Applications of “Dry” Processing in the Microelectronics Industry Using Carbon Dioxide

Condensed carbon dioxide (CO₂) has emerged as a leading enabler of advanced semiconductor manufacturing processes. By exploiting the physical properties of CO₂, some of the current challenges encountered in microelectronics processing related to shrinking feature sizes and materials compatibility have been addressed. Furthermore, the potential for reduction of chemicals used in processing is realized. Applications of CO₂ in microelectronics operations such as wafer cleaning, spin-coating, development, and stripping of photoresists, drying, low-k film preparation and repair, etching, and metal deposition are discussed.     

Impossibility of negative group velocities in a periodic layer structure with or without loss

The limiting group velocities available with a one-dimensional periodic medium composed of 1/4 wavelength sections are studied. For all realistic combination of medium parameters, it is found that there are superior and inferior limits to the group velocity. We use numerical analysis to investigate the effect of the refractive index mismatch, the phase velocities and the attenuation coefficient on the limits of group velocity. We show that negative group velocities are not possible in a linear passive periodic medium, and discuss why a recent report of negative tunnelling times in a passive periodic system may be explained in terms of the relatively large experimental uncertainty in determining the tunnelling times.     

Ⅱ—Ⅵ族稀磁半导体ZnSe／Zn1—xMnxSe超晶格中的应力效应

本文通过Ⅱ－Ⅵ族稀磁半导体超晶格ＺｎＳｅ／Ｚｎ１－ｘＭｎｘＳｅ的光致发光谱的测量，对其应力效应进行了讨论。样品的组分ｘ＝０．２，０．３，０．４，测量温度为Ｔ＝１１￣３００Ｋ。结果表明：由于应力效应，ＺｎＳｅ／Ｚｎ１－ｘＭｎｘＳｅ超晶格中的激子能量随ｘ值增加而发生红移。在相同组分下，不同阱、垒宽度比使应力的分布产生明显变化，从而影响超晶格中激子能量。实验与理论计算结果相一致。超晶格中光致发光峰随温度     

一种长狭缝软X射线扫描相机系统

 介绍了一种长狭缝软X射线扫描相机系统。其有效工作面积达0.1mm×30mm，以满足宽频谱记录要求，通过优化变像管电子光学系统设计，尽可能地减小了时间畸变；提出利用计算机软件对残存时间畸变进行高精度校正的方法。动态测试表明，在2.5cm/ns的扫描速度下，其动态空间分辨率优于15Lp/mm，时间分辨率优于5ps。     

光子晶体光纤模式特征的研究

从基空间填充模出发，将光子晶体光纤的包层等效成均匀介质，从而将光子晶体光纤等效为阶跃折射率光纤。利用等效折射率模型，对光子晶体光纤的模式特征进行了详尽的研究，主要包括模式特性、传输常量、模场分布、功率限制特性、瑞利散射损牦特性、色散特性，等等。并通过功率限制因子这一参量将它与单模光纤进行比较。结果表明，光子晶体光纤单模工作波长范围比较宽，功率限制因子比较高，可用于制作更高抽运效率的光纤放大器。     

负载型复合半导体MoO3-TiO2/SiO2的结构与吸光性能

采用表面改性法制备了负载型复合半导体材料MoO3TiO2/SiO2,用X射线衍射、比表面测定、透射电子显微镜、红外光谱、拉曼光谱、紫外可见漫反射等技术对固体材料的结构进行了表征,并从固体材料的光响应性能和化学吸附性能方面进行了评价.结果表明,MoO3TiO2/SiO2表面存在着高度分散的MoO3和TiO2微晶,它们之间有一定的复合和键联作用,形成了Mo-O-Ti键;MoO3TiO2/SiO2复合材料表面对丙烷分子有化学吸附性能,Mo=O键上的端氧是C3H8的活性吸附位;与本体MoO3和TiO2相比,复合后MoO3TiO2/SiO2的能隙值有所增加,在紫外光区的吸光强度也明显加强,使得光生载流子的复合效率得到抑制,并产生了一定的量子尺度效应.