Low-Temperature Growth of Polycrystalline silicon Films by SiCl4／H2 rf Plasma Enhanced Chemical Vapour Deposition

Polycrystalline silicon film was directly fabricated at 200℃ by the conventional plasma enhanced chemical vapour deposition method from SiCl4 with H2 dilution. The crystallization depends strongly on the deposition power.The maximum crystMlinity and the crystalline grain size are over 80% and 200—50Onm, respectively. The results of energy dispersive spectroscopy and infrared spectroscopy measurements demonstrate that the film is mostly composed of silicon, without impurities such as Cl, N, C and bonded H. It is suggested that the crystallization at such a low temperature originates from the effects of chlorine, i.e., in-situ chemical, etching, in-situ chemical cleaning, and the detachment of bonded H.     

光辅助超高真空CVD系统制备SiGe异质结双极晶体管研究

介绍了采用紫外光化学汽相淀积(UVCVD)、超高真空化学汽相淀积(UHVCVD)和超低压化学汽相淀积(ULPCVD)技术研制的化学汽相淀积(CVD)工艺系统,简称U³CVD系统.应用该系统,在450℃低温和10^-7Pa超高真空环境下研制出了硅锗(SiGe)材料和硅锗异质结双极晶体管(SiGe HBT)材料.实验表明,该系统制备的SiGe HBT材料性能良好.     

消费者化学--一门受大学生欢迎的跨系选修课

近年来,大学生的文化素质教育受到高度重视,应运而生的跨系选修课层出不穷,如音乐、美术欣赏,文学作品选读等均受到欢迎.理科中除计算机属热门外,其他选修课均受到不同程度的冷落,特别是对文科学生,问津者更是寥寥无几.     

全气相化学激光体系的直流放电研究

 为了提高化学激光体系(AGIL)中F原子的产率，采用直流放电引发方式，对棒式电极的放电特性进行了研究。在对NF3/He混合气体进行解离时，通过选择不同平衡电阻，得到了3 kW左右的放电注入功率。用光谱分析仪对F原子产率进行了测量。通过拟合计算可得：一个NF3分子能够解离出1.3～1.5个F原子。     

Spectroscopic and Structural Study of the 1：2 Aluminium（Ⅲ） Complex of Quercetin

Complex formation between aluminium and quercetin（Q） in methanol was investigated by means of 27^Al solid-state, 13^C and 1^H NMR and MS（ESI）, UV and IR spectra. Formation of the 1：2 complex was favored in methanol relative to all other solvent and the predominant species observed of Al（Ⅲ） has a 1：2 stoichiometry. The fine structure of 1：2 aluminum complex of quercetin was that the aluminum central atom chelated with two quereetin molecules and two methoxyl groups between two five membered rings, its coordination is six, the chelated site was 3-hydroxy-4-carbonyl.     

低温太阳热能与化学链燃烧相结合控制CO2分离动力系统

本文探索并提出控制CO2分离的低温太阳热能与清洁合成燃料甲醇-三氧化二铁化学链燃烧相结合的新颖能源动力系统。基于图象(?)分析方法,明确地指出甲醇化学链燃烧能量释放过程燃烧堋损失减小和低温太阳热能品位提升的机理。从能源有效利用和环境相容出发,研究和揭示化学链燃烧与太阳能有机整合共同减小CO2分离能耗的特性规律。相比不分离常规联合循环,新系统(?)效率提高约6．2个百分点;与分离CO2的联合循环相比,新系统媚效率提高约14．2个百分点。同时,低温太阳热能热转功效率可达到22．5％。     

金属上化学吸附的族模型量子化学研究

簇模型方法是研究化学吸附的最重要的量子化学方法之一。本文对＇簇－－表面类比法＇的物理内涵、研究现状、以及发展趋势作了简要的评述。