大气压氩气针-板介质阻挡放电的光电诊断

利用针-板介质阻挡放电装置,在4 mm长的气隙中产生了大气压氩气射流等离子体。利用电学方法实现了对放电电流和电荷量的同时测量,并且对放电脉冲数和放电功率进行了研究;利用发射光谱法对放电等离子体进行了空间分辨测量,并根据ArⅠ696.54 nm的Stark展宽计算了等离子体的电子密度。结果发现:随着外加电压的增加,每个周期内的放电脉冲数增加,放电功率也增加。随着针头距离的增加,电子密度由2.94×1015cm-3逐渐减小到2.28×1015cm-3。实验结果表明:电场强度对放电脉冲数和电子密度的空间分布起重要作用。     

基于电参数的日光灯放电的等离子体特性的研究

利用数字示波器对电压电流的测量数据,通过各种电参数计算和谐波分析,研究了气体放电的等离子体一维壁稳弧通道模型,并对放电管的负载性质进行了讨论.     

高重复频率脉冲功率技术及其应用:（4）半导体开关的特长与局限性

综合叙述了功率半导体开关在高重复频率脉冲功率技术中的意义和使用方法。并通过与传统脉冲功率开关的比较，归纳了半导体开关的特长和缺陷。在举例说明了半导体开关的控制方法以后，介绍了几种有效提高半导体开关工作能力的电路方法,包括采用多个器件的串联与并联、电压叠加、开关器件的组合与互补等方法。     

Low-parasitic ESD protection strategy for RF ICs in 0.35μm CMOS process

A systemic and comprehensive ESD-induced parasitic model is presented in this paper, which is used to analyse the parasitic influences of electrostatic discharge (ESD) protection circuits on the performance of radio frequency applications. A novel low-parasitic ESD protection structure is made in a 0.35\mum 1P3M silicide CMOS process. The measured results show that this novel structure has a low parasitic capacitance about 310fF and a low leakage current about 12.2nA with a suitable ESD robustness target about 5kV human body model.     

Characterization of the high—voltage pulsed discharge plasma of ammonia by emission spectroscopy

We have used optical emission spectroscopy to characterize the high-voltage pulsed discharge of ammonia.Ammonia was highly dissociated in the discharge at low pressures.More atomic nitrogen was generated as compared to the discharge of nitrogen gas at the same pressure of 0.8kPa.We discuss the elimination of the oxygen impurity in the ammonia discharge,and we estimate the time-dependent atomic excitation temperature and the electron density from the measured spectra.     

微波放电脱除NO

报道一种不用催化剂,一步脱除NO的新方法--常压微波放电法。探讨在(NO,He),(NO.O₂,He)和(NO,O₂,H₂O,He)体系中微波放电脱除NO的差异。研究结果表明,在(NO,He)条件下可实现一步高效脱除NO,在(NO,O₂,He)条件下也可实现80%左右的NO转化,其中N₂的选择性高达80%,而H₂O的加入并未影响N₂的产率。同时发现,随着微波功率的加大,NO转化率也增大,而N₂的选择性增大得更多。最终可达到一个平衡值。最后研究了NO和O₂浓度及气体流量对NO脱除的影响。     

Morphological study of the localized growth of materials in dielectric barrier discharge

The localized growth of materials has been realized in a dielectric barrier discharge reactor in the mixture of acetylene and argon in previous work. In this paper, the morphology of the materials synthesized in the process is studied. The results indicate that the polymer's structure consists of three layers. The layer near the substrate is homogeneous with thickness of several micrometres; the middle layer is composed of dense bulges with height of about more than 10μm in average. The distance between two neighbouring bulges is about 230μm; the top layer is made up of a few large columns with the height up to 2mm, and with the average distance of about 3.5mm. The growth of the three layers corresponds to three types of discharge. The discharge mechanism is analysed through studying the morphology of the polymer. It can be deduced from the morphology that the first and second discharge phases should belong to the Townsend breakdown, and the last discharge phase should be explained on the basis of the streamer mechanism.     

Basic characteristics of an atmospheric pressure rf generated plasma jet

A plasma jet has been developed which operates using radio frequency (rf) power and produces a stable homogeneous discharge at atmospheric pressure. Its discharge characteristics, especially the dependence of stable discharge operating range on the feed gas, were studied, and the electric parameters such as RMS current, RMS voltage and reflected power were obtained with different gas flows. These studies indicate that there is an optimum range of operation of the plasma jet for a filling with a gas mixture of He and O_2. Two "failure" modes of the discharge are identified. One is a filamentary arc when the input power is raised above a critical level, another is that the discharge disappears gradually as the addition of O_2 approaches 3.2%. Possible explanations for the two failure modes have been given. The current and voltage waveform measurements show that there is a clear phase shift between normal and failure modes. In addition, I－V curves as a function of pure helium and for 1% addition of oxygen have been studied.     

速度调制光谱技术特性的研究

利用N2^ A^2Ⅱu-X^2∑g^ (2-0)Meinel带系谱线研究了速度调制光谱技术的特性。从理论和实验上考察了速度调制谱信号强度与放电电流、放电气体的气压以及真空泵的泵速的关系。利用所获得的研究结果提高谱仪的灵敏度和分辨率达3倍以上,实验运行开支节省3／4左右。表明该实验研究具有重要的应用价值。     

射频放电阻抗测量用于等离子体诊断研究

利用自行研制的传感器和测量装置,通过对射频放电电压、电流以及其相位角的精确测定,算出放电管的总阻抗,结合放电管的等效电路模型与Godyak等建立的射频放电模型,对射频激励铜离子激光管在氦气中的放电特性进行了研究,得出射频激励铜离子激光器不同气压及电流密度下的等离子体电阻、容抗、鞘层厚度及电子密度 关键词： 射频放电 阻抗测量 等离子体诊断