Online re-optimization of optical filters on a production sputter tool

This contribution presents a magnetron sputter deposition tool with broadband optical monitor and online re-optimization capability for high volume production. The layer termination relies on a comparison of the actually measured reflection spectrum with a pre-calculated target spectrum. Spectra recorded after each deposited layer are analyzed by the re-optimization module and in case of significant deviations layer thicknesses and target spectra for the remaining layers are recalculated. This technique significantly improves the performance and reproducibility in case of highly denlanding coating designs and is able to correct abnormal production errors in individual layers, which will lead to coating failure without re- optimization.     

Method to accurate calibrate deposition rates of EUV multilayer coatings

Random thickness error is an important factor which effects the calibration accuracies of deposition rates for extreme ultraviolet （EUV） multilayer coatings fabricated by sputter deposition techniques. A least square fitting method is proposed to determine deposition rates and extract random thickness errors accurately. The validity of this method is shown by evaluating two deposition systems with control abilities of -0.1 nm and better than 0.01 nm respectively.     

Oscillatory disturbance in force calibration of optical tweezers

In the calibration of the optical trap stiffness, it is found that there appears an attenuating oscillation as an oscillatory disturbance added to the trapped bead movement, when the scanner is driven by a triangular wave input.An equivalent oscillator model is put forward to explain the mechanism of the oscillatory disturbance. Both the measurements and calculations show that the attenuating oscillation comes from the oscillation of the scanner and the triangular wave drive causes this additional oscillation of the scanner. Furthermore, the analysis indicates that the oscillatory disturbance will become stronger, when the stiffness of the trap increases or the natural frequency of the scanner decreases. We adopt another driving way, i.e. a sinusoidal wave input is used instead of the triangular wave input. Our experiment has verified that in this case the oscillatory disturbance is eliminated completely.     

酶标分析仪检定用中性滤光片的校准

提出酶标分析仪检定用中性滤光片的校准方法，并用校准实例对校准方法进行了验证。结合校准方法，根据JJF 1059.1—2012《测量不确定度评定与表示》建立了数学模型，不确定度的来源有测量结果的重复性、分光光度计透射比误差、分光光度计杂散辐射、中性滤光片年稳定性、中性滤光片均匀性，按该校准方法校准的中性滤光片，校准结果的不确定度为U=0.005(k=2)，校准结果能够满足JJG 861—2007《酶标分析仪检定规程》对中性滤光片不确定度U≤0.01(k=2)的要求，可用于开展酶标分析仪吸光度值的校准工作。     

Free Field Reciprocity Calibration in a Convergent Spherical Acoustic Wave of a Focusing Transducer

Based on the reciprocity theorem of the acoustic field,we derive the formula of the reciprocity coefficient of a convergent spherical acoustic wave and we calculate a series of diffraction corrective factor curves of the reciprocity coefficient of transducers.Using these formulae and corrective factors,we calibrate the free field transmitting current response and the free field voltage sensitivity of a focusing transducer using the self-reciprocity method.The experimental results of the reciprocity calibration of the focusing transducer in the frequency range of 2MHz to 5.4MHz are presented.     

P‖Cmin随机算法研究

本文研究了P‖Cmin的随机算法及其最坏情况界，我们给出了Pm‖Cmin在线排序问题新的随机上界，并给出了P2‖Cmin的最好随机算法，其最坏情况界为2／3。对P2‖Cmin已知工件加工时间递减半在线模型，我们给出了一最坏情况界为6／7的随机算法并证明了它为最好的。     

一种新颖的在线监测仪器--离子流动光谱仪

离子流动光谱仪（IMS）体积小，重量轻，耗能少，价格便宜，灵敏度高，适用范围广，能用于在线分析，是一种前景广阔的监测仪器。但有关的报道在国内却很少，本文介绍了它的基本原理、仪器构造、特点，局限性以及与色谱和质谱的连用，向小型化发展的方向。从德国光谱化学与应用光谱学研究所在此方面所作的工作讨论了离子流动光谱仪在爆炸物监控、化学武器鉴定、毒品稽查以及在线工业分析和环境监测中的应用。     

天然水中微量稀土元素镧的流动注射在线预浓集ICP光谱法测定

本文采用P507萃淋树脂为固定相,应用流动注射(FI)在线预浓集技术,建立了镧的ICP发射光谱分析方法,对天然水中的微量镧进行了测定,获得满意结果。     

单机排序问题1|rj,prmp|∑wj(1-e-acj)的动态在线调度

本文首先一般化了可中断的概念,并建立了相应的中断-安装重复模型,然后研究了单机排序问题1 |rj,prmp|∑wj(1-c-acj)在中断-重复和中断-安装重复模型下的动态在线排序问题,给出了只考虑当前可用信息而不是考虑全部任务信息的在线调度规则.