波长为660 nm的吸收峰内,但它无助于光折变过程.分别采用390 nm紫外光和488 nm蓝光作为敏化光,514 nm绿光作为记录光的记录方案,实现了非挥发全息记录,掺入适量的Cr( 比如NCr=2.795×1025 m-3,NCr/ NCu=1)有助于全息记录性能的提高. 相似文献
16.
Jian-Min Zhang Xiang-Lei Song Ke-Wei Xu 《Journal of Physics and Chemistry of Solids》2006,67(4):714-719
The structures and energies of formation and migration of the mono- and di-vacancy in Cu crystal have been described and calculated with modified analytical embedded atom method (MAEAM). The lattice relaxation is considered with molecular dynamics (MD) method at T=0 K. The results show the FN di-vacancy is the most stable and likely occurs in practice from the energy minimization. Compared with the mono-vacancy, the formation energy of the FN di-vacancy is higher than that of a mono-vacancy, but lower than that of two isolated mono-vacancy. The preferred migration mechanism of the FN di-vacancy is multi-jump of either vacancy (rotating the di-vacancy). The calculated migration energy of the FN di-vacancy is lower than that of a mono-vacancy, so the FN di-vacancy is easier to migrate. All of the calculated results are in good agreement with the experimental values. 相似文献
17.
Wieczorek-Ciurowa K. Gamrat K. Paryło M. Shirokov Ju. G. 《Journal of Thermal Analysis and Calorimetry》2002,70(1):165-172
The physical mixtures of hydroxocarbonates of Cu and Ni with aluminium were activated using a laboratory planetary mill. The
chemical reactions and alloy formations as the effects of grinding were followed by the phase analysis of solid products based
on the thermogravimetry and X-ray diffractometry. Experimental evidence indicates that the nature of reactions and products
of mechanical activation was dependent on the amount of aluminium and time of grinding.
This revised version was published online in July 2006 with corrections to the Cover Date. 相似文献
18.
铜、锌在5-Br-PADAP和表面活性剂体系中的分光光度法同时测定 总被引:1,自引:0,他引:1
5一Br—PADAP在阳离子表面活性剂溴代十六烷基三甲胺存在下同时测定Cu^2 和Zn^2 ,找出最佳实验条件,对水和血清测定结果令人满意. 相似文献
19.
The optical nonlinearities of Cu(mpo)2 [formula = C10H8N2CuO2S2] complex have firstly been investigated by using the Z-scan technique with a nanosecond-pulsed Nd:YAG laser at its second harmonic (532 nm) radiation. The nonlinear optical absorption and refraction coefficients of Cu(mpo)2 have been measured with the different on-axial peak irradiances I
0 at the waist ranging from 0.48 to 5.66 GW/cm2. The nonlinear transmittance characteristics exhibit the near resonant two-photon absorption (TPA) at 532 nm and are explained by a population redistribution model. The nonlinear absorption originates from the near resonant TPA while the mechanism of the nonlinear refraction is the near resonant TPA transition enhancement. The linear increasing dependences of the optical nonlinearities on the incident irradiance arise from the population redistribution due to the near resonant TPA. 相似文献
20.
A molecular dynamics method has been used to simulate the argon ion-assisted deposition of Cu/Co/Cu multilayers and to explore ion beam assistance strategies that can be used during or after the growth of each layer to control interfacial structures. A low-argon ion energy of 5–10 eV was found to minimize a combination of interfacial roughness and interlayer mixing (alloying) during the ion-assisted deposition of multilayers. However, complete flattening with simultaneous ion assistance could not be achieved without some mixing between the layers when a constant ion energy approach was used. It was found that multilayers with lower interfacial roughness and intermixing could be grown either by modulating the ion energy during the growth of each metal layer or by utilizing ion assistance only after the completion of each layers deposition. In these latter approaches, relatively high-energy ions could be used since the interface is buried and less susceptible to intermixing. The interlayer mixing dependence upon the thickness of the over layer has been determined as a function of ion energy. 相似文献