水下应用的电容式微机械超声换能器阵列设计

为提高用于水下成像的电容式微机械超声换能器的指向性,文中用ANSYS力电耦合分析法设计了工作频率为400 k Hz的收发一体传感器的结构参数并完成了实验验证。同时研究了阵列设计方法,分析了电容式微机械超声换能器阵列各参数对指向性的影响,完成了从微小敏感单元到阵列的设计,实现了阵列指向性的优化设计。该阵列为16阵元的线阵,阵元间距为1.925 mm,阵元宽度为1.82 mm。进行了水下指向性测试,实验表明该线阵的-3 dB主瓣宽度为5?,最大旁瓣级为-13.5 dB,对称性好。该设计是实现较远距离的探测,提高成像分辨率的前提。     

射频容性耦合等离子体放电特性的光谱诊断

利用流体模型模拟和发射光谱实验诊断相结合的方法,研究了中等气压、中等功率下射频容性耦合等离子体的放电特性。理论上,采用基于流体模型的COMSOL软件仿真,建立一维等离子体放电模型,以Ar气为工作气体,研究了不同气压以及不同射频输入功率下等离子体电子温度和电子密度的分布规律。实验上,依据仿真模型设计制作了相同尺寸的密闭玻璃腔体和平板电极,采用13.56 MHz射频放电技术电离腔体内的工作气体Ar气,测量了不同气压、不同射频输入功率时放电等离子体的发射光谱。通过分析和选择适当的Ar Ⅰ和Ar Ⅱ的特征谱线,分别利用玻尔兹曼斜率法以及沙哈-玻尔兹曼方程计算了等离子体的电子温度与电子密度,并结合模拟仿真结果对光谱诊断结果进行了修正。结果表明：当气体压强为300~400 Pa、输入功率为600~800 W时,等离子体近似服从玻尔兹曼分布,此时利用光谱法得到的等离子体参数与仿真结果相符合。仿真模拟与光谱实验诊断相结合的方法可初步诊断出中等气压下等离子体的放电参数,增加了玻尔兹曼斜率法和沙哈-玻尔兹曼方程在等离子体放电中的使用范围,扩大了光谱法在低电子密度容性耦合等离子体参数诊断的应用场合,为中等气压容性耦合等离子体在工业与军事上的应用研究提供了重要物理状态的分析手段。     

Capacitive micromachined ultrasonic transducers using commercial multi-user MUMPs process: Capability and limitations

The objective of this work is to construct capacitive micromachined ultrasound transducers (cMUTs) using multi-user microelectromechanical systems (MEMS) processess (MUMPs) and to analyze the capability of this process relative to the customized processes commonly in use. The MUMPs process has the advantages of low cost and accessibility to general users since it is not necessary to have access to customized fabrication capability such as wafer-bonding and sacrificial release processes. While other researchers have reported fabricating cMUTs using the MUMPs process none has reported the limitations in the process that arise due to the use of standard design rules that place limitations on the material thicknesses, gap thicknesses, and materials that may be used. In this paper we explain these limitations, and analyze the capabilities using 1D modeling, Finite Element Analysis, and experimental devices. We show that one of the limitations is that collapse voltage and center frequency can not be controlled independently. However, center frequencies up to 9 MHz can be achieved with collapse voltages of less than 200 V making such devices suitable for medical and non-destructive evaluation imaging applications. Since the membrane and base electrodes are made of polysilicon, there is a larger series resistance than that resulting from processes that use metal electrodes. We show that the series resistance is not a significant problem. The conductive polysilicon can also destroy the cMUT if the top membrane is pulled in the bottom. As a solution we propose the application of an additional dielectric layer. Finally we demonstrate a device built with a novel beam construction that produces transmitted pressure pulse into air with 6% bandwidth and agrees reasonably well with the 1D model. We conclude that cMUTs made with MUMPs process have some limitations that are not present in customized processes. However, these limitations may be overcome with the proper design considerations that we have presented putting a low cost, highly accessible means of making cMUT devices into the hands of academic and industrial researchers.     

用于脉冲功率装置调试的高功率电阻分压器型负载

 介绍了电阻分压器型负载的结构、分压原理和设计方法,分析了高频作用下趋肤效应对负载阻值的影响,计算了负载和真空腔内的电场强度分布以及负载的等效电感和等效电容,利用Pspice程序模拟了回路参数对输出信号的影响。对负载的分压比进行了标定,标定结果为7.59×10^-5。为避免闪络现象的发生,设计加工接地金属套筒,用来降低负载阴极三结合点处的电场强度。负载工作电压幅值428 kV,电流幅值9.48 kA,工作阻抗45 Ω,电压和电流波形与设计值符合得较好,满足设计要求。     

纳秒脉冲电压的波形重建

 介绍了一种根据脉冲电压测量系统的输入输出波形对纳秒脉冲电压信号测量系统进行参数计算的方法和技术，该方法基于最优化原理，并将其应用于快脉冲电压波形的重建。重建的波形用电容分压器实测波形进行了检验，表明重建波形有比用积分器更好的效果。     

Capacitively decoupled tunable loop microstrip (TLM) array at 7 T

Microstrip transmission-line loop arrays have been recently proposed for parallel imaging at ultrahigh fields due to their advantages in element decoupling and to their increased coil quality factor. In the microstrip loop array design, interconnecting capacitors become necessary to further improve the decoupling between the adjacent elements when nonoverlapped loops are placed densely. However, at ultrahigh fields, the capacitance required for sufficient decoupling is very small. Hence, the isolations between the elements are usually not optimized and the array is extremely sensitive to the load. In this study, a theoretical model is developed to analyze the capacitive decoupling circuit. Then, a novel tunable loop microstrip (TLM) array that can accommodate capacitive decoupling more easily at ultrahigh fields is proposed. As an example, a four-element TLM array is constructed at 7 T. In this array, the decoupling capacitance is increased to a more reasonable value. Isolation between the adjacent elements is better than -37 dB with the load. The performance of this TLM array is also demonstrated by MRI experiments.     

磺化石墨烯/活性炭复合电极的制备及其不对称电容器脱盐

在还原剂NaBH₄存在下, 采用对氨基苯磺酸重氮盐与氧化石墨(GO)表面共价键合制备磺化石墨烯(GP-SO₃H). 傅里叶变换红外光谱(FTIR)证明磺酸基团在石墨烯表面接枝. 采用扫描电子显微镜(SEM)研究了磺化石墨烯的表面形貌. 以磺化石墨烯为添加剂, 制备了磺化石墨烯/活性炭(GP-SO₃H/AC)复合电极. 循环伏安及阻抗分析结果表明, 该复合电极的电容特性及导电性有明显改善. 以活性炭电极为对电极组装了不对称电容器(GP-SO₃H/AC|AC), 研究了该不对称电容器的电化学脱盐性能. 与对称电容器(AC|AC)相比, 不对称电容器中由于电极内磺酸基团对反离子的屏蔽作用, 电容器的电流效率达到89.4%以上, 脱盐量提高2.4倍, 单个循环脱盐量达到10.87 mg/g.     

薄层大面积自支撑碳纳米管电极材料的电容脱盐性能

以具有三维开放网络结构的烧结8 μm-Ni金属纤维(SMF-Ni)为基底, 通过乙烯催化化学气相沉积法在金属纤维表面生长碳纳米管(CNTs), 制备了以金属Ni纤维网络为集流极、CNTs为离子存储库, 尺度跨越宏观、介观和纳米的自支撑薄层大面积CNTs/SMF-Ni(CNTs质量分数为50%)复合电极材料. 用扫描电子显微镜(SEM)、透射电子显微镜(TEM)、傅里叶变换红外光谱(FTIR)、N₂吸附、脱附等温线和X射线衍射(XRD)等方法对电极材料进行了表征, 并考察了其作为电极对质量分数为0.01%的NaCl水溶液的电容脱盐性能. 自支撑CNTs/SMF-Ni复合电极材料由于具有优异的离子传导和表面电荷传递性能以及较大的介孔表面积, 在1.2 V的工作电压和5 mL/min的水溶液流速下, 对NaCl的电吸附容量和脱盐率分别达159 μmol/g CNTs和57%. 用H₂O₂对CNTs/SMF-Ni电极材料进行氧化处理后, CNTs表面含氧基团的大量增加增大了材料的亲水性, 从而进一步提升了该复合材料的电容脱盐性能.     

射频电感性耦合等离子体调谐基片自偏压特性

采用调节射频电感性耦合等离子体中基片电极与地之间的外部电路阻抗的方法,控制基片电极的射频自偏压。研究了调谐基片自偏压随外部调谐电容值的变化特征,得到了调谐基片射频自偏压随射频放电功率、气压的变化曲线。在一定放电参数区域内,调谐基片射频自偏压随调谐电容的变化曲线呈现跳变、双稳、迟滞现象。     

ICF中可调法布里-珀罗滤波器间距稳定度研究

 在神光Ⅱ第9路ICF高功率激光装置中,采用可调法布里-珀罗(F-P)滤波器对幅度调制效应进行补偿,根据补偿装置的技术要求,提出一种应用nm量级精度的电容式位移传感器对可调F-P滤波器间距稳定度进行监控的系统,详细论述了监控系统的结构与工作原理。给出了电容式位移传感器的驱动电路及数据处理与控制软件的设计方案,并对电容式位移传感器的精度进行了标定。实验结果表明,该位移监控系统能够使可调F-P滤波器的间距稳定度保持在15 nm/h以内,使幅度调制效应的调制深度优于4%。