Effect of substrate temperature on microstructure and optical properties of single-phased Ag20 film deposited by using radio-frequency reactive magnetron sputtering method

Using a radio-frequency reactive magnetron sputtering technique, a series of the single-phased Ag20 films are deposited in a mixture of oxygen and argon gas with a flow ratio of 2：3 by changing substrate temperature （Ts）. Effects of the Ts on the microstructure and optical properties of the films are investigated by using X-ray diffractometry, scanning electron microscopy and spectrophotometry. The single-phased Ag20 films deposited at values of Ts below 200℃ are （111） preferentially oriented, which may be due to the smallest free energy of the （111） crystalline face. The film crystallization becomes poor as the value of Ts increases from 100℃ to 225℃. In particular, the Ag20 film deposited at Ts=225℃ loses the （111） preferential orientation. Correspondingly, the film surface morphology obviously evolves from a uniform and compact surface structure to a loose and gullied surface structure. With the increase of Ts value, the transmissivity and the reflectivity of the films in the transparent region are gradually reduced, while the absorptivity gradually increases, which may be attributed to an evolution of the crystalline structure and the surface morphology of the films.     

Observation of enhanced two-photon absorption in ZnS quantum dots at an ultraviolet wavelength

Two-photon absorption(2PA) in zinc sulphide(ZnS) and Mn2+-doped ZnS quantum dots is reported by the z-scan technique,with nanosecond pulsed laser radiation at 355 nm.The observed values of the 2PA cross section of all the samples are 105 times larger than that of bulk ZnS.     

纳米VOx薄膜在空气中的电学特性退化研究

采用射频磁控溅射法在氮化硅衬底上沉积纳米VO_x薄膜,利用X射线衍射、原子力显微镜分别对薄膜的结晶形态及表面形貌进行表征.研究了纳米VO_x薄膜在空气中长时间暴露后的方块电阻、热滞回线等电学特性的变化情况,并分析这些变化给器件带来的影响.利用X射线光电子能谱仪、傅里叶变换红外光谱仪分析对比新制与久置薄膜的组分及分子结构差异.研究表明,暴露在空气中的纳米VO_x薄膜方块电阻增大是因为低价钒离子被吸附氧原子氧 关键词： x薄膜')" href="#">纳米VO_x薄膜 磁控溅射 电学特性 退化     

O2流量对磁控溅射N掺杂TiO2薄膜成分及晶体结构的影响

利用直流脉冲磁控溅射方法在室温下通过改变O₂流量制备具有不同晶体结构的N掺杂TiO₂薄膜,利用台阶仪、X射线光电子能谱仪、X射线衍射仪、紫外-可见分光光度计等设备对薄膜沉积速率、化学成分、晶体结构、禁带宽度等进行分析.结果表明:所制备的薄膜元素配比约为TiO_1.68±0.06N_0.11±0.01,N为替位掺杂,所有样品退火前后均未形成Ti—N相结构,N掺杂TiO₂薄膜的沉积速率、晶体结构等主要依赖于O₂流量.在O₂流量为2 sccm时,N掺杂TiO₂薄膜沉积速率相对较高,薄膜为非晶态结构,但薄膜内含有锐钛矿(anatase)和金红石(rutile)相晶核,退火后薄膜呈anatase和rutile相混合结构,禁带宽度仅为2.86 eV.随着O₂流量的增加,薄膜沉积速率单调下降,退火后样品禁带宽度逐渐增加.当O₂流量为12 sccm时,薄膜为anatase相择优生长,退火后呈anatase相结构,禁带宽度为3.2 eV.综合本实验的分析结果,要在室温条件下制备晶态N掺杂TiO₂薄膜,需在高O₂流量(＞10 sccn)条件下制备. 关键词： 2薄膜')" href="#">N掺杂TiO₂薄膜 磁控溅射 化学配比 晶体结构     

梯度磁场中薄膜厚度梯度的形成机理

借助于基片下方放置的磁铁，在溅射的放电空间中引入了纵向的梯度磁场，辉光放电时，其外貌发生了显著的收缩，由此沉积的薄膜在平面内存在明显的厚度梯度，用磁场中带电粒子的运动理论解释了此种薄膜的形成机制。     

Online re-optimization of optical filters on a production sputter tool

This contribution presents a magnetron sputter deposition tool with broadband optical monitor and online re-optimization capability for high volume production. The layer termination relies on a comparison of the actually measured reflection spectrum with a pre-calculated target spectrum. Spectra recorded after each deposited layer are analyzed by the re-optimization module and in case of significant deviations layer thicknesses and target spectra for the remaining layers are recalculated. This technique significantly improves the performance and reproducibility in case of highly denlanding coating designs and is able to correct abnormal production errors in individual layers, which will lead to coating failure without re- optimization.     

Influence of Thickness of Field Emission Characteristics of Nanometre Boron Nitride Thin Films

Nanometre boron nitride (BN) thin films with various thickness (54-135nm) were prepared on Si(100) by rf magnetic sputtering physical vapour deposition. The field emission characteristics of the BN thin films were measured in an ultrahigh vacuum system. A threshold electric field of 11V/μm and the highest emission current density of 240μA/cm^2 at an electric field of 23V/μm were obtained for the about 54-nm-thick BN film. The threshold electric field increases with increasing the thickness in the nanometre range. The Fowler-Nordheim plots show that electrons were emitted from BN to vacuum by tunnelling through the potential barrier at the surface of BN thin films.     

MgO衬底NbN/AlN/NbN多层膜的制备

本文主要讨论磁控溅射设备制备的NbN/AlN/NbN三层结构的技术工艺,为制备All-NbN的 NbN/AlN/NbN SIS 隧道结作准备.我们在室温下利用直流磁控溅射工艺制备了单晶NbN薄膜,并对其超导电性做了初步的研究;又利用射频磁控溅射工艺制备了取向较好的AlN薄膜.我们利用磁控溅射方法制作NbN/AlN/NbN多层薄膜,然后对制备SIS隧道结进行了一些探索.     

中频脉冲磁控溅射制备氮化铝薄膜

使用中频脉冲磁控溅射技术分别在Si（111）、玻璃以及高速钢基底上沉积A1N薄膜，利用X射线衍射、X射线光电子谱、扫描电镜、紫外荧光、FTIR、精密阻抗分析仪等研究了薄膜的结构、光学及电学性质，结果表明，生成的（002）取向多晶A1N薄膜在可见光区域平均透过率超过75％，在紫外区域也具有较高的透过经，在低频交流区域具有良好的绝缘性。