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81.
Temperature effects on deposition rate of silicon nitride films were characterized by building a neural network prediction model. The silicon nitride films were deposited by using a plasma enhanced chemical vapor deposition system and process parameter effects were systematically characterized by 26−1 fractional factorial experiment. The process parameters involved include a radio frequency power, pressure, temperature, SiH4, N2, and NH3 flow rates. The prediction performance of generalized regression neural network was drastically improved by optimizing multi-valued training factors using a genetic algorithm. Several 3D plots were generated to investigate parameter effects at various temperatures. Predicted variations were experimentally validated. The temperature effect on the deposition rate was a complex function of parameters but N2 flow rate. Larger decreases in the deposition rate with the temperature were only noticed at lower SiH4 (or higher NH3) flow rates. Typical effects of SiH4 or NH3 flow rate were only observed at higher or lower temperatures. A comparison with the refractive index model facilitated a selective choice of either SiH4 or NH3 for process optimization. 相似文献
82.
Jian‐guo Tang 《Mathematical Methods in the Applied Sciences》2006,29(11):1327-1338
An implicit iterative method is applied to solving linear ill‐posed problems with perturbed operators. It is proved that the optimal convergence rate can be obtained after choosing suitable number of iterations. A generalized Morozov's discrepancy principle is proposed for the problems, and then the optimal convergence rate can also be obtained by an a posteriori strategy. The convergence results show that the algorithm is a robust regularization method. Copyright © 2006 John Wiley & Sons, Ltd. 相似文献
83.
This paper presents results of studies on dc electrical conductivity and transference number measurements on potassium bromate
(KBrO3) complexed polyvinyl chloride (PVC) films prepared by solution cast technique. Temperature dependence of dc electrical conductivity
and transference number data indicated the dominance of ion type charge transport in these specimens. The magnitude of conductivity
increased with increase in concentration of the salt and temperature. Using this (PVC + KBrO3) electrolyte, solid-state electrochemical cells were fabricated, and their discharge profiles were studied under a constant
load of 100 kΩ. Several cell profiles such as open circuit voltage, short circuit current, power density, and energy density
associated with these cells were evaluated and were reported. The features of complexation of the electrolytes were studied
by X-ray diffraction and Fourier transform infrared spectroscopy.
Paper presented at the Third International Conference on Ionic Devices (ICID 2006), Chennai, Tamilnadu, India, Dec. 7–9, 2006 相似文献
84.
对ALICE实验光子谱仪的触发选判机制进行了模拟研究, 内容包括: 1) 对光子谱仪的能量重建性能进行了研究, 通过计算机模拟检验光子谱仪探测器对大横动量范围的入射粒子的能量重建性能; 2) 对光子谱仪探测器的事件触发效率进行了研究, 通过计算机模拟分析触发阈值的选取并计算触发效率; 3) 对光子谱仪探测器的事件触发频率进行了研究, 通过计算机模拟对p-p和Pb-Pb两种碰撞模式下的触发频率分别进行了估算和讨论. 相似文献
85.
A. A. Maleev 《Computational Mathematics and Mathematical Physics》2006,46(12):2031-2039
Stationary and nonstationary Jacobi-like iterative processes for solving systems of linear algebraic equations are examined. For a system whose coefficient matrix A is an H-matrix, it is shown that the convergence rate of any Jacobi-like process is at least as high as that of the point Jacobi method as applied to a system with 〈A〉 as the coefficient matrix, where 〈A〉 is a comparison matrix of A. 相似文献
86.
Transition from chaotic to ordered state has been observed during the initial stage of a discharge in a cylindrical DC glow
discharge plasma. Initially it shows a chaotic behavior but increasing the discharge voltage changes the characteristics of
the discharge glow and shows a period subtraction of order 7 period → 5 period → 3 period → 1 period, i.e. the system goes
to single mode through odd cycle subtraction. On further increasing the discharge voltage, the system goes through period
doubling, like 1 period → 2 period → 4 period. On further increasing the voltage, the system goes to stable state through
two period subtraction, like 4 period → 2 period → stable. 相似文献
87.
利用关于乘积分布密度的相对熵和相对熵率的概念,建立了相依连续型随机变量序列关于参考微分熵的一类强偏差定理,证明中给出了将Laplace变换应用于微分熵强偏差定理的研究的一种途径. 相似文献
88.
李明融 《数学物理学报(B辑英文版)》2007,27(4):703-734
In this article the author works with the ordinary differential equation u" = |u|^p for some p 〉 0 and obtains some interesting phenomena concerning blow-up, blow-up rate, life-span, stability, instability, zeros and critical points of solutions to this equation. 相似文献
89.
热丝辅助裂解法是结合气相沉积制备聚对二甲苯薄膜和热丝化学气相沉积而形成的一种制-CH薄膜的新方法。热丝辅助裂解法的最大特点就是在保持低衬底温度情况下可以获得高沉积速率,而热丝加热电流对薄膜沉积速率和薄膜表面形貌具有重要影响。研究表明,热丝加热电流越大,薄膜沉积速率越高,在加热电流9A时,薄膜沉积速率可达0.002mm/min,同时薄膜表面粗糙度随之增加,薄膜表面也开始出现其它元素污染,因此,一般热丝加热电流选择为7A附近。 相似文献
90.
The vibronic spectra of charge transfer excitons (CTE) in a molecular one-component or alternatingly ordered two-component chain are treated in the framework of a dynamic approach (neglecting thermal excitations of the intramolecular vibrations). The model introduces two mechanisms of coupling between CTEs and vibrational quanta: (1) shift of the equilibrium positions of the nuclei in the ionized donor or acceptor; (2) change of the vibrational frequency in the ionized molecule. This model allows to generalize the simple CTE Hamiltonian and the vibronic Hamiltonian of Frenkel excitons. The linear optical susceptibility is calculated in the vibronic region (one CTE and one vibrational quantum). The double splitting of vibronics of CTEs was analyzed: (1) the splitting connected with the location of the intramolecular vibration on the donors or on the acceptors; (2) the splitting connected with the symmetry of the vibronic spectra (in the degenerate case). The general structure of the vibronic spectra of CTEs is established. It contains structureless absorption lines, which correspond to two-particle bands (the phonon is excited on a neutral molecule neighboring the donor or the acceptor) and Lorentz-type lines of one-particle states, which correspond to the bound propagation of the CTE and the phonon. 相似文献