Si3.5Sb2Te3 Phase Change Material for Low-Power Phase Change Memory Application

Novel Si3.5Sb2Te3 phase change material for phase change memory is prepared by sputtering of Si and Sb2Te3 alloy targets. Crystalline Si3.5Sb2Te3 is a stable composite material consisting of amorphous Si and crystalline Sb2Te3, without separated Te phase. The thermally stable Si3.5Sb2Te3 material has data retention ability （10 years at 412K） better than that of the Ge2Sb2Te5 material （10 years at 383 K）. Phase change memory device based on Si3.5Sb2Te3 is successfully fabricated, showing low power consumption. Up to 2.2 × 107 cycles of endurance have been achieved with a resistance ratio lager than 300.     

Nanoscale Tapered Pt Bottom Electrode Fabricated by FIB for Low Power and Highly Stable Operations of Phase Change Memory

Phase change random access memory （PC-RAM） based on Si2Sb2Te5 with a Pt tapered heating electrode （Pt-THE）, which is fabricated using a focus ion beam （FIB）, is investigated. Compared with the tungsten electrode, the Pt-THE facilitates the temperature rise in phase change material, which causes the decrease of reset voltage from 3.6 to 2.7 V. The programming region of the cell with the Pt-THE is smaller than that of the cell with a cylindrical tungsten heating electrode. The improved performance of the PC-RAM with a Pt-THE is attributed to the higher resistivity and lower thermal conductivity of the Pt electrode, and the reduction of the programming region, which is also verified by thermal simulation.     

静态随机访问存储器型现场可编程门阵列辐照效应测试系统研制

 在调研静态随机访问存储器型现场可编程门阵列(FPGA)器件空间辐照效应失效机理的基础上,详细论述FPGA辐照效应测试系统内部存储器测试、功能测试及功耗测试的实现原理,给出了系统的软硬件实现方法。所建立的系统可以测试FPGA器件的配置存储器翻转截面、块存储器翻转截面、功能失效截面、闭锁截面等多个参数,其长线传输距离达到50 m以上,最大可测门数达到了100万门,为FPGA辐照效应研究提供了测试平台。     

生物光盘系统参数对输出信号的影响研究

以Hopkins光盘标量衍射理论为基础,建立了生物光盘系统理论分析模型,根据生物光盘的工作特点,研究了光学系统参数、传感单元尺寸参数对系统输出信号的影响。计算结果表明,为实现较高的传感灵敏度,理想情况下聚焦光斑直径与方形传感单元最佳长、宽的匹配关系需满足1：0．5665。选取数值孔径NA=0．07,高斯参数σ最佳取值为0．7,此时矩形传感单元最佳尺寸为4．3μm×4．3μm,并给出了理想情况下输出光功率最小值只与传感单元高度的线性关系。     

相变存储单元RESET多值存储过程的数值仿真研究

使用数值仿真方法对相变随机存储器存储单元的RESET操作的多值存储过程进行了研究,建立了三维存储单元模型,用有限元法解Laplace方程及热传导方程以模拟电脉冲作用下的存储单元物性变化过程.计算出单元内相变层的相态分布及单元整体电阻,分析了单元内部尺寸变化对多值存储过程及状态的影响.结果表明,通过精确控制输入电脉冲,相变存储单元能够实现4值存储;多值存储状态受单元内相变层厚度及下电极接触尺寸变化的影响较大;存储状态在80℃的环境温度下均可保持10年以上不失效.     

纳米静态随机存储器质子单粒子多位翻转角度相关性研究

器件特征尺寸的减小带来单粒子多位翻转的急剧增加, 对现有加固技术带来了极大挑战. 针对90 nm SRAM(static random access memory, 静态随机存储器)开展了中高能质子入射角度对单粒子多位翻转影响的试验研究, 结果表明随着质子能量的增加, 单粒子多位翻转百分比和多样性增加, 质子单粒子多位翻转角度效应与质子能量相关. 采用一种快速计算质子核反应引起单粒子多位翻转的截面积分算法, 以Geant4中Binary Cascade模型作为中高能质子核反应事件发生器, 从次级粒子的能量和角度分布出发, 揭示了质子与材料核反应产生的次级粒子中, LET(linear energy transfer)最大, 射程最长的粒子优先前向发射是引起单粒子多位翻转角度相关性的根本原因. 质子能量、临界电荷的大小是影响纳米SRAM器件质子多位翻转角度相关性的关键因素. 质子能量越小, 多位翻转截面角度增强效应越大; 临界电荷的增加将增强质子多位翻转角度效应.     

二元氧化物绝缘层的溶液法制备及在阻变存储器中的应用

阻变存储器(RRAM)凭借可高度集成、可同时存储和运算、运行速率快、功耗低等特性,成为最具潜力的存储技术之一。因电学性能优良且与互补金属氧化物半导体(CMOS)兼容性好,二元氧化物材料在RRAM的发展中具有重要意义。与传统绝缘层沉积工艺不同,溶液法制备绝缘层是先将前驱体溶液制成薄膜,再将薄膜通过不同的工艺转化为绝缘层。因此前驱体溶液种类以及转化工艺均对所制备的绝缘层的微观结构、化学组成和电学性能具有直接的影响。本文首先简要介绍了RRAM的发展历程及作用机制;其次综述了溶液法制备氧化物材料在忆阻器中的应用,重点围绕前驱体溶液组成、转化机理与所制备氧化物绝缘层结构性能关系对已报道的结果进行分析,最后阐述了溶液法制备绝缘层材料面临的关键问题并展望了其未来发展方向。     

Spectroscopic ellipsometric properties and resistance switching behavior in Si_x（ZrO_2）_（100-x） films

We prepare Si x (ZrO 2 ) 100 x composite films using the co-sputtering method. The chemical structures of the films which are prepared under different conditions are analyzed with X-ray photoemission spectroscopy. Thermal treatment influences on optical property and resistance switching characteristics of these composite films are investigated by spectroscopic ellipsometry and semiconductor parameter ana- lyzer, respectively. With the proper Si-doped Si x (ZrO 2 ) 100 x interlayer, the Al/ Si x (ZrO 2) 100 x /Al device cell samples present very reliable and reproducible switching behaviors. It provides a feasible solution for easy multilevel storage and better fault tolerance in nonvolatile memory application.     

不同集成度SRAM硬X射线剂量增强效应研究

给出了不同集成度16K—4Mb随机静态存储器SRAM在钴源和北京同步辐射装置BSRF3W1白光束线辐照的实验结果;通过实验在线测得SRAM位错误数随总剂量的变化,给出相同辐照剂量时20—100keVX光辐照和Co⁶⁰γ射线辐照的剂量损伤效应的比例因子;给出集成度不同的SRAM器件抗γ射线总剂量损伤能力与集成度的关系;给出不同集成度SRAM器件的X射线损伤阈值.这些结果对器件抗X射线辐射加固技术研究有重要价值.     

Information Erasure and Recovery in Quantum Memory

We show that information in quantum memory can be erased and recovered perfectly if it is necessary. The fact that the final states of environment are completely determined by the initial states of the system allows an erasure operation to be realized by a swap operation between the system and an ancilla. Therefore, the erased information can be recovered. When there is an irreversible process, e.g. an irreversible operation or a decoherence process, in the erasure process, the information would be erased perpetually. We present that quantum erasure will also give heat dissipation in the environment. A classical limit of quantum erasure is given to coincide with Landauer‘s erasure principle.