193 nm深紫外光刻胶用成膜树脂的研究进展

本文综述了用于193 nm深紫外光刻胶的主体成膜树脂的种类及常用合成单体的研究进展,包括聚(甲基)丙烯酸酯体系、环烯烃-马来酸酐共聚物(COMA)体系、乙烯醚-马来酸酐共聚物(VEMA)体系、降冰片烯加成聚合物体系、环化聚合物体系、有机-无机杂化树脂体系以及光致产酸剂(PAG)接枝聚合物主链型等,并分析了目前关于曝光、分辨率和抗蚀刻性能方面存在的问题及未来的发展方向。     

大晶粒钛硅沸石TS-1晶貌的离子蚀刻改性

钛硅沸石 TS- 1 [1] 的微孔体系由同是十元氧环的直通道和“Z”字形通道相交而成 ,孔径 0 .5 1～ 0 .5 6nm,晶体结构与硅铝 ZSM- 5沸石的 MFI结构相同 .TS- 1能以稀双氧水为氧源 ,使烃类发生选择氧化 ,生成含氧化合物 [2～ 8] .并已在催化苯酚羟基化和环己酮氨氧化方面实现了工     

An Experimental Analysis of Residual Stress Measurements in Porous Silicon Using Micro-Raman Spectroscopy

Micro-Raman spectroscopy of porous silicon films of micrometre thickness and on silicon bulk substrates is carried out.The practical information is given for applications of stress measurements in the films which were obtained with electrochemical etching technique.Higher residual stress (reached GPa) in the etched area falls continuously through the transitional area to the un-etched area of the sample.However,the stress gradient is smaller in the etched or un-etched area and increases in the transitional area between the two areas.Using atomic force microscopy to investigate the surface appearance of porous silicon films,the micro-cavity structure is expected to relate to the distribution of residual stress.     

Fabrication of a Two-Dimensional Organic Photonic Crystal

A high-quality two-dimensional polystyrene photonic crystal is fabricated by the method of focused ion beam etching. The scanning electron microscopy (SEM) and the transmittance spectrum are used to characterize the properties of the photonic crystal. The measured transmittance spectrum is in agreement with the theoretical one. The influences of the disorders caused by the random perturbations in the diameter or the position of the air holes on the photonic band structure are analysed. It is found that the phtonic bandgap can tolerate less than 10% degree of disorder.     

用于近场集成光学头的面阵平面微透镜

讨论了采用常规的光刻热熔法及灰度掩模技术制作非梯度折射率型平面折射和平面衍射微透镜的情况。定性地分析了在不同的工艺条件下可能得到的平面端面微光学器件的种类和形貌特征。给出了在石英衬底表面通过光刻热熔工艺和氢离子束蚀刻所得到的球面及圆弧轮廓特征的凹形掩模的SEM照片 ,并对用于近场集成光学头的平面微透镜和半导体激光器的集成结构作了初步分析。利用这一技术所制成的平面折射微透镜可以很方便地与半导体光源等器件匹配耦合及集成固联